Abstract

We propose an experimental method for measuring the period difference in a grating pair. The method uses the relationship between the period difference and the phase difference of diffraction beams of the grating pair when gratings are translated along the grating-vector direction. The effect of the roll angular deviation of gratings can be eliminated by phase compensation with +1st- and −1st-order diffraction beams. Far-field intensity patterns of diffraction beams are monitored to adjust the relative attitude of gratings. For a pair of gratings with periods of ~0.674 μm, the period difference was measured to be 0.4434 nm with an expanded uncertainty (k=2) of 0.0113 nm.

© 2009 Optical Society of America

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription