Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Impact of electron-beam lithography irregularities across millimeter-scale resonant grating filter performances

Not Accessible

Your library or personal account may give you access

Abstract

We investigated the impact of electron-beam lithography writing imperfections on the performance of two-dimensional resonant grating notch filters. This large area photonic device provides an interesting benchmark to assess the acceptable limits of unavoidable fabrication errors. We found that field stitching errors up to 100nm have no detrimental effect on the filter linewidth, whereas a 2.5nm electron-beam writing resolution, responsible for digitization disorder, is tolerable only for high-index contrast filter designs. Such an electron-beam writing strategy could also be beneficial for photonic crystal guiding structures or any periodic nanopatterned device with which the optical mode interacts with a large number of periodic elementary units.

© 2010 Optical Society of America

Full Article  |  PDF Article
More Like This
Measurement and modeling of 2D hexagonal resonant-grating filter performance

A.-L. Fehrembach, O. Gauthier-Lafaye, K. Chan Shin Yu, A. Monmayrant, S. Bonnefont, E. Daran, P. Arguel, F. Lozes-Dupuy, and A. Sentenac
J. Opt. Soc. Am. A 27(7) 1535-1540 (2010)

Rowland ghost suppression in high efficiency spectrometer gratings fabricated by e-beam lithography

Martin Heusinger, Michael Banasch, and Uwe D. Zeitner
Opt. Express 25(6) 6182-6191 (2017)

Effect of fabrication errors in channel waveguide Bragg gratings

Giuseppe Coppola, Andrea Irace, Antonello Cutolo, and Mario Iodice
Appl. Opt. 38(9) 1752-1758 (1999)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved