Abstract

Al2O3 and TiO2 thin films have been deposited on Si wafers, quartz, BK7 glass, and polycarbonate substrates by atomic layer deposition (ALD). The refractive indices and growth rates of the materials have been determined by spectroscopic ellipsometry and transmission electron microscopy. The influence of substrate temperature and precursor on the refractive indices has been investigated. The refractive index of TiO2 significantly increases with temperature, whereas the Al2O3 films are temperature insensitive. The films deposited using H2O2 as oxygen source show a slightly higher refractive index than the films prepared with H2O. Multilayer narrow-bandpass filters and broadband antireflective coatings have been designed and produced by ALD.

© 2009 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Rugate notch filter fabricated by atomic layer deposition

Yanghui Li, Weidong Shen, Xiang Hao, Tingting Lang, Shangzhong Jin, and Xu Liu
Appl. Opt. 53(4) A270-A275 (2014)

Comparative study of ALD SiO2 thin films for optical applications

Kristin Pfeiffer, Svetlana Shestaeva, Astrid Bingel, Peter Munzert, Lilit Ghazaryan, Cristian van Helvoirt, Wilhelmus M. M. Kessels, Umut T. Sanli, Corinne Grévent, Gisela Schütz, Matti Putkonen, Iain Buchanan, Lars Jensen, Detlev Ristau, Andreas Tünnermann, and Adriana Szeghalmi
Opt. Mater. Express 6(2) 660-670 (2016)

Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications

Svetlana Shestaeva, Astrid Bingel, Peter Munzert, Lilit Ghazaryan, Christian Patzig, Andreas Tünnermann, and Adriana Szeghalmi
Appl. Opt. 56(4) C47-C59 (2017)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription