Abstract

A waveguide grating coupler based on a silicon nitride overlay at 1.55μm for TE polarization is designed with no experimental demonstration. Its coupling efficiency for a fiber is 76%, the 1dB bandwidth is 75nm, and the coupling angle is 10°. The effects of different device parameters on the coupling performance for the grating coupler are discussed. The coupling efficiency of our grating coupler is almost equal, yet the 1dB spectral bandwidth is around 25nm broader, as compared with the grating coupler design based on a poly-silicon overlay. The coupling performance of our coupling device could still be further improved. The grating coupler presented in this paper is applicable to the optical coupling in nanophotonic integrated circuits.

© 2010 Optical Society of America

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