Abstract

Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also affects the measurement accuracy. In this paper, we first apply the laser fluorescent confocal microscopy and intensity differentiation algorithm to obtain the complete three-dimensional profile of the buried, undercut structures in microfluidic devices, which are made by the soft lithography technique and bonded by the oxygen plasma method. The impact of material wettability and the refractive index (n) mismatch among the liquid, samples, cover layer, and objective on the measurement accuracy are experimentally investigated.

© 2009 Optical Society of America

Full Article  |  PDF Article
Related Articles
Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices

Malalahalli S. Giridhar, Kibyung Seong, Axel Schülzgen, Pramod Khulbe, Nasser Peyghambarian, and Masud Mansuripur
Appl. Opt. 43(23) 4584-4589 (2004)

Three dimensional sidewall measurements by laser fluorescent confocal microscopy

Shiguang Li, Zhiguang Xu, Ivan Reading, Soon Fatt Yoon, Zhong Ping Fang, and Jianhong Zhao
Opt. Express 16(6) 4001-4014 (2008)

Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding

Dawn Schafer, Emily A. Gibson, Evan A. Salim, Amy E. Palmer, Ralph Jimenez, and Jeff Squier
Opt. Express 17(8) 6068-6073 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription