Abstract

A low-cost high-precision thickness measurement system for transparent plates that uses dual digital versatile disc (DVD) pickups is proposed. The two DVD pickups are used as the transmitter and the receiver in the measurement system, respectively. One of the DVD pickups emits a laser to the other DVD pickup (receiver) and projects on the photodiode integrated circuit of the receiver. The transparent plate is placed in the optical path to change the focused point that will affect the focusing error signal (FES) of the receiver. Using the FES, a mathematical model for thickness measurement based on the geometric optical method is developed. The experimental results show that the accuracy is 1.5μm, and the uncertainty is estimated to be ±1.37μm for the measured thickness of 150μm.

© 2010 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. J. Benschop and G. V. Rosmalen, “Confocal compact scanning optical microscope based on compact disc technology,” Appl. Opt. 30, 1179-1184 (1991).
    [CrossRef] [PubMed]
  2. T. R. Armstrong and M. P. Fitzgerald, “An autocollimator based on the laser head of a compact disc player,” Meas. Sci. Technol. 3, 1072-1076 (1992).
    [CrossRef]
  3. K. C. Fan, C. L. Chu, and J. I. Mou, “Development of a low-cost autofocusing probe for profile measurement,” Meas. Sci. Technol. 12, 2137-2146 (2001).
    [CrossRef]
  4. K. C. Fan, C. L. Chu, J. L. Liao, and J. I. Mou, “Development of a high precision straightness measuring system with DVD pick-up head,” Meas. Sci. Technol. 14, 47-54 (2003).
    [CrossRef]
  5. W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
    [CrossRef]
  6. V. Bodlaj and E. Klement, “Remote measurement of distance and thickness using a deflected laser beam,” Appl. Opt. 15, 1432-1436 (1976).
    [CrossRef] [PubMed]
  7. J. Nen and K. E. Peiponen, “On-line measurement of the thickness and optical quality of float glass with a sensor based on a diffractive element,” Appl. Opt. 40, 5034-5039 (2001).
    [CrossRef]
  8. J. Cees and H. J. Frankena, “Thickness measurement using Young's interferometric experiment,” Appl. Opt. 27, 3869-3874 (1988).
    [CrossRef]
  9. S. Constantino, O. Martinez, and J. Torga, “Wide band interferometry for thickness measurement,” Opt. Express 11, 952-957 (2002).
    [CrossRef]
  10. T. Fukano and I. Yamaguchi, “Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope,” Appl. Opt. 38, 4065-4073 (1999).
    [CrossRef]
  11. I. K. Ilev, R. W. Waynant, K. R. Byrnes, and J. J. Anders, “Dual-confocal fiber-optic method for absolute measurement of refractive index and thickness of optically transparent media,” Opt. Lett. 27, 1693-1695 (2002).
    [CrossRef]
  12. A. Hirai and H. Matsumoto, “Low-coherence tandem interferometer for measurement of group refractive index without knowledge of the thickness of the test sample,” Opt. Lett. 28, 2112-2114 (2003).
    [CrossRef] [PubMed]
  13. M. Ohmi, H. Nishi, Y. Konishi, Y. Yamada, and M. Haruna, “High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics,” Meas. Sci. Technol. 15, 1531-1535 (2004).
    [CrossRef]
  14. K. Hibino, B. F. Oreb, P. S. Fairman, and J. Burke, “Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer,” Appl. Opt. 43, 1241-1249(2004).
    [CrossRef] [PubMed]
  15. D. Pristinski, V. Kozlovskaya, and S. A. Sukhishvili, “Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry,” Opt. Soc. Am. A 23, 2639-2644 (2006).
    [CrossRef]
  16. C. H. Liu and Z. H. Lee, “Application of astigmatic method on the thickness measurement of the glass substrate,” Appl. Opt. 47, 3968-3972 (2008).
    [CrossRef] [PubMed]

2009

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

2008

2006

D. Pristinski, V. Kozlovskaya, and S. A. Sukhishvili, “Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry,” Opt. Soc. Am. A 23, 2639-2644 (2006).
[CrossRef]

2004

M. Ohmi, H. Nishi, Y. Konishi, Y. Yamada, and M. Haruna, “High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics,” Meas. Sci. Technol. 15, 1531-1535 (2004).
[CrossRef]

K. Hibino, B. F. Oreb, P. S. Fairman, and J. Burke, “Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer,” Appl. Opt. 43, 1241-1249(2004).
[CrossRef] [PubMed]

2003

A. Hirai and H. Matsumoto, “Low-coherence tandem interferometer for measurement of group refractive index without knowledge of the thickness of the test sample,” Opt. Lett. 28, 2112-2114 (2003).
[CrossRef] [PubMed]

K. C. Fan, C. L. Chu, J. L. Liao, and J. I. Mou, “Development of a high precision straightness measuring system with DVD pick-up head,” Meas. Sci. Technol. 14, 47-54 (2003).
[CrossRef]

2002

2001

K. C. Fan, C. L. Chu, and J. I. Mou, “Development of a low-cost autofocusing probe for profile measurement,” Meas. Sci. Technol. 12, 2137-2146 (2001).
[CrossRef]

J. Nen and K. E. Peiponen, “On-line measurement of the thickness and optical quality of float glass with a sensor based on a diffractive element,” Appl. Opt. 40, 5034-5039 (2001).
[CrossRef]

1999

1992

T. R. Armstrong and M. P. Fitzgerald, “An autocollimator based on the laser head of a compact disc player,” Meas. Sci. Technol. 3, 1072-1076 (1992).
[CrossRef]

1991

1988

1976

Anders, J. J.

Armstrong, T. R.

T. R. Armstrong and M. P. Fitzgerald, “An autocollimator based on the laser head of a compact disc player,” Meas. Sci. Technol. 3, 1072-1076 (1992).
[CrossRef]

Benschop, J.

Bodlaj, V.

Burke, J.

Byrnes, K. R.

Cees, J.

Chen, F. Z.

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

Chen, N. T.

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

Chen, P. J.

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

Chu, C. L.

K. C. Fan, C. L. Chu, J. L. Liao, and J. I. Mou, “Development of a high precision straightness measuring system with DVD pick-up head,” Meas. Sci. Technol. 14, 47-54 (2003).
[CrossRef]

K. C. Fan, C. L. Chu, and J. I. Mou, “Development of a low-cost autofocusing probe for profile measurement,” Meas. Sci. Technol. 12, 2137-2146 (2001).
[CrossRef]

Constantino, S.

Fairman, P. S.

Fan, K. C.

K. C. Fan, C. L. Chu, J. L. Liao, and J. I. Mou, “Development of a high precision straightness measuring system with DVD pick-up head,” Meas. Sci. Technol. 14, 47-54 (2003).
[CrossRef]

K. C. Fan, C. L. Chu, and J. I. Mou, “Development of a low-cost autofocusing probe for profile measurement,” Meas. Sci. Technol. 12, 2137-2146 (2001).
[CrossRef]

Fitzgerald, M. P.

T. R. Armstrong and M. P. Fitzgerald, “An autocollimator based on the laser head of a compact disc player,” Meas. Sci. Technol. 3, 1072-1076 (1992).
[CrossRef]

Frankena, H. J.

Fukano, T.

Haruna, M.

M. Ohmi, H. Nishi, Y. Konishi, Y. Yamada, and M. Haruna, “High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics,” Meas. Sci. Technol. 15, 1531-1535 (2004).
[CrossRef]

Hibino, K.

Hirai, A.

Hsu, W. Y.

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

Hwang, C. H.

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

Ilev, I. K.

Klement, E.

Konishi, Y.

M. Ohmi, H. Nishi, Y. Konishi, Y. Yamada, and M. Haruna, “High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics,” Meas. Sci. Technol. 15, 1531-1535 (2004).
[CrossRef]

Kozlovskaya, V.

D. Pristinski, V. Kozlovskaya, and S. A. Sukhishvili, “Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry,” Opt. Soc. Am. A 23, 2639-2644 (2006).
[CrossRef]

Kuo, C. H.

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

Lee, C. S.

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

Lee, Z. H.

Liao, J. L.

K. C. Fan, C. L. Chu, J. L. Liao, and J. I. Mou, “Development of a high precision straightness measuring system with DVD pick-up head,” Meas. Sci. Technol. 14, 47-54 (2003).
[CrossRef]

Liu, C. H.

Martinez, O.

Matsumoto, H.

Mou, J. I.

K. C. Fan, C. L. Chu, J. L. Liao, and J. I. Mou, “Development of a high precision straightness measuring system with DVD pick-up head,” Meas. Sci. Technol. 14, 47-54 (2003).
[CrossRef]

K. C. Fan, C. L. Chu, and J. I. Mou, “Development of a low-cost autofocusing probe for profile measurement,” Meas. Sci. Technol. 12, 2137-2146 (2001).
[CrossRef]

Nen, J.

Nishi, H.

M. Ohmi, H. Nishi, Y. Konishi, Y. Yamada, and M. Haruna, “High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics,” Meas. Sci. Technol. 15, 1531-1535 (2004).
[CrossRef]

Ohmi, M.

M. Ohmi, H. Nishi, Y. Konishi, Y. Yamada, and M. Haruna, “High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics,” Meas. Sci. Technol. 15, 1531-1535 (2004).
[CrossRef]

Oreb, B. F.

Peiponen, K. E.

Pristinski, D.

D. Pristinski, V. Kozlovskaya, and S. A. Sukhishvili, “Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry,” Opt. Soc. Am. A 23, 2639-2644 (2006).
[CrossRef]

Rosmalen, G. V.

Sukhishvili, S. A.

D. Pristinski, V. Kozlovskaya, and S. A. Sukhishvili, “Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry,” Opt. Soc. Am. A 23, 2639-2644 (2006).
[CrossRef]

Torga, J.

Waynant, R. W.

Yamada, Y.

M. Ohmi, H. Nishi, Y. Konishi, Y. Yamada, and M. Haruna, “High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics,” Meas. Sci. Technol. 15, 1531-1535 (2004).
[CrossRef]

Yamaguchi, I.

Yu, Z. R.

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

Opt. Soc. Am. A

D. Pristinski, V. Kozlovskaya, and S. A. Sukhishvili, “Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry,” Opt. Soc. Am. A 23, 2639-2644 (2006).
[CrossRef]

Appl. Opt.

Meas. Sci. Technol.

T. R. Armstrong and M. P. Fitzgerald, “An autocollimator based on the laser head of a compact disc player,” Meas. Sci. Technol. 3, 1072-1076 (1992).
[CrossRef]

K. C. Fan, C. L. Chu, and J. I. Mou, “Development of a low-cost autofocusing probe for profile measurement,” Meas. Sci. Technol. 12, 2137-2146 (2001).
[CrossRef]

K. C. Fan, C. L. Chu, J. L. Liao, and J. I. Mou, “Development of a high precision straightness measuring system with DVD pick-up head,” Meas. Sci. Technol. 14, 47-54 (2003).
[CrossRef]

W. Y. Hsu, C. S. Lee, P. J. Chen, N. T. Chen, F. Z. Chen, Z. R. Yu, C. H. Kuo, and C. H. Hwang, “Development of the fast astigmatic auto-focus microscope system,” Meas. Sci. Technol. 20, 045902 (2009).
[CrossRef]

M. Ohmi, H. Nishi, Y. Konishi, Y. Yamada, and M. Haruna, “High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics,” Meas. Sci. Technol. 15, 1531-1535 (2004).
[CrossRef]

Opt. Express

Opt. Lett.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (8)

Fig. 1
Fig. 1

Thickness measurement system for transparent plates using dual DVD pickups.

Fig. 2
Fig. 2

Laser spot intensity pattern of FES on the photodiode IC.

Fig. 3
Fig. 3

The change optical paths of the dual DVD pickup system after putting the transparent plate.

Fig. 4
Fig. 4

Three calibration experiments for the S-curve.

Fig. 5
Fig. 5

Calibration results with high-order polynomial fitting within the range of + / 0.15 mm of curve.

Fig. 6
Fig. 6

Residual error for the S-curve fitting.

Fig. 7
Fig. 7

Standard deviation of the S-curve within the calibration range.

Fig. 8
Fig. 8

Result of thickness measurement of the contact measurement system.

Tables (1)

Tables Icon

Table 1 Experimental Results and Comparison

Equations (16)

Equations on this page are rendered with MathJax. Learn more.

FES = ( V A + V C ) ( V B + V D ) ,
FES = | f f | = Δ x .
z = d ( tan θ 1 tan θ 2 ) ,
Δ x = z tan θ 1 .
d = Δ x 1 tan θ 2 tan θ 1 .
NA = n 1 sin θ 1 = n 2 sin θ 2 .
d = Δ x 1 n 1 NA 2 n 2 2 NA 2 .
d = f ( Δ x , n 2 , NA ) .
Δ d = Δ f d f = f Δ x d x + f n 2 d n 2 + f NA NA ,
f Δ x = 1 1 1 NA 2 n 2 2 NA 2 ,
f n 2 = Δ x · n 2 · 1 NA 2 n 2 2 NA 2 · ( n 2 2 NA 2 1 NA 2 ) 2 ,
f NA = Δ x · NA · ( 1 n 2 2 ) n 2 2 NA 2 · 1 NA 2 · ( n 2 2 NA 2 1 NA 2 ) 2 .
σ = ± ( f Δ x σ Δ x ) 2 + ( f n 2 σ n 2 ) 2 + ( f NA σ NA ) 2 .
σ = ± 1.02 + 0.00032 Δ x 2 + 2.5 × 10 6 Δ x 2 ± 1.02 + 0.00032 Δ x 2 .
X = K x V B V D V B + V D ,
Y = K y V A V C V A + V C ,

Metrics