Abstract

A grazing-incidence configuration to achieve high spectral resolution in the extreme ultraviolet and soft x-ray regions is presented. It adopts a grating in the off-plane mount operated at high diffracted orders. Resolutions in the 105 range can be achieved in a relatively compact size. The monochromator can be tuned in a complete octave by using different diffracted orders without changing the geometrical parameters of the configuration. The optical design of the configuration and the application to a beamline for free-electron-laser radiation centered at 120eV are discussed.

© 2009 Optical Society of America

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