Abstract

We describe a microreflectance difference (μRD) spectrometer based on a charge coupled device (CCD), in contrast to most common RD spectrometers that are based on a photomultiplier or a photodiode as a light detector. The advantage of our instrument over others is the possibility to isolate the RD spectrum of specific areas of the sample; thus topographic maps of the surface can be obtained. In our setup we have a maximum spatial resolution of approximately 2.50μm×2.50μm and a spectral range from 1.2 to 5.5eV. To illustrate the performance of the spectrometer, we have measured strains in mechanically polished GaAs (001) single crystals.

© 2009 Optical Society of America

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