Abstract

This paper is based on a microinteraction principle of fabricating a RB-SiC material with a fixed abrasive. The influence of the depth formed on a RB-SiC workpiece by a diamond abrasive on the material removal rate and the surface roughness of an optical component are quantitatively discussed. A mathematical model of the material removal rate and the simulation results of the surface roughness are achieved. In spite of some small difference between the experimental results and the theoretical anticipation, which is predictable, the actual removal rate matches the theoretical prediction very well. The fixed abrasive technology’s characteristic of easy prediction is of great significance in the optical fabrication industry, so this brand-new fixed abrasive technology has wide application possibilities.

© 2009 Optical Society of America

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References

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  1. M. A. Ealey and G. Q. Weaver, “Developmental history and trends for reaction bonded silicon carbide mirrors,” Proc. SPIE 2857, 66-72.
    [CrossRef]
  2. Y. Zhao, D. M. Maietta, and L. Chang, “An asperity micro-contact model incorporating the transition from elastic deformation to fully plastic flow,” J. Tribol. 122, 86-93(2000).
    [CrossRef]
  3. Y. Zhao and L. Chang, “A micro-contact and wear model for chemical-mechanical polishing of silicon wafers,” Wear 252, 220-226 (2002).
    [CrossRef]
  4. E. Rabinowicz, Friction and Wear of Materials, 2nd ed.(Wiley, 1995).
  5. D. Xue, Z. Zhang, and X. Zhang, “Computer controlled polishing technology for middle or small aspheric lens,” Opt. Precision Eng. 13, 198-204 (2005).
  6. H. Y. Tam, H. B. Cheng, and Y. W. Wang, “Removal rate and surface roughness in the lapping and polishing of RB-RB-SiC optical components,” J. Mater. Process. Technol. 192-193, 276-280 (2007).
  7. X. Zhang, Y. Zhang, and J. Yu, “FSGJ-1 system of asphere automaking and on-line testing,” Opt. Precision Eng. 5, 70-76 (1997).
  8. L. Zheng, X. Zhang, and F. Zhang, “NC surfacing of two off-axis aspheric mirrors,” Opt. Precision Eng. 12, 113-117(2004).
  9. J. Yang and C. Tian, High Speed Lapping Technology (Academic, 2003).
  10. D. F. Edwards and P. P. Hed, “Optical glass fabrication technology. 1: Fine grinding mechanism using bound diamond abrasives,” Appl. Opt. 26, 4670-4676 (1987).
    [CrossRef] [PubMed]

2007

H. Y. Tam, H. B. Cheng, and Y. W. Wang, “Removal rate and surface roughness in the lapping and polishing of RB-RB-SiC optical components,” J. Mater. Process. Technol. 192-193, 276-280 (2007).

2005

D. Xue, Z. Zhang, and X. Zhang, “Computer controlled polishing technology for middle or small aspheric lens,” Opt. Precision Eng. 13, 198-204 (2005).

2004

L. Zheng, X. Zhang, and F. Zhang, “NC surfacing of two off-axis aspheric mirrors,” Opt. Precision Eng. 12, 113-117(2004).

2003

J. Yang and C. Tian, High Speed Lapping Technology (Academic, 2003).

2002

Y. Zhao and L. Chang, “A micro-contact and wear model for chemical-mechanical polishing of silicon wafers,” Wear 252, 220-226 (2002).
[CrossRef]

2000

Y. Zhao, D. M. Maietta, and L. Chang, “An asperity micro-contact model incorporating the transition from elastic deformation to fully plastic flow,” J. Tribol. 122, 86-93(2000).
[CrossRef]

1997

X. Zhang, Y. Zhang, and J. Yu, “FSGJ-1 system of asphere automaking and on-line testing,” Opt. Precision Eng. 5, 70-76 (1997).

1995

E. Rabinowicz, Friction and Wear of Materials, 2nd ed.(Wiley, 1995).

1987

Chang, L.

Y. Zhao and L. Chang, “A micro-contact and wear model for chemical-mechanical polishing of silicon wafers,” Wear 252, 220-226 (2002).
[CrossRef]

Y. Zhao, D. M. Maietta, and L. Chang, “An asperity micro-contact model incorporating the transition from elastic deformation to fully plastic flow,” J. Tribol. 122, 86-93(2000).
[CrossRef]

Cheng, H. B.

H. Y. Tam, H. B. Cheng, and Y. W. Wang, “Removal rate and surface roughness in the lapping and polishing of RB-RB-SiC optical components,” J. Mater. Process. Technol. 192-193, 276-280 (2007).

Ealey, M. A.

M. A. Ealey and G. Q. Weaver, “Developmental history and trends for reaction bonded silicon carbide mirrors,” Proc. SPIE 2857, 66-72.
[CrossRef]

Edwards, D. F.

Hed, P. P.

Maietta, D. M.

Y. Zhao, D. M. Maietta, and L. Chang, “An asperity micro-contact model incorporating the transition from elastic deformation to fully plastic flow,” J. Tribol. 122, 86-93(2000).
[CrossRef]

Rabinowicz, E.

E. Rabinowicz, Friction and Wear of Materials, 2nd ed.(Wiley, 1995).

Tam, H. Y.

H. Y. Tam, H. B. Cheng, and Y. W. Wang, “Removal rate and surface roughness in the lapping and polishing of RB-RB-SiC optical components,” J. Mater. Process. Technol. 192-193, 276-280 (2007).

Tian, C.

J. Yang and C. Tian, High Speed Lapping Technology (Academic, 2003).

Wang, Y. W.

H. Y. Tam, H. B. Cheng, and Y. W. Wang, “Removal rate and surface roughness in the lapping and polishing of RB-RB-SiC optical components,” J. Mater. Process. Technol. 192-193, 276-280 (2007).

Weaver, G. Q.

M. A. Ealey and G. Q. Weaver, “Developmental history and trends for reaction bonded silicon carbide mirrors,” Proc. SPIE 2857, 66-72.
[CrossRef]

Xue, D.

D. Xue, Z. Zhang, and X. Zhang, “Computer controlled polishing technology for middle or small aspheric lens,” Opt. Precision Eng. 13, 198-204 (2005).

Yang, J.

J. Yang and C. Tian, High Speed Lapping Technology (Academic, 2003).

Yu, J.

X. Zhang, Y. Zhang, and J. Yu, “FSGJ-1 system of asphere automaking and on-line testing,” Opt. Precision Eng. 5, 70-76 (1997).

Zhang, F.

L. Zheng, X. Zhang, and F. Zhang, “NC surfacing of two off-axis aspheric mirrors,” Opt. Precision Eng. 12, 113-117(2004).

Zhang, X.

D. Xue, Z. Zhang, and X. Zhang, “Computer controlled polishing technology for middle or small aspheric lens,” Opt. Precision Eng. 13, 198-204 (2005).

L. Zheng, X. Zhang, and F. Zhang, “NC surfacing of two off-axis aspheric mirrors,” Opt. Precision Eng. 12, 113-117(2004).

X. Zhang, Y. Zhang, and J. Yu, “FSGJ-1 system of asphere automaking and on-line testing,” Opt. Precision Eng. 5, 70-76 (1997).

Zhang, Y.

X. Zhang, Y. Zhang, and J. Yu, “FSGJ-1 system of asphere automaking and on-line testing,” Opt. Precision Eng. 5, 70-76 (1997).

Zhang, Z.

D. Xue, Z. Zhang, and X. Zhang, “Computer controlled polishing technology for middle or small aspheric lens,” Opt. Precision Eng. 13, 198-204 (2005).

Zhao, Y.

Y. Zhao and L. Chang, “A micro-contact and wear model for chemical-mechanical polishing of silicon wafers,” Wear 252, 220-226 (2002).
[CrossRef]

Y. Zhao, D. M. Maietta, and L. Chang, “An asperity micro-contact model incorporating the transition from elastic deformation to fully plastic flow,” J. Tribol. 122, 86-93(2000).
[CrossRef]

Zheng, L.

L. Zheng, X. Zhang, and F. Zhang, “NC surfacing of two off-axis aspheric mirrors,” Opt. Precision Eng. 12, 113-117(2004).

Appl. Opt.

J. Mater. Process. Technol.

H. Y. Tam, H. B. Cheng, and Y. W. Wang, “Removal rate and surface roughness in the lapping and polishing of RB-RB-SiC optical components,” J. Mater. Process. Technol. 192-193, 276-280 (2007).

J. Tribol.

Y. Zhao, D. M. Maietta, and L. Chang, “An asperity micro-contact model incorporating the transition from elastic deformation to fully plastic flow,” J. Tribol. 122, 86-93(2000).
[CrossRef]

Opt. Precision Eng.

D. Xue, Z. Zhang, and X. Zhang, “Computer controlled polishing technology for middle or small aspheric lens,” Opt. Precision Eng. 13, 198-204 (2005).

X. Zhang, Y. Zhang, and J. Yu, “FSGJ-1 system of asphere automaking and on-line testing,” Opt. Precision Eng. 5, 70-76 (1997).

L. Zheng, X. Zhang, and F. Zhang, “NC surfacing of two off-axis aspheric mirrors,” Opt. Precision Eng. 12, 113-117(2004).

Proc. SPIE

M. A. Ealey and G. Q. Weaver, “Developmental history and trends for reaction bonded silicon carbide mirrors,” Proc. SPIE 2857, 66-72.
[CrossRef]

Wear

Y. Zhao and L. Chang, “A micro-contact and wear model for chemical-mechanical polishing of silicon wafers,” Wear 252, 220-226 (2002).
[CrossRef]

Other

E. Rabinowicz, Friction and Wear of Materials, 2nd ed.(Wiley, 1995).

J. Yang and C. Tian, High Speed Lapping Technology (Academic, 2003).

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Figures (7)

Fig. 1
Fig. 1

Model of microinteraction between a diamond fixed abrasive and a workpiece.

Fig. 2
Fig. 2

Sketch of the contact area between a single abrasive and a workpiece.

Fig. 3
Fig. 3

Sketch of experiment.

Fig. 4
Fig. 4

Curves of material removal with (a) W7 pellet, (b) W5 pellet, (c) W3.5 pellet, and (d) W1.5 pellet.

Fig. 5
Fig. 5

Removal curve of different types of pellets.

Fig. 6
Fig. 6

Comparison of AFM testing results: (a) W7 fabricating result, Ra = 31.952 nm ; (b) W5 fabricating result, Ra = 7.514 nm ; (c) W3.5 fabricating result, Ra = 3.882 nm ; (d) W1.5 fabricating result, Ra = 1.151 nm .

Fig. 7
Fig. 7

Surface roughness curve of different type pellets.

Tables (2)

Tables Icon

Table 1 Properties of Several Materials Used for Telescope

Tables Icon

Table 2 Specification of Four Types of Pellets Used in the Experiment

Equations (21)

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m = 4 ξ 2 3 π D 2 .
f ( a ) = { 1 a max ( 0 < a < a max < D 2 ) 0 ( else) .
P { a < x } = 0 x 1 a max d a = x a max ,
m 1 = 4 ξ 2 3 π D 2 ( 1 x a max ) .
δ r c = ( 3 π k r H r 4 E r c ) 2 ( D 2 ) ,
1 E r c = 1 - ν r 2 E r + 1 ν c 2 E c ,
δ r - c = 2.77 D .
δ sic c = ( 3 π k sic H sic 4 E sic - c ) 2 ( D 2 ) ,
δ sic c = 0.0057 D .
F f w = H w π D δ w .
F f p = 4 3 E f p ( D 2 ) 1 2 δ p 3 2 ,
4 3 E f p ( D 2 ) 1 2 ( a - δ w ) 3 2 = H w π D δ w .
δ w 3 + ( 9 H w 2 π 2 D 8 E f p 2 3 a ) δ w 2 + 3 a 2 δ w a 3 = 0.
Δ G = K · Δ S · V · t ,
Δ Z = Δ G N a A n t = K · Δ S · V · N a A n ,
K = 3 π tan θ 3 π δ w r 3 π δ w ( D δ w ) 1 2 = 3 π ( δ w D ) 1 2 .
Δ S = 1 2 δ w ( 2 r ) ,
r = ( ( D 2 ) 2 ( D 2 - δ w ) 2 ) 1 2 = ( δ w D δ w 2 ) 1 2 .
Δ S δ w 3 2 D 1 2 .
Δ Z = 12 ξ 2 3 π 2 D 2 V A t * δ w 2 ( 1 x a max ) ,
Ra = 1 n 2 i = 1 n j = 1 n z ( x i , y j ) .

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