Abstract

A photothermal experiment with mirage detection was used to determine the thermal conductivity of various thin films deposited on semiconductor substrates. The first type consisted of conducting oxide films: ZnO and CdO deposited on GaSb:Te, while the other contained high dielectric constant HfO2 layers on Si. All films were fabricated using a magnetron sputtering technique. Experimental results showed that the value of the thermal conductivity of ZnO and CdO films is lower than the value obtained for HfO2. Thermal conductivities of investigated thin films are about 2 orders of magnitude lower than those corresponding to bulk materials.

© 2008 Optical Society of America

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  1. R. Ferro, J. A. Rodriguez, O. Vigil, A. Morales-Acevedo, and G. Contreras-Puente, “F-doped CdO thin films deposited by spray pyrolysis,” Phys. Status Solidi 177, 477-483 (2000).
    [CrossRef]
  2. A. A. Dakhel and F. Z. Henari, ”Optical characterization of thermally evaporated thin CdO films,” Cryst. Res. Technol. 38, 979-985 (2003).
    [CrossRef]
  3. L. R. de Leon-Gutierrez, J. J. Cayente-Romero, J. M. Peza-Tapia, E. Barrera-Calva, J. C. Martinez-Flores, and M. Ortega-Lopez, ”Some physical properties of Sn-doped CdO thin films prepared by chemical bath deposition,” Mater. Lett. 60, 3866-3870 (2006).
    [CrossRef]
  4. M. Z. Najdoski, I. S. Grozdanov, and B. Minceva-Sukarova, “Oriented cadmium oxide thin solid films,” J. Mater. Chem. 6, 761-764 (1996).
    [CrossRef]
  5. M. K. Jayaray, A. Antony, and M. Ramachandran, “Transparent conducting zinc oxide thin films prepared by off-axis rf magnetron sputtering,” Bull. Mater. Sci. 25, 227-230 (2002).
    [CrossRef]
  6. A. Abu El-Fadl, E. M. El-Maghraby, and G. A. Mohamad, “Influence of gamma radiation on the absorption spectra and optical energy gap of Li-doped ZnO thin films,” Cryst. Res. Technol. 39, 143-150 (2004).
    [CrossRef]
  7. C. H. Hsu, Z. K. Yang, P. Chang, M. Hong, J. Kwo, C. Huang, and H. Lee, “Structural investigations of epitaxial HfO2 films by x-ray scattering,” SRMS-5 Conference, Chicago, Illinois, 30 July-2 August 2006.
  8. Evans Analytical Group, “Thin film hafnium oxide (HfO2) thickness, composition, and uniformity measurements by XPS,” Application Note 415, 7 May 2007.
  9. M. Fadel, O. A. Azim, O. A. Omer, and R. R. Basily, “A study of some optical properties of hafnium dioxide (HfO2) thin films and their applications,” Appl. Phys. A 66, 335-343 (1998).
    [CrossRef]
  10. J. Bodzenta, “Thermal properties of thin films and problems with their determination,” Ann. Chim. Sci. Mater. 32, 401-420 (2007).
    [CrossRef]
  11. D. I. Florescu, L. G. Mourokh, F. H. Pollak, D. C. Look, G. Cantwell, and X. Li, “High spatial resolution thermal conductivity of bulk ZnO (0001),” J. Appl. Phys. 91, 890-892 (2002).
    [CrossRef]
  12. T. Tsubota, M. Ohtaki, K. Eguchi, and H. Arai, “Transport properties and thermoelectric performance of (Zn1−yMgy)1−xAlxO,” J. Mater. Chem. 8, 409-412 (1998).
    [CrossRef]
  13. S. M. Lee, D. G. Cahill, and T. H. Allen, “Thermal conductivity of sputtered oxide films,” Phys. Rev. 52, 253-257 (1995).
    [CrossRef]
  14. L. C. Aamodt and J. C. Murphy, “Photothermal measurements using a localized excitation source,” J. Appl. Phys. 52, 4903-4914 (1981).
    [CrossRef]
  15. J. Bodzenta, B. Burak, A. Jagoda, and B. Stańczyk, “Thermal conductivity of AlN and AlN-GaN thin films deposited on Si and GaAs substrates,” Diamond Relat. Mater. 14, 1169-1174 (2005).
    [CrossRef]
  16. K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
    [CrossRef]
  17. J. Bodzenta and A. Kaźmierczak-Bałata, “Investigation of thermal properties of SiC using photothermal method,” J. Phys. IV 137, 245-250 (2006).

2007 (2)

J. Bodzenta, “Thermal properties of thin films and problems with their determination,” Ann. Chim. Sci. Mater. 32, 401-420 (2007).
[CrossRef]

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

2006 (2)

J. Bodzenta and A. Kaźmierczak-Bałata, “Investigation of thermal properties of SiC using photothermal method,” J. Phys. IV 137, 245-250 (2006).

L. R. de Leon-Gutierrez, J. J. Cayente-Romero, J. M. Peza-Tapia, E. Barrera-Calva, J. C. Martinez-Flores, and M. Ortega-Lopez, ”Some physical properties of Sn-doped CdO thin films prepared by chemical bath deposition,” Mater. Lett. 60, 3866-3870 (2006).
[CrossRef]

2005 (1)

J. Bodzenta, B. Burak, A. Jagoda, and B. Stańczyk, “Thermal conductivity of AlN and AlN-GaN thin films deposited on Si and GaAs substrates,” Diamond Relat. Mater. 14, 1169-1174 (2005).
[CrossRef]

2004 (1)

A. Abu El-Fadl, E. M. El-Maghraby, and G. A. Mohamad, “Influence of gamma radiation on the absorption spectra and optical energy gap of Li-doped ZnO thin films,” Cryst. Res. Technol. 39, 143-150 (2004).
[CrossRef]

2003 (1)

A. A. Dakhel and F. Z. Henari, ”Optical characterization of thermally evaporated thin CdO films,” Cryst. Res. Technol. 38, 979-985 (2003).
[CrossRef]

2002 (2)

D. I. Florescu, L. G. Mourokh, F. H. Pollak, D. C. Look, G. Cantwell, and X. Li, “High spatial resolution thermal conductivity of bulk ZnO (0001),” J. Appl. Phys. 91, 890-892 (2002).
[CrossRef]

M. K. Jayaray, A. Antony, and M. Ramachandran, “Transparent conducting zinc oxide thin films prepared by off-axis rf magnetron sputtering,” Bull. Mater. Sci. 25, 227-230 (2002).
[CrossRef]

2000 (1)

R. Ferro, J. A. Rodriguez, O. Vigil, A. Morales-Acevedo, and G. Contreras-Puente, “F-doped CdO thin films deposited by spray pyrolysis,” Phys. Status Solidi 177, 477-483 (2000).
[CrossRef]

1998 (2)

T. Tsubota, M. Ohtaki, K. Eguchi, and H. Arai, “Transport properties and thermoelectric performance of (Zn1−yMgy)1−xAlxO,” J. Mater. Chem. 8, 409-412 (1998).
[CrossRef]

M. Fadel, O. A. Azim, O. A. Omer, and R. R. Basily, “A study of some optical properties of hafnium dioxide (HfO2) thin films and their applications,” Appl. Phys. A 66, 335-343 (1998).
[CrossRef]

1996 (1)

M. Z. Najdoski, I. S. Grozdanov, and B. Minceva-Sukarova, “Oriented cadmium oxide thin solid films,” J. Mater. Chem. 6, 761-764 (1996).
[CrossRef]

1995 (1)

S. M. Lee, D. G. Cahill, and T. H. Allen, “Thermal conductivity of sputtered oxide films,” Phys. Rev. 52, 253-257 (1995).
[CrossRef]

1981 (1)

L. C. Aamodt and J. C. Murphy, “Photothermal measurements using a localized excitation source,” J. Appl. Phys. 52, 4903-4914 (1981).
[CrossRef]

Aamodt, L. C.

L. C. Aamodt and J. C. Murphy, “Photothermal measurements using a localized excitation source,” J. Appl. Phys. 52, 4903-4914 (1981).
[CrossRef]

Allen, T. H.

S. M. Lee, D. G. Cahill, and T. H. Allen, “Thermal conductivity of sputtered oxide films,” Phys. Rev. 52, 253-257 (1995).
[CrossRef]

Antony, A.

M. K. Jayaray, A. Antony, and M. Ramachandran, “Transparent conducting zinc oxide thin films prepared by off-axis rf magnetron sputtering,” Bull. Mater. Sci. 25, 227-230 (2002).
[CrossRef]

Arai, H.

T. Tsubota, M. Ohtaki, K. Eguchi, and H. Arai, “Transport properties and thermoelectric performance of (Zn1−yMgy)1−xAlxO,” J. Mater. Chem. 8, 409-412 (1998).
[CrossRef]

Azim, O. A.

M. Fadel, O. A. Azim, O. A. Omer, and R. R. Basily, “A study of some optical properties of hafnium dioxide (HfO2) thin films and their applications,” Appl. Phys. A 66, 335-343 (1998).
[CrossRef]

Barrera-Calva, E.

L. R. de Leon-Gutierrez, J. J. Cayente-Romero, J. M. Peza-Tapia, E. Barrera-Calva, J. C. Martinez-Flores, and M. Ortega-Lopez, ”Some physical properties of Sn-doped CdO thin films prepared by chemical bath deposition,” Mater. Lett. 60, 3866-3870 (2006).
[CrossRef]

Basily, R. R.

M. Fadel, O. A. Azim, O. A. Omer, and R. R. Basily, “A study of some optical properties of hafnium dioxide (HfO2) thin films and their applications,” Appl. Phys. A 66, 335-343 (1998).
[CrossRef]

Bodzenta, J.

J. Bodzenta, “Thermal properties of thin films and problems with their determination,” Ann. Chim. Sci. Mater. 32, 401-420 (2007).
[CrossRef]

J. Bodzenta and A. Kaźmierczak-Bałata, “Investigation of thermal properties of SiC using photothermal method,” J. Phys. IV 137, 245-250 (2006).

J. Bodzenta, B. Burak, A. Jagoda, and B. Stańczyk, “Thermal conductivity of AlN and AlN-GaN thin films deposited on Si and GaAs substrates,” Diamond Relat. Mater. 14, 1169-1174 (2005).
[CrossRef]

Burak, B.

J. Bodzenta, B. Burak, A. Jagoda, and B. Stańczyk, “Thermal conductivity of AlN and AlN-GaN thin films deposited on Si and GaAs substrates,” Diamond Relat. Mater. 14, 1169-1174 (2005).
[CrossRef]

Cahill, D. G.

S. M. Lee, D. G. Cahill, and T. H. Allen, “Thermal conductivity of sputtered oxide films,” Phys. Rev. 52, 253-257 (1995).
[CrossRef]

Cantwell, G.

D. I. Florescu, L. G. Mourokh, F. H. Pollak, D. C. Look, G. Cantwell, and X. Li, “High spatial resolution thermal conductivity of bulk ZnO (0001),” J. Appl. Phys. 91, 890-892 (2002).
[CrossRef]

Cayente-Romero, J. J.

L. R. de Leon-Gutierrez, J. J. Cayente-Romero, J. M. Peza-Tapia, E. Barrera-Calva, J. C. Martinez-Flores, and M. Ortega-Lopez, ”Some physical properties of Sn-doped CdO thin films prepared by chemical bath deposition,” Mater. Lett. 60, 3866-3870 (2006).
[CrossRef]

Chang, P.

C. H. Hsu, Z. K. Yang, P. Chang, M. Hong, J. Kwo, C. Huang, and H. Lee, “Structural investigations of epitaxial HfO2 films by x-ray scattering,” SRMS-5 Conference, Chicago, Illinois, 30 July-2 August 2006.

Contreras-Puente, G.

R. Ferro, J. A. Rodriguez, O. Vigil, A. Morales-Acevedo, and G. Contreras-Puente, “F-doped CdO thin films deposited by spray pyrolysis,” Phys. Status Solidi 177, 477-483 (2000).
[CrossRef]

Dakhel, A. A.

A. A. Dakhel and F. Z. Henari, ”Optical characterization of thermally evaporated thin CdO films,” Cryst. Res. Technol. 38, 979-985 (2003).
[CrossRef]

de Leon-Gutierrez, L. R.

L. R. de Leon-Gutierrez, J. J. Cayente-Romero, J. M. Peza-Tapia, E. Barrera-Calva, J. C. Martinez-Flores, and M. Ortega-Lopez, ”Some physical properties of Sn-doped CdO thin films prepared by chemical bath deposition,” Mater. Lett. 60, 3866-3870 (2006).
[CrossRef]

Eguchi, K.

T. Tsubota, M. Ohtaki, K. Eguchi, and H. Arai, “Transport properties and thermoelectric performance of (Zn1−yMgy)1−xAlxO,” J. Mater. Chem. 8, 409-412 (1998).
[CrossRef]

El-Fadl, A. Abu

A. Abu El-Fadl, E. M. El-Maghraby, and G. A. Mohamad, “Influence of gamma radiation on the absorption spectra and optical energy gap of Li-doped ZnO thin films,” Cryst. Res. Technol. 39, 143-150 (2004).
[CrossRef]

El-Maghraby, E. M.

A. Abu El-Fadl, E. M. El-Maghraby, and G. A. Mohamad, “Influence of gamma radiation on the absorption spectra and optical energy gap of Li-doped ZnO thin films,” Cryst. Res. Technol. 39, 143-150 (2004).
[CrossRef]

Fadel, M.

M. Fadel, O. A. Azim, O. A. Omer, and R. R. Basily, “A study of some optical properties of hafnium dioxide (HfO2) thin films and their applications,” Appl. Phys. A 66, 335-343 (1998).
[CrossRef]

Ferro, R.

R. Ferro, J. A. Rodriguez, O. Vigil, A. Morales-Acevedo, and G. Contreras-Puente, “F-doped CdO thin films deposited by spray pyrolysis,” Phys. Status Solidi 177, 477-483 (2000).
[CrossRef]

Florescu, D. I.

D. I. Florescu, L. G. Mourokh, F. H. Pollak, D. C. Look, G. Cantwell, and X. Li, “High spatial resolution thermal conductivity of bulk ZnO (0001),” J. Appl. Phys. 91, 890-892 (2002).
[CrossRef]

Golaszewska, K.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Grozdanov, I. S.

M. Z. Najdoski, I. S. Grozdanov, and B. Minceva-Sukarova, “Oriented cadmium oxide thin solid films,” J. Mater. Chem. 6, 761-764 (1996).
[CrossRef]

Henari, F. Z.

A. A. Dakhel and F. Z. Henari, ”Optical characterization of thermally evaporated thin CdO films,” Cryst. Res. Technol. 38, 979-985 (2003).
[CrossRef]

Hong, M.

C. H. Hsu, Z. K. Yang, P. Chang, M. Hong, J. Kwo, C. Huang, and H. Lee, “Structural investigations of epitaxial HfO2 films by x-ray scattering,” SRMS-5 Conference, Chicago, Illinois, 30 July-2 August 2006.

Hsu, C. H.

C. H. Hsu, Z. K. Yang, P. Chang, M. Hong, J. Kwo, C. Huang, and H. Lee, “Structural investigations of epitaxial HfO2 films by x-ray scattering,” SRMS-5 Conference, Chicago, Illinois, 30 July-2 August 2006.

Huang, C.

C. H. Hsu, Z. K. Yang, P. Chang, M. Hong, J. Kwo, C. Huang, and H. Lee, “Structural investigations of epitaxial HfO2 films by x-ray scattering,” SRMS-5 Conference, Chicago, Illinois, 30 July-2 August 2006.

Jagoda, A.

J. Bodzenta, B. Burak, A. Jagoda, and B. Stańczyk, “Thermal conductivity of AlN and AlN-GaN thin films deposited on Si and GaAs substrates,” Diamond Relat. Mater. 14, 1169-1174 (2005).
[CrossRef]

Jayaray, M. K.

M. K. Jayaray, A. Antony, and M. Ramachandran, “Transparent conducting zinc oxide thin films prepared by off-axis rf magnetron sputtering,” Bull. Mater. Sci. 25, 227-230 (2002).
[CrossRef]

Kaminska, E.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Kazmierczak-Balata, A.

J. Bodzenta and A. Kaźmierczak-Bałata, “Investigation of thermal properties of SiC using photothermal method,” J. Phys. IV 137, 245-250 (2006).

Kowalczyk, E.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Kruszka, R.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Kwo, J.

C. H. Hsu, Z. K. Yang, P. Chang, M. Hong, J. Kwo, C. Huang, and H. Lee, “Structural investigations of epitaxial HfO2 films by x-ray scattering,” SRMS-5 Conference, Chicago, Illinois, 30 July-2 August 2006.

Lee, H.

C. H. Hsu, Z. K. Yang, P. Chang, M. Hong, J. Kwo, C. Huang, and H. Lee, “Structural investigations of epitaxial HfO2 films by x-ray scattering,” SRMS-5 Conference, Chicago, Illinois, 30 July-2 August 2006.

Lee, S. M.

S. M. Lee, D. G. Cahill, and T. H. Allen, “Thermal conductivity of sputtered oxide films,” Phys. Rev. 52, 253-257 (1995).
[CrossRef]

Li, X.

D. I. Florescu, L. G. Mourokh, F. H. Pollak, D. C. Look, G. Cantwell, and X. Li, “High spatial resolution thermal conductivity of bulk ZnO (0001),” J. Appl. Phys. 91, 890-892 (2002).
[CrossRef]

Look, D. C.

D. I. Florescu, L. G. Mourokh, F. H. Pollak, D. C. Look, G. Cantwell, and X. Li, “High spatial resolution thermal conductivity of bulk ZnO (0001),” J. Appl. Phys. 91, 890-892 (2002).
[CrossRef]

Martinez-Flores, J. C.

L. R. de Leon-Gutierrez, J. J. Cayente-Romero, J. M. Peza-Tapia, E. Barrera-Calva, J. C. Martinez-Flores, and M. Ortega-Lopez, ”Some physical properties of Sn-doped CdO thin films prepared by chemical bath deposition,” Mater. Lett. 60, 3866-3870 (2006).
[CrossRef]

Minceva-Sukarova, B.

M. Z. Najdoski, I. S. Grozdanov, and B. Minceva-Sukarova, “Oriented cadmium oxide thin solid films,” J. Mater. Chem. 6, 761-764 (1996).
[CrossRef]

Mohamad, G. A.

A. Abu El-Fadl, E. M. El-Maghraby, and G. A. Mohamad, “Influence of gamma radiation on the absorption spectra and optical energy gap of Li-doped ZnO thin films,” Cryst. Res. Technol. 39, 143-150 (2004).
[CrossRef]

Morales-Acevedo, A.

R. Ferro, J. A. Rodriguez, O. Vigil, A. Morales-Acevedo, and G. Contreras-Puente, “F-doped CdO thin films deposited by spray pyrolysis,” Phys. Status Solidi 177, 477-483 (2000).
[CrossRef]

Mourokh, L. G.

D. I. Florescu, L. G. Mourokh, F. H. Pollak, D. C. Look, G. Cantwell, and X. Li, “High spatial resolution thermal conductivity of bulk ZnO (0001),” J. Appl. Phys. 91, 890-892 (2002).
[CrossRef]

Murphy, J. C.

L. C. Aamodt and J. C. Murphy, “Photothermal measurements using a localized excitation source,” J. Appl. Phys. 52, 4903-4914 (1981).
[CrossRef]

Najdoski, M. Z.

M. Z. Najdoski, I. S. Grozdanov, and B. Minceva-Sukarova, “Oriented cadmium oxide thin solid films,” J. Mater. Chem. 6, 761-764 (1996).
[CrossRef]

Ohtaki, M.

T. Tsubota, M. Ohtaki, K. Eguchi, and H. Arai, “Transport properties and thermoelectric performance of (Zn1−yMgy)1−xAlxO,” J. Mater. Chem. 8, 409-412 (1998).
[CrossRef]

Omer, O. A.

M. Fadel, O. A. Azim, O. A. Omer, and R. R. Basily, “A study of some optical properties of hafnium dioxide (HfO2) thin films and their applications,” Appl. Phys. A 66, 335-343 (1998).
[CrossRef]

Ortega-Lopez, M.

L. R. de Leon-Gutierrez, J. J. Cayente-Romero, J. M. Peza-Tapia, E. Barrera-Calva, J. C. Martinez-Flores, and M. Ortega-Lopez, ”Some physical properties of Sn-doped CdO thin films prepared by chemical bath deposition,” Mater. Lett. 60, 3866-3870 (2006).
[CrossRef]

Papis, E.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Peza-Tapia, J. M.

L. R. de Leon-Gutierrez, J. J. Cayente-Romero, J. M. Peza-Tapia, E. Barrera-Calva, J. C. Martinez-Flores, and M. Ortega-Lopez, ”Some physical properties of Sn-doped CdO thin films prepared by chemical bath deposition,” Mater. Lett. 60, 3866-3870 (2006).
[CrossRef]

Piotrowska, A.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Piotrowski, T. T.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Pollak, F. H.

D. I. Florescu, L. G. Mourokh, F. H. Pollak, D. C. Look, G. Cantwell, and X. Li, “High spatial resolution thermal conductivity of bulk ZnO (0001),” J. Appl. Phys. 91, 890-892 (2002).
[CrossRef]

Ramachandran, M.

M. K. Jayaray, A. Antony, and M. Ramachandran, “Transparent conducting zinc oxide thin films prepared by off-axis rf magnetron sputtering,” Bull. Mater. Sci. 25, 227-230 (2002).
[CrossRef]

Rodriguez, J. A.

R. Ferro, J. A. Rodriguez, O. Vigil, A. Morales-Acevedo, and G. Contreras-Puente, “F-doped CdO thin films deposited by spray pyrolysis,” Phys. Status Solidi 177, 477-483 (2000).
[CrossRef]

Rutkowski, J.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Stanczyk, B.

J. Bodzenta, B. Burak, A. Jagoda, and B. Stańczyk, “Thermal conductivity of AlN and AlN-GaN thin films deposited on Si and GaAs substrates,” Diamond Relat. Mater. 14, 1169-1174 (2005).
[CrossRef]

Tsubota, T.

T. Tsubota, M. Ohtaki, K. Eguchi, and H. Arai, “Transport properties and thermoelectric performance of (Zn1−yMgy)1−xAlxO,” J. Mater. Chem. 8, 409-412 (1998).
[CrossRef]

Vigil, O.

R. Ferro, J. A. Rodriguez, O. Vigil, A. Morales-Acevedo, and G. Contreras-Puente, “F-doped CdO thin films deposited by spray pyrolysis,” Phys. Status Solidi 177, 477-483 (2000).
[CrossRef]

Wawro, A.

K. Gołaszewska, E. Kamińska, A. Piotrowska, J. Rutkowski, R. Kruszka, E. Kowalczyk, E. Papis, A. Wawro, and T. T. Piotrowski, “Transparent ohmic contacts to GaSb/In(Al)GaAsSb photovoltaic cells,” Phys. Status Solidi A 204, 1051-1055(2007).
[CrossRef]

Yang, Z. K.

C. H. Hsu, Z. K. Yang, P. Chang, M. Hong, J. Kwo, C. Huang, and H. Lee, “Structural investigations of epitaxial HfO2 films by x-ray scattering,” SRMS-5 Conference, Chicago, Illinois, 30 July-2 August 2006.

Ann. Chim. Sci. Mater. (1)

J. Bodzenta, “Thermal properties of thin films and problems with their determination,” Ann. Chim. Sci. Mater. 32, 401-420 (2007).
[CrossRef]

Appl. Phys. A (1)

M. Fadel, O. A. Azim, O. A. Omer, and R. R. Basily, “A study of some optical properties of hafnium dioxide (HfO2) thin films and their applications,” Appl. Phys. A 66, 335-343 (1998).
[CrossRef]

Bull. Mater. Sci. (1)

M. K. Jayaray, A. Antony, and M. Ramachandran, “Transparent conducting zinc oxide thin films prepared by off-axis rf magnetron sputtering,” Bull. Mater. Sci. 25, 227-230 (2002).
[CrossRef]

Cryst. Res. Technol. (2)

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Figures (13)

Fig. 1
Fig. 1

Geometry of the experiment.

Fig. 2
Fig. 2

Atomic force microscopy (AFM) surface morphology of ZnO film.

Fig. 3
Fig. 3

AFM surface morphology of CdO film.

Fig. 4
Fig. 4

AFM surface morphology of Hf O 2 film.

Fig. 5
Fig. 5

Natural logarithm of the amplitude of a photothermal signal measured for a Si substrate with a fitted theoretical curve.

Fig. 6
Fig. 6

Phase of a photothermal signal measured for a Si substrate with a fitted theoretical curve.

Fig. 7
Fig. 7

Natural logarithm of the amplitude of a photothermal signal measured for a GaSb substrate with a fitted theoretical curve.

Fig. 8
Fig. 8

Phase of a photothermal signal measured for a GaSb substrate with a fitted theoretical curve.

Fig. 9
Fig. 9

Phase difference of normal and tangential components of a photothermal signal measured for CdO film.

Fig. 10
Fig. 10

Phase difference of normal and tangential components of a photothermal signal measured for ZnO film.

Fig. 11
Fig. 11

Phase difference of normal and tangential components of a photothermal signal measured for Hf O 2 ( 10 % O 2 ) film.

Fig. 12
Fig. 12

Phase difference of normal and tangential components of a photothermal signal measured for Hf O 2 ( 20 % O 2 ) film.

Fig. 13
Fig. 13

Phase difference of normal and tangential components of a photothermal signal measured for Hf O 2 ( 30 % O 2 ) film.

Tables (2)

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Table 1 Basic Information on Samples

Tables Icon

Table 2 Thermal Conductivity of Thin Films

Equations (13)

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α = κ C .
α 2 T = T t - q κ ,
- k x 2 Θ - k y 2 Θ + Θ z = - i ω α Θ - q κ ,
Θ j ( z = z j k ) = Θ k ( z = z j k ) ,
- κ j Θ j z | z = z j k = - κ k Θ k z | z = z j k .
Ψ = Γ 1 n d n d T T × d Γ ,
Ψ n = - 1 n d n d T - + Θ g z d x ,
Ψ t = 1 n d n d T - + Θ g y d x .
Ψ n ( k y , z , ω ) = - 1 n d n d T z - + Θ g ( k x , k y , z , ω ) d x = - 1 n d n d T z Θ g ( 0 , k y , z , ω ) ,
Ψ t ( k y , z , ω ) = 1 n d n d T i k y - + Θ g ( k x , k y , z , ω ) d x = 1 n d n d T i k y Θ g ( 0 , k y , z , ω ) ,
Θ g ( 0 , k y , z , ω ) = Θ g ( 0 , k y , 0 , ω ) exp [ - k y 2 + i ( ω / α a ) z ] = A ( k y , ω ) exp [ - k y 2 + i ( ω / α a ) z ] .
Ψ n FRONT Ψ n REAR = ξ δ a A FRONT exp ( - δ a z ) ξ δ a A REAR exp ( - δ a z ) = A FRONT A REAR ,
Ψ t FRONT Ψ t REAR = i ξ k y A FRONT exp ( - δ a z ) i ξ k y A REAR exp ( - δ a z ) = A FRONT A REAR ,

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