Abstract

We propose an experimental method for measuring the period difference in a grating pair. The method uses the relationship between the period difference and the phase difference of diffraction beams of the grating pair when gratings are translated along the grating-vector direction. The effect of the roll angular deviation of gratings can be eliminated by phase compensation with +1st- and 1st-order diffraction beams. Far-field intensity patterns of diffraction beams are monitored to adjust the relative attitude of gratings. For a pair of gratings with periods of 0.674μm, the period difference was measured to be 0.4434nm with an expanded uncertainty (k=2) of 0.0113nm.

© 2009 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).
  2. T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.
  3. F. Meli and R. Thalmann, “Long-range AFM profiler used for accurate pitch measurements,” Meas. Sci. Technol. 9, 1087-1092 (1998).
    [CrossRef]
  4. G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
    [CrossRef]
  5. H. U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, and H. Kunzmann, “Advances in scanning force microscopy for dimensional metrology,” in 56th General Assembly of CIRP, Technische Rundschau ed. (Colibri, 2006), pp. 841-878.
  6. G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
    [CrossRef]
  7. I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, “Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463-471 (2003).
    [CrossRef]
  8. W. Y. Song, K. Y. Jung, B. H. O, B. C. Park, and Y. U. Ko, “Development of a laser diffractometer with improved accuracy for measurement of the grating period,” J. Korean Phys. Soc. 33, 434-438 (1998).
  9. W. Y. Song, K. Y. Jung, B. H. O, and B. C. Park, “Precision laser diffractometry for grating period measurements,” J. Korean Phys. Soc. 45, 1510-1516 (2004).
  10. J. R. Pekelsky, B. J. Eves, P. R. Nistico, and J. E. Decker, “Imaging laser diffractometer for traceable grating pitch calibration,” Meas. Sci. Technol. 18, 375-383 (2007).
    [CrossRef]
  11. B. J. Eves, J. R. Pekelsky, and J. E. Decker, “Uncertainty evaluation of the NRC imaging diffractometer,” Meas. Sci. Technol. 19, 075103 (2008).
    [CrossRef]
  12. C. Guo and L. Zeng, “Measurement of period difference in grating pair based on analysis of far-field intensity patterns,” Opt. Commun. 281, 3611-3616 (2008).
    [CrossRef]
  13. T. Harimoto, “Far-field pattern analysis for an array grating compressor,” Jpn. J. Appl. Phys. Part 1 43, 1362-1365 (2004).
    [CrossRef]
  14. Y. Hu and L. Zeng, “Grating mosaic based on image processing of far-field diffraction intensity patterns in two wavelengths,” Appl. Opt. 46, 7018-7025 (2007).
    [CrossRef] [PubMed]

2008 (2)

B. J. Eves, J. R. Pekelsky, and J. E. Decker, “Uncertainty evaluation of the NRC imaging diffractometer,” Meas. Sci. Technol. 19, 075103 (2008).
[CrossRef]

C. Guo and L. Zeng, “Measurement of period difference in grating pair based on analysis of far-field intensity patterns,” Opt. Commun. 281, 3611-3616 (2008).
[CrossRef]

2007 (4)

Y. Hu and L. Zeng, “Grating mosaic based on image processing of far-field diffraction intensity patterns in two wavelengths,” Appl. Opt. 46, 7018-7025 (2007).
[CrossRef] [PubMed]

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

J. R. Pekelsky, B. J. Eves, P. R. Nistico, and J. E. Decker, “Imaging laser diffractometer for traceable grating pitch calibration,” Meas. Sci. Technol. 18, 375-383 (2007).
[CrossRef]

2004 (3)

W. Y. Song, K. Y. Jung, B. H. O, and B. C. Park, “Precision laser diffractometry for grating period measurements,” J. Korean Phys. Soc. 45, 1510-1516 (2004).

G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
[CrossRef]

T. Harimoto, “Far-field pattern analysis for an array grating compressor,” Jpn. J. Appl. Phys. Part 1 43, 1362-1365 (2004).
[CrossRef]

2003 (1)

I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, “Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463-471 (2003).
[CrossRef]

1998 (2)

W. Y. Song, K. Y. Jung, B. H. O, B. C. Park, and Y. U. Ko, “Development of a laser diffractometer with improved accuracy for measurement of the grating period,” J. Korean Phys. Soc. 33, 434-438 (1998).

F. Meli and R. Thalmann, “Long-range AFM profiler used for accurate pitch measurements,” Meas. Sci. Technol. 9, 1087-1092 (1998).
[CrossRef]

Barty, C. P. J.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Britten, J. A.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Dai, G.

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
[CrossRef]

Danzebrink, H. U.

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
[CrossRef]

H. U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, and H. Kunzmann, “Advances in scanning force microscopy for dimensional metrology,” in 56th General Assembly of CIRP, Technische Rundschau ed. (Colibri, 2006), pp. 841-878.

Decker, J. E.

B. J. Eves, J. R. Pekelsky, and J. E. Decker, “Uncertainty evaluation of the NRC imaging diffractometer,” Meas. Sci. Technol. 19, 075103 (2008).
[CrossRef]

J. R. Pekelsky, B. J. Eves, P. R. Nistico, and J. E. Decker, “Imaging laser diffractometer for traceable grating pitch calibration,” Meas. Sci. Technol. 18, 375-383 (2007).
[CrossRef]

Diener, A.

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

Dziomba, T.

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

Eves, B. J.

B. J. Eves, J. R. Pekelsky, and J. E. Decker, “Uncertainty evaluation of the NRC imaging diffractometer,” Meas. Sci. Technol. 19, 075103 (2008).
[CrossRef]

J. R. Pekelsky, B. J. Eves, P. R. Nistico, and J. E. Decker, “Imaging laser diffractometer for traceable grating pitch calibration,” Meas. Sci. Technol. 18, 375-383 (2007).
[CrossRef]

Gonda, S.

I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, “Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463-471 (2003).
[CrossRef]

Guo, C.

C. Guo and L. Zeng, “Measurement of period difference in grating pair based on analysis of far-field intensity patterns,” Opt. Commun. 281, 3611-3616 (2008).
[CrossRef]

Guo, Y.

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Habara, H.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Harimoto, T.

T. Harimoto, “Far-field pattern analysis for an array grating compressor,” Jpn. J. Appl. Phys. Part 1 43, 1362-1365 (2004).
[CrossRef]

Hasche, K.

G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
[CrossRef]

Hu, Y.

Huang, Z.

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Jitsuno, T.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Jung, K. Y.

W. Y. Song, K. Y. Jung, B. H. O, and B. C. Park, “Precision laser diffractometry for grating period measurements,” J. Korean Phys. Soc. 45, 1510-1516 (2004).

W. Y. Song, K. Y. Jung, B. H. O, B. C. Park, and Y. U. Ko, “Development of a laser diffractometer with improved accuracy for measurement of the grating period,” J. Korean Phys. Soc. 33, 434-438 (1998).

Kai, H.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Ko, Y. U.

W. Y. Song, K. Y. Jung, B. H. O, B. C. Park, and Y. U. Ko, “Development of a laser diffractometer with improved accuracy for measurement of the grating period,” J. Korean Phys. Soc. 33, 434-438 (1998).

Kodama, R.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Koenders, L.

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

H. U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, and H. Kunzmann, “Advances in scanning force microscopy for dimensional metrology,” in 56th General Assembly of CIRP, Technische Rundschau ed. (Colibri, 2006), pp. 841-878.

Kondo, K.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Kunzmann, H.

H. U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, and H. Kunzmann, “Advances in scanning force microscopy for dimensional metrology,” in 56th General Assembly of CIRP, Technische Rundschau ed. (Colibri, 2006), pp. 841-878.

Kurosawa, T.

I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, “Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463-471 (2003).
[CrossRef]

Liu, H.

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Meli, F.

F. Meli and R. Thalmann, “Long-range AFM profiler used for accurate pitch measurements,” Meas. Sci. Technol. 9, 1087-1092 (1998).
[CrossRef]

Mima, K.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Misumi, I.

I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, “Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463-471 (2003).
[CrossRef]

Miyanaga, N.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Motokoshi, S.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Nistico, P. R.

J. R. Pekelsky, B. J. Eves, P. R. Nistico, and J. E. Decker, “Imaging laser diffractometer for traceable grating pitch calibration,” Meas. Sci. Technol. 18, 375-383 (2007).
[CrossRef]

O, B. H.

