Abstract

By modifying some structural characteristics, the annealing process can have considerable effects on the optical performance and laser-induced damage resistance of ZrO2 thin films deposited by electron-beam deposition. Annealing at increased temperature gives rise to an increase of refractive index, the evolutions of packing density, and the structure order of the films due to the removal of adsorbed water in advance, material crystallization, and phase transformation. Thus, the combined effects of greatly strengthened endurance, crystal structure ordering, and stress transition after the annealing leads to an increase of the laser-induced damage threshold in a vacuum environment from 12 to 16 J/cm2 (at 1064 nm, 12 ns pulse duration, and 1-on-1 testing mode).

© 2009 Optical Society of America

Full Article  |  PDF Article
Related Articles
Employing oxygen-plasma posttreatment to improve the laser-induced damage threshold of ZrO2 films prepared by the electron-beam evaporation method

Dongping Zhang, Jianda Shao, Dawei Zhang, Shuhai Fan, Tianya Tan, and Zhengxiu Fan
Opt. Lett. 29(24) 2870-2872 (2004)

Influence of thermal annealing and ultraviolet light irradiation on LaF3 thin films at 193 nm

Cheng-Chung Lee, Ming-Chung Liu, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 44(32) 6921-6926 (2005)

TiO2-Ta2O5 composite thin films deposited by radio frequency ion-beam sputtering

Cheng-Chung Lee and Chien-Jen Tang
Appl. Opt. 45(36) 9125-9131 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription