Abstract

We calculated the optical constants of the monoclinic phase of a HfO2 film from reflection spectra measured using synchrotron radiation in the spectral region from 143eV to 927eV, which includes the HfN4,5, HfN2,3, and OK absorption edges. The calculations were carried out using the Kramers– Kronig relations. It could be shown that the relation R(E)E4 can be used for extrapolation of the experimental reflection spectrum of HfO2 (and probably of other heavy elements) for energies such that θ/θc>3.7.

© 2010 Optical Society of America

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