W. Y. Song, K. Y. Jung, B. H. O, and B. C. Park, “Precision laser diffractometry for grating period measurements,” J. Korean Phys. Soc. 45, 1510-1516 (2004).

W. Y. Song, K. Y. Jung, B. H. O, B. C. Park, and Y. U. Ko, “Development of a laser diffractometer with improved accuracy for measurement of the grating period,” J. Korean Phys. Soc. 33, 434-438 (1998).

Park, B. C.

W. Y. Song, K. Y. Jung, B. H. O, and B. C. Park, “Precision laser diffractometry for grating period measurements,” J. Korean Phys. Soc. 45, 1510-1516 (2004).

W. Y. Song, K. Y. Jung, B. H. O, B. C. Park, and Y. U. Ko, “Development of a laser diffractometer with improved accuracy for measurement of the grating period,” J. Korean Phys. Soc. 33, 434-438 (1998).

Pekelsky, J. R.

B. J. Eves, J. R. Pekelsky, and J. E. Decker, “Uncertainty evaluation of the NRC imaging diffractometer,” Meas. Sci. Technol. 19, 075103 (2008).
[CrossRef]

J. R. Pekelsky, B. J. Eves, P. R. Nistico, and J. E. Decker, “Imaging laser diffractometer for traceable grating pitch calibration,” Meas. Sci. Technol. 18, 375-383 (2007).
[CrossRef]

Pohlenz, F.

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
[CrossRef]

Rushford, M. C.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Shiraga, H.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Song, W. Y.

W. Y. Song, K. Y. Jung, B. H. O, and B. C. Park, “Precision laser diffractometry for grating period measurements,” J. Korean Phys. Soc. 45, 1510-1516 (2004).

W. Y. Song, K. Y. Jung, B. H. O, B. C. Park, and Y. U. Ko, “Development of a laser diffractometer with improved accuracy for measurement of the grating period,” J. Korean Phys. Soc. 33, 434-438 (1998).

Takamasu, K.

I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, “Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463-471 (2003).
[CrossRef]

Tanaka, K. A.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Thalmann, R.

F. Meli and R. Thalmann, “Long-range AFM profiler used for accurate pitch measurements,” Meas. Sci. Technol. 9, 1087-1092 (1998).
[CrossRef]

Tsubakimoto, K.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Wang, X.

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Wei, X.

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Wilkening, G.

G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
[CrossRef]

H. U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, and H. Kunzmann, “Advances in scanning force microscopy for dimensional metrology,” in 56th General Assembly of CIRP, Technische Rundschau ed. (Colibri, 2006), pp. 841-878.

Xu, G.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Xu, M.

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
[CrossRef]

Yacoot, A.

H. U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, and H. Kunzmann, “Advances in scanning force microscopy for dimensional metrology,” in 56th General Assembly of CIRP, Technische Rundschau ed. (Colibri, 2006), pp. 841-878.

Ying, C.

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Zeng, L.

C. Guo and L. Zeng, “Measurement of period difference in grating pair based on analysis of far-field intensity patterns,” Opt. Commun. 281, 3611-3616 (2008).
[CrossRef]

Y. Hu and L. Zeng, “Grating mosaic based on image processing of far-field diffraction intensity patterns in two wavelengths,” Appl. Opt. 46, 7018-7025 (2007).
[CrossRef] [PubMed]

Zhu, Q.

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Zuo, Y.

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Act. Phys. Sin. (1)

Y. Zuo, X. Wei, Q. Zhu, H. Liu, X. Wang, Z. Huang, Y. Guo, and C. Ying, “Theory of array-grating compressor based on in-pair compensation of errors,” Act. Phys. Sin. 56, 5227-5232 (2007).

Appl. Opt. (1)

J. Korean Phys. Soc. (2)

W. Y. Song, K. Y. Jung, B. H. O, B. C. Park, and Y. U. Ko, “Development of a laser diffractometer with improved accuracy for measurement of the grating period,” J. Korean Phys. Soc. 33, 434-438 (1998).

W. Y. Song, K. Y. Jung, B. H. O, and B. C. Park, “Precision laser diffractometry for grating period measurements,” J. Korean Phys. Soc. 45, 1510-1516 (2004).

Jpn. J. Appl. Phys. Part 1 (1)

T. Harimoto, “Far-field pattern analysis for an array grating compressor,” Jpn. J. Appl. Phys. Part 1 43, 1362-1365 (2004).
[CrossRef]

Meas. Sci. Technol. (5)

I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, “Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463-471 (2003).
[CrossRef]

J. R. Pekelsky, B. J. Eves, P. R. Nistico, and J. E. Decker, “Imaging laser diffractometer for traceable grating pitch calibration,” Meas. Sci. Technol. 18, 375-383 (2007).
[CrossRef]

B. J. Eves, J. R. Pekelsky, and J. E. Decker, “Uncertainty evaluation of the NRC imaging diffractometer,” Meas. Sci. Technol. 19, 075103 (2008).
[CrossRef]

F. Meli and R. Thalmann, “Long-range AFM profiler used for accurate pitch measurements,” Meas. Sci. Technol. 9, 1087-1092 (1998).
[CrossRef]

G. Dai, F. Pohlenz, T. Dziomba, M. Xu, A. Diener, L. Koenders, and H. U. Danzebrink, “Accurate and traceable calibration of two-dimensional gratings,” Meas. Sci. Technol. 18, 415-421(2007).
[CrossRef]

Opt. Commun. (1)

C. Guo and L. Zeng, “Measurement of period difference in grating pair based on analysis of far-field intensity patterns,” Opt. Commun. 281, 3611-3616 (2008).
[CrossRef]

Rev. Sci. Instrum. (1)

G. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu, K. Hasche, and G. Wilkening, “Metrological large range scanning probe microscope,” Rev. Sci. Instrum. 75, 962-969 (2004).
[CrossRef]

Other (2)

H. U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, and H. Kunzmann, “Advances in scanning force microscopy for dimensional metrology,” in 56th General Assembly of CIRP, Technische Rundschau ed. (Colibri, 2006), pp. 841-878.

T. Jitsuno, H. Kai, M. C. Rushford, N. Miyanaga, S. Motokoshi, G. Xu, K. Kondo, R. Kodama, H. Shiraga, K. A. Tanaka, K. Tsubakimoto, H. Habara, J. A. Britten, C. P. J. Barty, and K. Mima, “Groove density compensation of segmented gratings in large scale pulse compressor,” presented at the Fourth International Conference on Inertial Fusion Sciences and Applications (IFSA), Biarritz, France, 4-9 September 2005.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Definitions of coordinate system and translation parameters.

Fig. 2
Fig. 2

Effect of roll angular deviation of gratings.

Fig. 3
Fig. 3

Experimental setup for measuring the period difference.

Fig. 4
Fig. 4

Phase compensation effect of roll angular deviation.

Equations (8)

Equations on this page are rendered with MathJax. Learn more.

δ φ G1 , m = 2 π m d 1 Δ x G1 2 π λ ( cos θ G1 , inc + cos θ G1 , m ) Δ z G1 ,
δ φ G2 , m = 2 π m d 2 Δ x G2 2 π λ ( cos θ G2 , inc + cos θ G2 , m ) Δ z G2 .
Δ φ G1 G2 , + 1 = ( 2 π d 1 Δ x G1 2 π d 2 Δ x G2 ) 2 π λ [ ( cos θ G1 , inc + cos θ G1 , + 1 ) Δ z G1 ( cos θ G2 , inc + cos θ G2 , + 1 ) Δ z G2 ] .
2 π λ [ ( cos θ G1 , inc + cos θ G1 , + 1 ) Δ z G1 ( cos θ G2 , inc + cos θ G2 , + 1 ) Δ z G2 ]
Δ d = d 1 d 2 2 π Δ φ G1 G2 , + 1 Δ x .
Δ φ G1 G2 , + 1 = 2 π d 1 d 2 Δ d · Δ x 2 π λ [ ( 1 + cos θ G1 , + 1 ) Δ z G1 ( 1 + cos θ G2 , + 1 ) Δ z G2 ] ,
Δ φ G1 G2 , 1 = 2 π d 1 d 2 Δ d · Δ x 2 π λ [ ( 1 + cos θ G1 , 1 ) Δ z G1 ( 1 + cos θ G2 , 1 ) Δ z G2 ] .
Δ d = d 1 d 2 2 π · Δ φ G1 G2 , + 1 Δ φ G1 G2 , 1 2 Δ x .

Metrics