Abstract

Mg-based multilayers, including SiC/Mg, Co/Mg, B4C/Mg, and Si/Mg, are investigated for solar imaging and a He II calibration lamp at a 30.4nm wavelength. These multilayers were fabricated by a magnetron sputtering method and characterized by x-ray reflection. The reflectivities of these multilayers were measured by synchrotron radiation. Near-normal-incidence reflectivities of Co/Mg and SiC/Mg multilayer mirrors are as high as 40.3% and 44.6%, respectively, while those of B4C/Mg and Si/Mg mirrors are too low for application. The measured results suggest that SiC/Mg, Co/Mg multilayers are promising for a 30.4nm wavelength.

© 2010 Optical Society of America

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2010 (1)

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

2009 (2)

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48, 5432–5437 (2009).
[CrossRef] [PubMed]

2008 (2)

J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao “High reflectance multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47, C310–C314 (2008).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

2005 (3)

T. Murachi, I. Yoshikawa, H. Takenaka, and S. Ichimaru, “Characteristics of SiC/Mg multilayer mirrors,” Proc. SPIE 5900, 59001A (2005).
[CrossRef]

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25–35 nm region,” Appl. Opt. 44, 5446–5453 (2005).
[CrossRef] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectance and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144–147, 1047–1049 (2005).
[CrossRef]

2004 (2)

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

1999 (2)

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

W. T. Thompson, “UV detectors aboard SOHO,” Proc. SPIE 3764, 196–208 (1999).
[CrossRef]

1998 (1)

D. L. Windt, “IMD—software for modeling the optical properties of multilayer films computers in physics,” Comput. Phys. 12, 360–370 (1998).
[CrossRef]

1997 (1)

1988 (1)

N. Sato, “Structure and magnetism of transition-metal-magnesium thin films with an artificially layered structure,” J. Appl. Phys. 64, 4113–4122 (1988).
[CrossRef]

1976 (1)

André, J.-M.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Banse, T.

Bougnet, M.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

Bridou, F.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

Chen, L. Y.

Cranmer, S.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Cui, M. Q.

Davila, J.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Delmotte, F.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

DeLuca, E.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

Dong, J.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Donguy, S.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

Ejima, T.

Fineschi, S.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Fisher, R. R.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Gardner, L.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Giglia, A.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Golub, L.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Grigonis, M.

Guen, K. Le

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Gullikson, E. M.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectance and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144–147, 1047–1049 (2005).
[CrossRef]

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

Hecquet, C.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Howard, R.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Hu, M.-H.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

Huo, T. L.

Ichimaru, S.

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25–35 nm region,” Appl. Opt. 44, 5446–5453 (2005).
[CrossRef] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectance and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144–147, 1047–1049 (2005).
[CrossRef]

T. Murachi, I. Yoshikawa, H. Takenaka, and S. Ichimaru, “Characteristics of SiC/Mg multilayer mirrors,” Proc. SPIE 5900, 59001A (2005).
[CrossRef]

Jerome, A.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

Jonnard, P.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Kjornrattanawanich, B.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

Knystautas, E. J.

Kohl, J.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Kondo, Y.

Le Guen, K.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

Li, H. Ch.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

Mahne, N.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Maury, H.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Mednikov, K. N.

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

Mercier, R.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

Moses, D.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Murachi, T.

T. Murachi, I. Yoshikawa, H. Takenaka, and S. Ichimaru, “Characteristics of SiC/Mg multilayer mirrors,” Proc. SPIE 5900, 59001A (2005).
[CrossRef]

Naletto, G.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Nannaronne, S.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Nicolosi, P.

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48, 5432–5437 (2009).
[CrossRef] [PubMed]

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Noci, G.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Ohchi, T.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectance and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144–147, 1047–1049 (2005).
[CrossRef]

Pelizzo, M. G.

Pertsov, A. A.

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

Pirozhkov, A. S.

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

Poletto, L.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Ragozin, E. N.

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

Ravet, M. F.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

Raymond, J.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Reva, A. A.

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

Romoli, M.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Saito, K.

Sato, N.

N. Sato, “Structure and magnetism of transition-metal-magnesium thin films with an artificially layered structure,” J. Appl. Phys. 64, 4113–4122 (1988).
[CrossRef]

Seely, J.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

Shestov, S. V.

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

Smith, P. L.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Socker, D.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Spiller, E.

St. Cyr, C.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Strachan, L.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Suman, M.

Takenaka, H.

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25–35 nm region,” Appl. Opt. 44, 5446–5453 (2005).
[CrossRef] [PubMed]

T. Murachi, I. Yoshikawa, H. Takenaka, and S. Ichimaru, “Characteristics of SiC/Mg multilayer mirrors,” Proc. SPIE 5900, 59001A (2005).
[CrossRef]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectance and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144–147, 1047–1049 (2005).
[CrossRef]

Thompson, W. T.

W. T. Thompson, “UV detectors aboard SOHO,” Proc. SPIE 3764, 196–208 (1999).
[CrossRef]

Tondello, G.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Ul’yanov, A. S.

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

Vishnyako, E. A.

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

Walton, C. C.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

Wang, D.

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

Wang, F. L.

Wang, H. C.

Wang, Z.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Wang, Z. S.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao “High reflectance multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47, C310–C314 (2008).
[CrossRef] [PubMed]

Windt, D. L.

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48, 5432–5437 (2009).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

D. L. Windt, “IMD—software for modeling the optical properties of multilayer films computers in physics,” Comput. Phys. 12, 360–370 (1998).
[CrossRef]

Wu, W. J.

Xu, D.

Yamazaki, A.

Yoshikawa, I.

T. Murachi, I. Yoshikawa, H. Takenaka, and S. Ichimaru, “Characteristics of SiC/Mg multilayer mirrors,” Proc. SPIE 5900, 59001A (2005).
[CrossRef]

Zhang, S. M.

Zhang, Z.

J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao “High reflectance multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47, C310–C314 (2008).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Zhang-Song, X.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

Zhao, Y. D.

Zhou, H. J.

Zhou, S. K.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

Zhu, J.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

Zhu, J. T.

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

J. T. Zhu, Z. S. Wang, Z. Zhang, F. L. Wang, H. C. Wang, W. J. Wu, S. M. Zhang, D. Xu, L. Y. Chen, H. J. Zhou, T. L. Huo, M. Q. Cui, and Y. D. Zhao “High reflectance multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47, C310–C314 (2008).
[CrossRef] [PubMed]

Appl. Opt. (5)

Comput. Phys. (1)

D. L. Windt, “IMD—software for modeling the optical properties of multilayer films computers in physics,” Comput. Phys. 12, 360–370 (1998).
[CrossRef]

Eur. Phys. J. B (1)

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannaronne, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer,” Eur. Phys. J. B 64, 193–199 (2008).
[CrossRef]

J. Appl. Phys. (1)

N. Sato, “Structure and magnetism of transition-metal-magnesium thin films with an artificially layered structure,” J. Appl. Phys. 64, 4113–4122 (1988).
[CrossRef]

J. Electron Spectrosc. Relat. Phenom. (1)

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectance and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144–147, 1047–1049 (2005).
[CrossRef]

J. Phys. Chem. C (1)

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, and Z. S. Wang, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114, 6484–6490 (2010).
[CrossRef]

Proc. SPIE (6)

T. Murachi, I. Yoshikawa, H. Takenaka, and S. Ichimaru, “Characteristics of SiC/Mg multilayer mirrors,” Proc. SPIE 5900, 59001A (2005).
[CrossRef]

E. N. Ragozin, K. N. Mednikov, A. A. Pertsov, A. S. Pirozhkov, A. A. Reva, S. V. Shestov, A. S. Ul’yanov, and E. A. Vishnyako, “Spectroscopic characterization of novel multilayer mirrors intended for astronomical and laboratory applications,” Proc. SPIE 7360, 73600N (2009).
[CrossRef]

L. Gardner, J. Kohl, S. Cranmer, S. Fineschi, L. Golub, J. Raymond, P. L. Smith, L. Strachan, R. Howard, D. Moses, D. Socker, D. Wang, R. R. Fisher, J. Davila, C. St. Cyr, G. Noci, M. Romoli, G. Tondello, G. Naletto, P. Nicolosi, and L. Poletto, “The advanced solar coronal explorer mission (ASCE),” Proc. SPIE 3764, 134–146 (1999).
[CrossRef]

W. T. Thompson, “UV detectors aboard SOHO,” Proc. SPIE 3764, 196–208 (1999).
[CrossRef]

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, and M. Bougnet, “Ion beam deposited Mo/Si multilayers for EUV imaging application in astrophysics,” Proc. SPIE 5250, 99–108 (2004).
[CrossRef]

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV multilayers for solar physics,” Proc. SPIE 5168, 1–11(2004).
[CrossRef]

Other (3)

http://umbra.nascom.nasa.gov/eit.

http://trace.lmsal.com.

http://henke.lbl.gov/optical_constants/.

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Figures (3)

Fig. 1
Fig. 1

Calculated reflectance as a function of wavelength of Mg-based and Mo/Si multilayers designed for high reflectance at the He II ( λ = 30.4 nm ) emission line. (All calculations are made at 10 ° from normal incidence for 30 bilayer ideal multilayer structures.)

Fig. 2
Fig. 2

X-ray reflectance versus grazing incidence angle of Mg-based multilayers deposited according to the design in Table 1. Each curve shifted vertically by 3 orders of magnitude for better discrimination.

Fig. 3
Fig. 3

Measured reflectance versus wavelength of Mg-based multilayers at 10 ° incident angle by synchrotron radiation.

Tables (2)

Tables Icon

Table 1 Calculated Peak Reflectance and FWHM ( Δ λ ) of Mg-Based and Mo/Si Multilayers Shown in Fig. 1

Tables Icon

Table 2 Measured Peak Reflectance, Bandwidth, and Fitted Parameters of Mg-Based and Mo/Si Multilayers at 30.4 nm Shown in Fig. 3

Metrics