Abstract

We present a contactless optical sensor based on the laser-self-mixing effect for real-time measurement of linear and transverse displacements of a moving stage. The sensor is able to measure linear displacements of up to 400mm along the main optical axis while simultaneously estimating straightness and flatness deviations up to 1mm. The sensor exploits two identical coplanar nonparallel self-mixing interferometers and requires only one reference plane. The reduction in the number of optical elements allowed by the self-mixing configuration and the intrinsic stiffness of the adopted geometry result in a compact, low-cost, and easy-to-align setup.

© 2009 Optical Society of America

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