Abstract

By modifying some structural characteristics, the annealing process can have considerable effects on the optical performance and laser-induced damage resistance of ZrO2 thin films deposited by electron-beam deposition. Annealing at increased temperature gives rise to an increase of refractive index, the evolutions of packing density, and the structure order of the films due to the removal of adsorbed water in advance, material crystallization, and phase transformation. Thus, the combined effects of greatly strengthened endurance, crystal structure ordering, and stress transition after the annealing leads to an increase of the laser-induced damage threshold in a vacuum environment from 12 to 16J/cm2 (at 1064nm, 12ns pulse duration, and 1-on-1 testing mode).

© 2009 Optical Society of America

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    [CrossRef]
  4. L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
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    [CrossRef]
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    [CrossRef]
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  23. S. Y. Shao, J. D. Shao, D. P. Zhang, J. B. Huang and Z. X. Fan, “Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation,” Proc. SPIE 5774, 307-311 (2004).
    [CrossRef]

2009 (2)

X. L. Ling, Y. A. Zhao, D. W. Li, J. D. Shao, and Z. X. Fan, “Damage investigations of AR coating under atmospheric and vacuum conditions,” Opt. Laser Technol. 41, 857-861(2009).
[CrossRef]

L. Kumari, G. H. Du, W. Z. Li, R. S. Vennila, S. K. Saxena, and D. Z. Wang, “Synthesis, microstructure and optical characterization of zirconium Oxide nanostructures,” Ceram. Int. 35, 2401-2408 (2009).
[CrossRef]

2008 (1)

W. Riede and P. Allenspacher, “Analysis of the air-vacuum effect in dielectric coatings,” Proc. SPIE 7132, 71320F(2008).
[CrossRef]

2007 (2)

A. A. Rastorguev, V. I. Belyi, T. P. Smirnova, and L. V. Yakovkina, “Luminescence of intrinsic and extrinsic defects in hafnium Oxide films,” Phys. Rev. B 76, 235315 (2007).
[CrossRef]

L. P. Liang, Y. Xu, L. Zhang, Y. G. Sheng, D. Wu, and Y. H. Sun, “Annealing effect on the optical properties and laser-induced damage resistance of solgel-derived ZrO2 films,” J. Opt. Soc. Am. B 24, 1066-1074 (2007).
[CrossRef]

2006 (3)

P. Allenspacher and W. Riede, “Laser qualification testing of space optics,” Proc. SPIE 6403, 64030T (2006).
[CrossRef]

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

S. H. Woo and C. K. Hwangbo, “Effects of annealing on the optical, structural, and chemical properties of TiO2 and MgF2 thin films prepared by plasma ion-assisted deposition,” Appl. Opt. 45, 1447-1455 (2006).
[CrossRef] [PubMed]

2005 (3)

2004 (2)

J. A. Valdez, M. Tang, Z. H. Chi, M. I. Peters, and K. E. Sickafus, “Characterization of an ion irradiation induced phase transformation in monoclinic zirconia,” Nucl. Instrum. Methods B 218, 103-110 (2004).
[CrossRef]

S. Y. Shao, J. D. Shao, D. P. Zhang, J. B. Huang and Z. X. Fan, “Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation,” Proc. SPIE 5774, 307-311 (2004).
[CrossRef]

2002 (1)

2000 (1)

A. K. Burnham, M. Runkel, S. G. Demos, M. R. Kozlowski, and P. J. Wegner, “Effect of vacuum on the occurrence of UV-induced surface photoluminescence, transmission loss, and catastrophic surface damage,” Proc. SPIE 4134, 243-252(2000).
[CrossRef]

1999 (1)

A. P. Mirgorodskya, M. B. Smirnova, and P. E. Quintard, “Phonon spectra evolution and soft-mode instabilities of zirconia during the c-t-m transformation,” J. Phys. Chem. Solids 60, 985-992 (1999).
[CrossRef]

1996 (1)

K. Vanheusden, C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, “Correlation between photoluminescence and Oxygen vacancies in ZnO phosphors,” Appl. Phys. Lett. 68, 403-405 (1996).
[CrossRef]

1993 (1)

M. Bellotto, A. Caridi, E. Cereda, G. Gabetta, and M. Scagliotti, “Influence of the Oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrOx films,” Appl. Phys. Lett. 63, 2056-2058 (1993).
[CrossRef]

1989 (1)

1985 (1)

1976 (1)

J. C. Manifacier, J. Gasiot, and J. P. Fillard, “A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002-1004 (1976).
[CrossRef]

1970 (1)

I. A. El-Shanshoury, V. A. Rudenko, and I. A. Ibrahim, “Polymorphic behavior of thin evaporated films of zirconium and hafnium Oxides,” J. Am. Ceram. Soc. 53, 264-268 (1970).
[CrossRef]

Allenspacher, P.

W. Riede and P. Allenspacher, “Analysis of the air-vacuum effect in dielectric coatings,” Proc. SPIE 7132, 71320F(2008).
[CrossRef]

P. Allenspacher and W. Riede, “Laser qualification testing of space optics,” Proc. SPIE 6403, 64030T (2006).
[CrossRef]

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

P. Allenspacher and W. Riede, “Vacuum laser damage test bench,” Proc. SPIE 5991, 599128 (2005).
[CrossRef]

Angel, J. A.

Bellotto, M.

M. Bellotto, A. Caridi, E. Cereda, G. Gabetta, and M. Scagliotti, “Influence of the Oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrOx films,” Appl. Phys. Lett. 63, 2056-2058 (1993).
[CrossRef]

Belyi, V. I.

A. A. Rastorguev, V. I. Belyi, T. P. Smirnova, and L. V. Yakovkina, “Luminescence of intrinsic and extrinsic defects in hafnium Oxide films,” Phys. Rev. B 76, 235315 (2007).
[CrossRef]

Burnham, A. K.

A. K. Burnham, M. Runkel, S. G. Demos, M. R. Kozlowski, and P. J. Wegner, “Effect of vacuum on the occurrence of UV-induced surface photoluminescence, transmission loss, and catastrophic surface damage,” Proc. SPIE 4134, 243-252(2000).
[CrossRef]

Caridi, A.

M. Bellotto, A. Caridi, E. Cereda, G. Gabetta, and M. Scagliotti, “Influence of the Oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrOx films,” Appl. Phys. Lett. 63, 2056-2058 (1993).
[CrossRef]

Carniglia, C. K.

Cereda, E.

M. Bellotto, A. Caridi, E. Cereda, G. Gabetta, and M. Scagliotti, “Influence of the Oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrOx films,” Appl. Phys. Lett. 63, 2056-2058 (1993).
[CrossRef]

Chen, H. C.

Chi, Z. H.

J. A. Valdez, M. Tang, Z. H. Chi, M. I. Peters, and K. E. Sickafus, “Characterization of an ion irradiation induced phase transformation in monoclinic zirconia,” Nucl. Instrum. Methods B 218, 103-110 (2004).
[CrossRef]

Demos, S. G.

A. K. Burnham, M. Runkel, S. G. Demos, M. R. Kozlowski, and P. J. Wegner, “Effect of vacuum on the occurrence of UV-induced surface photoluminescence, transmission loss, and catastrophic surface damage,” Proc. SPIE 4134, 243-252(2000).
[CrossRef]

Dobrowolski, J. A.

Du, G. H.

L. Kumari, G. H. Du, W. Z. Li, R. S. Vennila, S. K. Saxena, and D. Z. Wang, “Synthesis, microstructure and optical characterization of zirconium Oxide nanostructures,” Ceram. Int. 35, 2401-2408 (2009).
[CrossRef]

Ehlers, H.

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

El-Shanshoury, I. A.

I. A. El-Shanshoury, V. A. Rudenko, and I. A. Ibrahim, “Polymorphic behavior of thin evaporated films of zirconium and hafnium Oxides,” J. Am. Ceram. Soc. 53, 264-268 (1970).
[CrossRef]

Fan, Z. X.

X. L. Ling, Y. A. Zhao, D. W. Li, J. D. Shao, and Z. X. Fan, “Damage investigations of AR coating under atmospheric and vacuum conditions,” Opt. Laser Technol. 41, 857-861(2009).
[CrossRef]

S. Y. Shao, J. D. Shao, H. B. He and Z. X. Fan, “Stress analysis of ZrO2/SiO2 multilayers deposited on different substrates with different thickness periods,” Opt. Lett. 30, 2119-2121(2005).
[CrossRef] [PubMed]

S. Y. Shao, J. D. Shao, D. P. Zhang, J. B. Huang and Z. X. Fan, “Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation,” Proc. SPIE 5774, 307-311 (2004).
[CrossRef]

Fillard, J. P.

J. C. Manifacier, J. Gasiot, and J. P. Fillard, “A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002-1004 (1976).
[CrossRef]

Gabetta, G.

M. Bellotto, A. Caridi, E. Cereda, G. Gabetta, and M. Scagliotti, “Influence of the Oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrOx films,” Appl. Phys. Lett. 63, 2056-2058 (1993).
[CrossRef]

Gasiot, J.

J. C. Manifacier, J. Gasiot, and J. P. Fillard, “A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002-1004 (1976).
[CrossRef]

González-Leal, J. M.

Grant, P. D.

He, H. B.

Huang, J. B.

S. Y. Shao, J. D. Shao, D. P. Zhang, J. B. Huang and Z. X. Fan, “Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation,” Proc. SPIE 5774, 307-311 (2004).
[CrossRef]

Hwangbo, C. K.

Ibrahim, I. A.

I. A. El-Shanshoury, V. A. Rudenko, and I. A. Ibrahim, “Polymorphic behavior of thin evaporated films of zirconium and hafnium Oxides,” J. Am. Ceram. Soc. 53, 264-268 (1970).
[CrossRef]

Jaing, C. C.

Jensen, L.

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

Jupé, M.

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

Klinger, R. E.

Kozlowski, M. R.

A. K. Burnham, M. Runkel, S. G. Demos, M. R. Kozlowski, and P. J. Wegner, “Effect of vacuum on the occurrence of UV-induced surface photoluminescence, transmission loss, and catastrophic surface damage,” Proc. SPIE 4134, 243-252(2000).
[CrossRef]

Kumari, L.

L. Kumari, G. H. Du, W. Z. Li, R. S. Vennila, S. K. Saxena, and D. Z. Wang, “Synthesis, microstructure and optical characterization of zirconium Oxide nanostructures,” Ceram. Int. 35, 2401-2408 (2009).
[CrossRef]

Lee, C. C.

Li, D. W.

X. L. Ling, Y. A. Zhao, D. W. Li, J. D. Shao, and Z. X. Fan, “Damage investigations of AR coating under atmospheric and vacuum conditions,” Opt. Laser Technol. 41, 857-861(2009).
[CrossRef]

Li, W. Z.

L. Kumari, G. H. Du, W. Z. Li, R. S. Vennila, S. K. Saxena, and D. Z. Wang, “Synthesis, microstructure and optical characterization of zirconium Oxide nanostructures,” Ceram. Int. 35, 2401-2408 (2009).
[CrossRef]

Liang, L. P.

Ling, X. L.

X. L. Ling, Y. A. Zhao, D. W. Li, J. D. Shao, and Z. X. Fan, “Damage investigations of AR coating under atmospheric and vacuum conditions,” Opt. Laser Technol. 41, 857-861(2009).
[CrossRef]

Mädebach, H.

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

Manifacier, J. C.

J. C. Manifacier, J. Gasiot, and J. P. Fillard, “A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002-1004 (1976).
[CrossRef]

Márquez, E.

Minkov, D. A.

Mirgorodskya, A. P.

A. P. Mirgorodskya, M. B. Smirnova, and P. E. Quintard, “Phonon spectra evolution and soft-mode instabilities of zirconia during the c-t-m transformation,” J. Phys. Chem. Solids 60, 985-992 (1999).
[CrossRef]

Peters, M. I.

J. A. Valdez, M. Tang, Z. H. Chi, M. I. Peters, and K. E. Sickafus, “Characterization of an ion irradiation induced phase transformation in monoclinic zirconia,” Nucl. Instrum. Methods B 218, 103-110 (2004).
[CrossRef]

Prieto-Alcón, R.

Quintard, P. E.

A. P. Mirgorodskya, M. B. Smirnova, and P. E. Quintard, “Phonon spectra evolution and soft-mode instabilities of zirconia during the c-t-m transformation,” J. Phys. Chem. Solids 60, 985-992 (1999).
[CrossRef]

Rastorguev, A. A.

A. A. Rastorguev, V. I. Belyi, T. P. Smirnova, and L. V. Yakovkina, “Luminescence of intrinsic and extrinsic defects in hafnium Oxide films,” Phys. Rev. B 76, 235315 (2007).
[CrossRef]

Riede, W.

W. Riede and P. Allenspacher, “Analysis of the air-vacuum effect in dielectric coatings,” Proc. SPIE 7132, 71320F(2008).
[CrossRef]

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

P. Allenspacher and W. Riede, “Laser qualification testing of space optics,” Proc. SPIE 6403, 64030T (2006).
[CrossRef]

P. Allenspacher and W. Riede, “Vacuum laser damage test bench,” Proc. SPIE 5991, 599128 (2005).
[CrossRef]

Ristau, D.

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

Rudenko, V. A.

I. A. El-Shanshoury, V. A. Rudenko, and I. A. Ibrahim, “Polymorphic behavior of thin evaporated films of zirconium and hafnium Oxides,” J. Am. Ceram. Soc. 53, 264-268 (1970).
[CrossRef]

Runkel, M.

A. K. Burnham, M. Runkel, S. G. Demos, M. R. Kozlowski, and P. J. Wegner, “Effect of vacuum on the occurrence of UV-induced surface photoluminescence, transmission loss, and catastrophic surface damage,” Proc. SPIE 4134, 243-252(2000).
[CrossRef]

Saxena, S. K.

L. Kumari, G. H. Du, W. Z. Li, R. S. Vennila, S. K. Saxena, and D. Z. Wang, “Synthesis, microstructure and optical characterization of zirconium Oxide nanostructures,” Ceram. Int. 35, 2401-2408 (2009).
[CrossRef]

Scagliotti, M.

M. Bellotto, A. Caridi, E. Cereda, G. Gabetta, and M. Scagliotti, “Influence of the Oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrOx films,” Appl. Phys. Lett. 63, 2056-2058 (1993).
[CrossRef]

Schroeder, H.

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

Seager, C. H.

K. Vanheusden, C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, “Correlation between photoluminescence and Oxygen vacancies in ZnO phosphors,” Appl. Phys. Lett. 68, 403-405 (1996).
[CrossRef]

Shao, J. D.

X. L. Ling, Y. A. Zhao, D. W. Li, J. D. Shao, and Z. X. Fan, “Damage investigations of AR coating under atmospheric and vacuum conditions,” Opt. Laser Technol. 41, 857-861(2009).
[CrossRef]

S. Y. Shao, J. D. Shao, H. B. He and Z. X. Fan, “Stress analysis of ZrO2/SiO2 multilayers deposited on different substrates with different thickness periods,” Opt. Lett. 30, 2119-2121(2005).
[CrossRef] [PubMed]

S. Y. Shao, J. D. Shao, D. P. Zhang, J. B. Huang and Z. X. Fan, “Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation,” Proc. SPIE 5774, 307-311 (2004).
[CrossRef]

Shao, S. Y.

S. Y. Shao, J. D. Shao, H. B. He and Z. X. Fan, “Stress analysis of ZrO2/SiO2 multilayers deposited on different substrates with different thickness periods,” Opt. Lett. 30, 2119-2121(2005).
[CrossRef] [PubMed]

S. Y. Shao, J. D. Shao, D. P. Zhang, J. B. Huang and Z. X. Fan, “Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation,” Proc. SPIE 5774, 307-311 (2004).
[CrossRef]

Sheng, Y. G.

Sickafus, K. E.

J. A. Valdez, M. Tang, Z. H. Chi, M. I. Peters, and K. E. Sickafus, “Characterization of an ion irradiation induced phase transformation in monoclinic zirconia,” Nucl. Instrum. Methods B 218, 103-110 (2004).
[CrossRef]

Simpson, R.

Smirnova, M. B.

A. P. Mirgorodskya, M. B. Smirnova, and P. E. Quintard, “Phonon spectra evolution and soft-mode instabilities of zirconia during the c-t-m transformation,” J. Phys. Chem. Solids 60, 985-992 (1999).
[CrossRef]

Smirnova, T. P.

A. A. Rastorguev, V. I. Belyi, T. P. Smirnova, and L. V. Yakovkina, “Luminescence of intrinsic and extrinsic defects in hafnium Oxide films,” Phys. Rev. B 76, 235315 (2007).
[CrossRef]

Starke, K.

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

Sun, Y. H.

Tallant, D. R.

K. Vanheusden, C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, “Correlation between photoluminescence and Oxygen vacancies in ZnO phosphors,” Appl. Phys. Lett. 68, 403-405 (1996).
[CrossRef]

Tang, M.

J. A. Valdez, M. Tang, Z. H. Chi, M. I. Peters, and K. E. Sickafus, “Characterization of an ion irradiation induced phase transformation in monoclinic zirconia,” Nucl. Instrum. Methods B 218, 103-110 (2004).
[CrossRef]

Valdez, J. A.

J. A. Valdez, M. Tang, Z. H. Chi, M. I. Peters, and K. E. Sickafus, “Characterization of an ion irradiation induced phase transformation in monoclinic zirconia,” Nucl. Instrum. Methods B 218, 103-110 (2004).
[CrossRef]

Vanheusden, K.

K. Vanheusden, C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, “Correlation between photoluminescence and Oxygen vacancies in ZnO phosphors,” Appl. Phys. Lett. 68, 403-405 (1996).
[CrossRef]

Vennila, R. S.

L. Kumari, G. H. Du, W. Z. Li, R. S. Vennila, S. K. Saxena, and D. Z. Wang, “Synthesis, microstructure and optical characterization of zirconium Oxide nanostructures,” Ceram. Int. 35, 2401-2408 (2009).
[CrossRef]

Voigt, J. A.

K. Vanheusden, C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, “Correlation between photoluminescence and Oxygen vacancies in ZnO phosphors,” Appl. Phys. Lett. 68, 403-405 (1996).
[CrossRef]

Waldorf, A. J.

Wang, D. Z.

L. Kumari, G. H. Du, W. Z. Li, R. S. Vennila, S. K. Saxena, and D. Z. Wang, “Synthesis, microstructure and optical characterization of zirconium Oxide nanostructures,” Ceram. Int. 35, 2401-2408 (2009).
[CrossRef]

Warren, W. L.

K. Vanheusden, C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, “Correlation between photoluminescence and Oxygen vacancies in ZnO phosphors,” Appl. Phys. Lett. 68, 403-405 (1996).
[CrossRef]

Wegner, P. J.

A. K. Burnham, M. Runkel, S. G. Demos, M. R. Kozlowski, and P. J. Wegner, “Effect of vacuum on the occurrence of UV-induced surface photoluminescence, transmission loss, and catastrophic surface damage,” Proc. SPIE 4134, 243-252(2000).
[CrossRef]

Woo, S. H.

Wu, D.

Xu, Y.

Yakovkina, L. V.

A. A. Rastorguev, V. I. Belyi, T. P. Smirnova, and L. V. Yakovkina, “Luminescence of intrinsic and extrinsic defects in hafnium Oxide films,” Phys. Rev. B 76, 235315 (2007).
[CrossRef]

Zhang, D. P.

S. Y. Shao, J. D. Shao, D. P. Zhang, J. B. Huang and Z. X. Fan, “Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation,” Proc. SPIE 5774, 307-311 (2004).
[CrossRef]

Zhang, L.

Zhao, Y. A.

X. L. Ling, Y. A. Zhao, D. W. Li, J. D. Shao, and Z. X. Fan, “Damage investigations of AR coating under atmospheric and vacuum conditions,” Opt. Laser Technol. 41, 857-861(2009).
[CrossRef]

Appl. Opt. (5)

Appl. Phys. Lett. (2)

M. Bellotto, A. Caridi, E. Cereda, G. Gabetta, and M. Scagliotti, “Influence of the Oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrOx films,” Appl. Phys. Lett. 63, 2056-2058 (1993).
[CrossRef]

K. Vanheusden, C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, “Correlation between photoluminescence and Oxygen vacancies in ZnO phosphors,” Appl. Phys. Lett. 68, 403-405 (1996).
[CrossRef]

Ceram. Int. (1)

L. Kumari, G. H. Du, W. Z. Li, R. S. Vennila, S. K. Saxena, and D. Z. Wang, “Synthesis, microstructure and optical characterization of zirconium Oxide nanostructures,” Ceram. Int. 35, 2401-2408 (2009).
[CrossRef]

J. Am. Ceram. Soc. (1)

I. A. El-Shanshoury, V. A. Rudenko, and I. A. Ibrahim, “Polymorphic behavior of thin evaporated films of zirconium and hafnium Oxides,” J. Am. Ceram. Soc. 53, 264-268 (1970).
[CrossRef]

J. Opt. Soc. Am. B (1)

J. Phys. Chem. Solids (1)

A. P. Mirgorodskya, M. B. Smirnova, and P. E. Quintard, “Phonon spectra evolution and soft-mode instabilities of zirconia during the c-t-m transformation,” J. Phys. Chem. Solids 60, 985-992 (1999).
[CrossRef]

J. Phys. E (1)

J. C. Manifacier, J. Gasiot, and J. P. Fillard, “A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002-1004 (1976).
[CrossRef]

Nucl. Instrum. Methods B (1)

J. A. Valdez, M. Tang, Z. H. Chi, M. I. Peters, and K. E. Sickafus, “Characterization of an ion irradiation induced phase transformation in monoclinic zirconia,” Nucl. Instrum. Methods B 218, 103-110 (2004).
[CrossRef]

Opt. Laser Technol. (1)

X. L. Ling, Y. A. Zhao, D. W. Li, J. D. Shao, and Z. X. Fan, “Damage investigations of AR coating under atmospheric and vacuum conditions,” Opt. Laser Technol. 41, 857-861(2009).
[CrossRef]

Opt. Lett. (1)

Phys. Rev. B (1)

A. A. Rastorguev, V. I. Belyi, T. P. Smirnova, and L. V. Yakovkina, “Luminescence of intrinsic and extrinsic defects in hafnium Oxide films,” Phys. Rev. B 76, 235315 (2007).
[CrossRef]

Proc. SPIE (6)

P. Allenspacher and W. Riede, “Vacuum laser damage test bench,” Proc. SPIE 5991, 599128 (2005).
[CrossRef]

P. Allenspacher and W. Riede, “Laser qualification testing of space optics,” Proc. SPIE 6403, 64030T (2006).
[CrossRef]

A. K. Burnham, M. Runkel, S. G. Demos, M. R. Kozlowski, and P. J. Wegner, “Effect of vacuum on the occurrence of UV-induced surface photoluminescence, transmission loss, and catastrophic surface damage,” Proc. SPIE 4134, 243-252(2000).
[CrossRef]

L. Jensen, M. Jupé, H. Mädebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U (2006).
[CrossRef]

W. Riede and P. Allenspacher, “Analysis of the air-vacuum effect in dielectric coatings,” Proc. SPIE 7132, 71320F(2008).
[CrossRef]

S. Y. Shao, J. D. Shao, D. P. Zhang, J. B. Huang and Z. X. Fan, “Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation,” Proc. SPIE 5774, 307-311 (2004).
[CrossRef]

Other (1)

“Determination of laser induced damage threshold of optical surfaces. Part 1: 1-on-1 test,” ISO 11254-1 (International Organization for Standardization, 2000).

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Figures (7)

Fig. 1
Fig. 1

Typical transmission spectrum of the annealed and unannealed ZrO 2 films.

Fig. 2
Fig. 2

Spectral dependence of the refractive indices of annealed and unannealed samples.

Fig. 3
Fig. 3

Damage morphologies of (a) as-deposited and (b) annealed samples at 623 K .

Fig. 4
Fig. 4

Tests of 0% damage probability of as-deposited and annealed samples at 623 K .

Fig. 5
Fig. 5

PL spectra of as-deposited and annealed samples at 473 K and 623 K .

Fig. 6
Fig. 6

XRD patterns of ZrO 2 films of as-deposited and annealed samples at 473 K and 623 K .

Fig. 7
Fig. 7

RS spectra of ZrO 2 films of as-deposited and annealed samples at 473 K and 623 K .

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