Abstract

The x-ray reflectivity of an ultralightweight and low-cost x-ray optic using anisotropic wet etching of Si (110) wafers is evaluated at two energies, C Kα 0.28keV and Al Kα 1.49keV. The obtained reflectivities at both energies are not represented by a simple planar mirror model considering surface roughness. Hence, an geometrical occultation effect due to step structures upon the etched mirror surface is taken into account. Then, the reflectivities are represented by the theoretical model. The estimated surface roughness at C Kα (6nmrms) is significantly larger than 1nm at Al Kα. This can be explained by different coherent lengths at two energies.

© 2010 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers

Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Kazuhisa Mitsuda, Akio Hoshino, Yoshitaka Ishisaki, Zhen Yang, Takayuki Takano, and Ryutaro Maeda
Appl. Opt. 45(35) 8932-8938 (2006)

Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition

Tomohiro Ogawa, Yuichiro Ezoe, Teppei Moriyama, Ikuyuki Mitsuishi, Takuya Kakiuchi, Takaya Ohashi, Kazuhisa Mitsuda, and Matti Putkonen
Appl. Opt. 52(24) 5949-5956 (2013)

Large-aperture focusing of x rays with micropore optics using dry etching of silicon wafers

Yuichiro Ezoe, Teppei Moriyama, Tomohiro Ogawa, Takuya Kakiuchi, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Tatsuhiko Aoki, Kohei Morishita, and Kazuo Nakajima
Opt. Lett. 37(5) 779-781 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription