A generalized method to accurately calculate astigmatism of the unit-magnification multipass system (UMS) is proposed. A practical coaxial optical transmission model is developed for the UMS. Astigmatism analysis is then made convenient by a 4 by 4 general transfer matrix. Astigmatism correction is significantly promoted, and hence further improvement in imaging quality can be expected. Good agreement between numerical simulations and Zemax ray tracing results verifies the effectiveness of this method. The resulted RMS spot size of this method is only 25% to 64% of other previous methods based on the golden section search for minimum astigmatism in real design cases. This method is helpful for the optical design of the UMS.
© 2010 Optical Society of America
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