Abstract

We employed the atomic layer deposition technique to grow Al2O3 films with nominal thicknesses of 400, 300, and 200nm on silicon and soda lime glass substrates. The optical properties of the films were investigated by measuring reflection spectra in the 4001800nm wavelength range, followed by numerical fitting assuming the Sellmeier formula for the refractive index of Al2O3. The films grown on glass substrates possess higher refractive indices as compared to the films on silicon. Optical waveguiding is demonstrated, confirming the feasibility of high-index contrast planar waveguides fabricated by atomic layer deposition.

© 2009 Optical Society of America

Full Article  |  PDF Article
Related Articles
Fabrication of planar optical waveguides by K+ ion exchange in BK7 glass

J. E. Gortych and D. G. Hall
Opt. Lett. 11(2) 100-102 (1986)

Atomic layer deposition of Al2O3 and TiO2 multilayers for applications as bandpass filters and antireflection coatings

Adriana Szeghalmi, Michael Helgert, Robert Brunner, Frank Heyroth, Ulrich Gösele, and Mato Knez
Appl. Opt. 48(9) 1727-1732 (2009)

Angled sidewalls in silicon slot waveguides: conformal filling and mode properties

A. Säynätjoki, T. Alasaarela, A. Khanna, L. Karvonen, P. Stenberg, M. Kuittinen, A. Tervonen, and S. Honkanen
Opt. Express 17(23) 21066-21076 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription