Abstract

The controlled removal of material from the surface of insulators has been observed by using a positive ion beam. In the energy range 0.5–2.0 MeV the sputtering yield was observed to be unity. The application of this technique to the manufacture of high quality optical surfaces is discussed.

© 1966 Optical Society of America

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References

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  1. A. B. Meinel, S. Bashkin, D. A. Loomis, Appl. Opt. 4, 1674 (1965).
    [CrossRef]
  2. G. K. Wehner, Advan. Electron. Electron Devices 7, 239 (1955).
    [CrossRef]
  3. M. Koedam, Phillips Res. Repts. 16, 101 (1961).
  4. L. Holland, Nature 181, 1451 (1958).
    [CrossRef]
  5. L. Holland, The Properties of Glass Surfaces (Chapman and Hall Ltd., London, 1964).
  6. J. Koch, Nature 164, 19 (1949).
    [CrossRef] [PubMed]
  7. R. L. Hines, J. Appl. Phys. 28, 587 (1957).
    [CrossRef]
  8. W. Primak, Phys. Rev. 110, 1240 (1958).
    [CrossRef]
  9. R. L. Hines, R. Arndt, Phys. Rev. 119, 623 (1960).
    [CrossRef]
  10. W. Primak, J. Appl. Phys. 35, 1342 (1964).
    [CrossRef]
  11. R. L. Hines, R. Wallor, J. Appl. Phys. 32, 202 (1961).
    [CrossRef]
  12. A. I. Akishin, S. S. Vasilev, L. N. Isaev, Bull. USSR Acad. Sci. 26, 1379 (1963).
  13. G. V. Jorgenson, G. K. Wehner, J. Appl. Phys. 36, 2672 (1965).
    [CrossRef]
  14. H. P. Smith, D. W. DeMichelle, J. N. Khan, J. Appl. Phys. 36, 1952 (1965).
    [CrossRef]
  15. J. T. McCartney, S. Erqun, Proceedings of the 3rd Carbon Conference, Buffalo, N.Y. (Pergamon Press, Inc., New York, 1959), p. 223.
  16. K. H. Zaininger, A. G. Revesz, RCA Rev. 25, 85 (1964).
  17. W. S. Moore, S. R. Logan, L. C. Luther, S. N. Brown, Le Bombardement Ionique, Theories et Applications (Centre National de La Recherche Scientifique, Paris, 1962).
  18. W. Primak, E. Edwards, Phys. Rev. 128, 2580 (1962).
    [CrossRef]

1965

G. V. Jorgenson, G. K. Wehner, J. Appl. Phys. 36, 2672 (1965).
[CrossRef]

H. P. Smith, D. W. DeMichelle, J. N. Khan, J. Appl. Phys. 36, 1952 (1965).
[CrossRef]

A. B. Meinel, S. Bashkin, D. A. Loomis, Appl. Opt. 4, 1674 (1965).
[CrossRef]

1964

K. H. Zaininger, A. G. Revesz, RCA Rev. 25, 85 (1964).

W. Primak, J. Appl. Phys. 35, 1342 (1964).
[CrossRef]

1963

A. I. Akishin, S. S. Vasilev, L. N. Isaev, Bull. USSR Acad. Sci. 26, 1379 (1963).

1962

W. Primak, E. Edwards, Phys. Rev. 128, 2580 (1962).
[CrossRef]

1961

R. L. Hines, R. Wallor, J. Appl. Phys. 32, 202 (1961).
[CrossRef]

M. Koedam, Phillips Res. Repts. 16, 101 (1961).

1960

R. L. Hines, R. Arndt, Phys. Rev. 119, 623 (1960).
[CrossRef]

1958

W. Primak, Phys. Rev. 110, 1240 (1958).
[CrossRef]

L. Holland, Nature 181, 1451 (1958).
[CrossRef]

1957

R. L. Hines, J. Appl. Phys. 28, 587 (1957).
[CrossRef]

1955

G. K. Wehner, Advan. Electron. Electron Devices 7, 239 (1955).
[CrossRef]

1949

J. Koch, Nature 164, 19 (1949).
[CrossRef] [PubMed]

Akishin, A. I.

A. I. Akishin, S. S. Vasilev, L. N. Isaev, Bull. USSR Acad. Sci. 26, 1379 (1963).

Arndt, R.

R. L. Hines, R. Arndt, Phys. Rev. 119, 623 (1960).
[CrossRef]

Bashkin, S.

Brown, S. N.

W. S. Moore, S. R. Logan, L. C. Luther, S. N. Brown, Le Bombardement Ionique, Theories et Applications (Centre National de La Recherche Scientifique, Paris, 1962).

DeMichelle, D. W.

H. P. Smith, D. W. DeMichelle, J. N. Khan, J. Appl. Phys. 36, 1952 (1965).
[CrossRef]

Edwards, E.

W. Primak, E. Edwards, Phys. Rev. 128, 2580 (1962).
[CrossRef]

Erqun, S.

J. T. McCartney, S. Erqun, Proceedings of the 3rd Carbon Conference, Buffalo, N.Y. (Pergamon Press, Inc., New York, 1959), p. 223.

Hines, R. L.

R. L. Hines, R. Wallor, J. Appl. Phys. 32, 202 (1961).
[CrossRef]

R. L. Hines, R. Arndt, Phys. Rev. 119, 623 (1960).
[CrossRef]

R. L. Hines, J. Appl. Phys. 28, 587 (1957).
[CrossRef]

Holland, L.

L. Holland, Nature 181, 1451 (1958).
[CrossRef]

L. Holland, The Properties of Glass Surfaces (Chapman and Hall Ltd., London, 1964).

Isaev, L. N.

A. I. Akishin, S. S. Vasilev, L. N. Isaev, Bull. USSR Acad. Sci. 26, 1379 (1963).

Jorgenson, G. V.

G. V. Jorgenson, G. K. Wehner, J. Appl. Phys. 36, 2672 (1965).
[CrossRef]

Khan, J. N.

H. P. Smith, D. W. DeMichelle, J. N. Khan, J. Appl. Phys. 36, 1952 (1965).
[CrossRef]

Koch, J.

J. Koch, Nature 164, 19 (1949).
[CrossRef] [PubMed]

Koedam, M.

M. Koedam, Phillips Res. Repts. 16, 101 (1961).

Logan, S. R.

W. S. Moore, S. R. Logan, L. C. Luther, S. N. Brown, Le Bombardement Ionique, Theories et Applications (Centre National de La Recherche Scientifique, Paris, 1962).

Loomis, D. A.

Luther, L. C.

W. S. Moore, S. R. Logan, L. C. Luther, S. N. Brown, Le Bombardement Ionique, Theories et Applications (Centre National de La Recherche Scientifique, Paris, 1962).

McCartney, J. T.

J. T. McCartney, S. Erqun, Proceedings of the 3rd Carbon Conference, Buffalo, N.Y. (Pergamon Press, Inc., New York, 1959), p. 223.

Meinel, A. B.

Moore, W. S.

W. S. Moore, S. R. Logan, L. C. Luther, S. N. Brown, Le Bombardement Ionique, Theories et Applications (Centre National de La Recherche Scientifique, Paris, 1962).

Primak, W.

W. Primak, J. Appl. Phys. 35, 1342 (1964).
[CrossRef]

W. Primak, E. Edwards, Phys. Rev. 128, 2580 (1962).
[CrossRef]

W. Primak, Phys. Rev. 110, 1240 (1958).
[CrossRef]

Revesz, A. G.

K. H. Zaininger, A. G. Revesz, RCA Rev. 25, 85 (1964).

Smith, H. P.

H. P. Smith, D. W. DeMichelle, J. N. Khan, J. Appl. Phys. 36, 1952 (1965).
[CrossRef]

Vasilev, S. S.

A. I. Akishin, S. S. Vasilev, L. N. Isaev, Bull. USSR Acad. Sci. 26, 1379 (1963).

Wallor, R.

R. L. Hines, R. Wallor, J. Appl. Phys. 32, 202 (1961).
[CrossRef]

Wehner, G. K.

G. V. Jorgenson, G. K. Wehner, J. Appl. Phys. 36, 2672 (1965).
[CrossRef]

G. K. Wehner, Advan. Electron. Electron Devices 7, 239 (1955).
[CrossRef]

Zaininger, K. H.

K. H. Zaininger, A. G. Revesz, RCA Rev. 25, 85 (1964).

Advan. Electron. Electron Devices

G. K. Wehner, Advan. Electron. Electron Devices 7, 239 (1955).
[CrossRef]

Appl. Opt.

Bull. USSR Acad. Sci.

A. I. Akishin, S. S. Vasilev, L. N. Isaev, Bull. USSR Acad. Sci. 26, 1379 (1963).

J. Appl. Phys.

G. V. Jorgenson, G. K. Wehner, J. Appl. Phys. 36, 2672 (1965).
[CrossRef]

H. P. Smith, D. W. DeMichelle, J. N. Khan, J. Appl. Phys. 36, 1952 (1965).
[CrossRef]

W. Primak, J. Appl. Phys. 35, 1342 (1964).
[CrossRef]

R. L. Hines, R. Wallor, J. Appl. Phys. 32, 202 (1961).
[CrossRef]

R. L. Hines, J. Appl. Phys. 28, 587 (1957).
[CrossRef]

Nature

J. Koch, Nature 164, 19 (1949).
[CrossRef] [PubMed]

L. Holland, Nature 181, 1451 (1958).
[CrossRef]

Phillips Res. Repts.

M. Koedam, Phillips Res. Repts. 16, 101 (1961).

Phys. Rev.

W. Primak, Phys. Rev. 110, 1240 (1958).
[CrossRef]

R. L. Hines, R. Arndt, Phys. Rev. 119, 623 (1960).
[CrossRef]

W. Primak, E. Edwards, Phys. Rev. 128, 2580 (1962).
[CrossRef]

RCA Rev.

K. H. Zaininger, A. G. Revesz, RCA Rev. 25, 85 (1964).

Other

W. S. Moore, S. R. Logan, L. C. Luther, S. N. Brown, Le Bombardement Ionique, Theories et Applications (Centre National de La Recherche Scientifique, Paris, 1962).

J. T. McCartney, S. Erqun, Proceedings of the 3rd Carbon Conference, Buffalo, N.Y. (Pergamon Press, Inc., New York, 1959), p. 223.

L. Holland, The Properties of Glass Surfaces (Chapman and Hall Ltd., London, 1964).

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Figures (4)

Fig. 1
Fig. 1

Schematic representation of sample chamber.

Fig. 2
Fig. 2

Twyman–Green interferogram of TVS sample taken during irradiation with a beam of 12 μA/cm2 of 1.0 MeV H+.

Fig. 3
Fig. 3

Interferogram of TVS sample irradiated with 0.2 C/cm2 of 0.5 MeV H+.

Fig. 4
Fig. 4

(a) Interferogram of BK-7 glass taken during irradiation with a 15-μA/cm2 beam of 0.5 MeV H+. (b) Same area 5 min after the ion beam was turned off.

Tables (1)

Tables Icon

Table I Calculated Penetration Depths in Transparent Vitreous Silica

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