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Design of a micro-opto-electro-mechanical-system-based near-infrared hyperspectral imager

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Abstract

We present the development of an imaging spectrometer for the near infrared (NIR) using a micro- opto-electromechanical system. A diffraction grating has been etched into the surface of a micro mechanical scanning mirror made of silicon and is used to scan the object space and to disperse the NIR radiation simultaneously. Beginning with the specific requirements of NIR hyperspectral imaging, a detailed analysis of the system approach resulting in an all-reflective optical design for the hyperspectral imager is presented. The investigation includes a thorough consideration of spectral and spatial distortion occurring by scanning the scene with a grating. Minimization of these aberrations leads to an improved spectrometer design.

© 2009 Optical Society of America

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