Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement

Not Accessible

Your library or personal account may give you access

Abstract

A method to determine the thickness of a nonabsorbing thin film on an absorbing substrate is presented. A linear relation between the thin-film thickness and the tangent wavelength of the reflectance spectrum for a specific interference order is revealed, which permits the calculation of the thickness provided that the wavelength-dependent optical parameters of the thin film and the substrate are known. The thickness can be calculated precisely from the reflectance spectrum by using one extreme only, as is demonstrated theoretically for SiO2 thin film on a Si substrate. The application of this method is demonstrated experimentally for the same thin-film structure but with different Si substrates. The results are compared with those given by the algebraic fitting method, and very good agreement is confirmed.

© 2009 Optical Society of America

Full Article  |  PDF Article
More Like This
Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances

Ivan Ohlídal, Daniel Franta, Miloslav Ohlídal, and Karel Navrátil
Appl. Opt. 40(31) 5711-5717 (2001)

Determination of optical parameters and thickness of weakly absorbing thin films from reflectance and transmittance spectra

Vitaly P. Kutavichus, Valery V. Filippov, and Vitali H. Huzouski
Appl. Opt. 45(19) 4547-4553 (2006)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved