Abstract

A pinhole camera has been designed, fabricated, and tested for the production of multiple images for integrated circuits, consisting of an array of precisely positioned, uniform diameter pinholes and a vacuum back to hold the film or plate. This camera was designed to replace the step-and-repeat camera method that is presently used for producing multiple images. The two basic requirements for repetition of circuit patterns are the achievement of high image quality and precise registration between all the masks in a set. The arrangement discussed here permits lines of 12.5 μm width in the final working mask with precise registration to all other masks in the set.

© 1966 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription