Abstract

An ultraviolet two-spherical-wave interferometer was developed in order to make a subwavelength structured surface on a curved surface. The change in fringe period on the curved surface was significantly suppressed compared with the two-plane-wave interferometer. The optical setup method for suppressing the change in fringe period is described. The effect of the two-spherical-wave interferometer was investigated by numerical simulations. In an experimental demonstration for a concave spherical surface with 11.1mm radius of curvature and 10mm diameter, the change in period of the photoresist pattern was reduced to 12nm for the target period of 250nm.

© 2010 Optical Society of America

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