Abstract

We report on the performance, structure and stability of periodic multilayer films containing silicon carbide (SiC) and aluminum (Al) layers designed for use as reflective coatings in the extreme ultraviolet (EUV). We find that SiC/Al multilayers prepared by magnetron sputtering have low stress, good temporal and thermal stability, and provide good performance in the EUV, particularly for applications requiring a narrow spectral bandpass, such as monochromatic solar imaging. Transmission electron microscopy reveals amorphous SiC layers and polycrystalline Al layers having a strong 111 texture, and relatively large roughness associated with the Al crystallites. Fits to EUV reflectance measurements also indicate large interface widths, consistent with the electron microscopy results. SiC/Al multilayers deposited by reactive sputtering with nitrogen comprise Al layers that are nearly amorphous and consid erably smoother than films deposited nonreactively, but no improvements in EUV reflectance were obtained.

© 2009 Optical Society of America

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2009 (1)

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

2008 (2)

B. Kjornrattanawanich, D. L. Windt, and J. F. Seely, “Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength,” Opt. Lett. 33, 965-967 (2008).
[CrossRef] [PubMed]

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Narrowband filters and broadband mirrors for the spectral range from 50 to 200 nm,” Proc. SPIE 7018, 70182W (2008).
[CrossRef]

2007 (1)

D. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C multilayer films,” Proc. SPIE 6688, 66880R (2007).
[CrossRef]

2005 (3)

X. Deng, C. Cleveland, T. Karcher, M. Koopman, N. Chawla, and K. K. Chawla, “Nanoindentation behavior of nanolayered metal-ceramic composites,” J. Mater. Eng. Perform. 14, 417-423 (2005).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

2004 (2)

1998 (2)

1996 (2)

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

1995 (1)

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

1994 (2)

J. M. Slaughter, B. S. Medower, R. N. Watts, C. Tarrio, T. B. Lucatorto, and C. M. Falco, “Si/B4C narrow-bandpass mirrors for the extreme ultraviolet,” Opt. Lett. 19, 1786-1788(1994).
[CrossRef] [PubMed]

D. L. Windt and W. K. Waskiewicz, “Multilayer facilities required for extreme-ultraviolet lithography,” J. Vac. Sci. Technol. B 12, 3826-3832 (1994).
[CrossRef]

André, J.-M.

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Aquila, A. L.

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Artzner, G. E.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Au, B.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Aznárez, J. A.

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Narrowband filters and broadband mirrors for the spectral range from 50 to 200 nm,” Proc. SPIE 7018, 70182W (2008).
[CrossRef]

Batson, P. J.

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

Brown, C. M.

Brunaud, J.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Catura, R. C.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Chauvineau, J. P.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Chawla, K. K.

X. Deng, C. Cleveland, T. Karcher, M. Koopman, N. Chawla, and K. K. Chawla, “Nanoindentation behavior of nanolayered metal-ceramic composites,” J. Mater. Eng. Perform. 14, 417-423 (2005).
[CrossRef]

Chawla, N.

X. Deng, C. Cleveland, T. Karcher, M. Koopman, N. Chawla, and K. K. Chawla, “Nanoindentation behavior of nanolayered metal-ceramic composites,” J. Mater. Eng. Perform. 14, 417-423 (2005).
[CrossRef]

Clette, F.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Cleveland, C.

X. Deng, C. Cleveland, T. Karcher, M. Koopman, N. Chawla, and K. K. Chawla, “Nanoindentation behavior of nanolayered metal-ceramic composites,” J. Mater. Eng. Perform. 14, 417-423 (2005).
[CrossRef]

Cugnon, P.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Defise, J. M.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Delaboudinière, J. P.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Delmotte, F.

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Deng, X.

X. Deng, C. Cleveland, T. Karcher, M. Koopman, N. Chawla, and K. K. Chawla, “Nanoindentation behavior of nanolayered metal-ceramic composites,” J. Mater. Eng. Perform. 14, 417-423 (2005).
[CrossRef]

Denham, P. E.

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

Dere, K. P.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Dollar, F. J.

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Donguy, S.

Falco, C. M.

Fedorenko, A. I.

Fedotov, V. Yu.

Fernández-Perea, M.

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Narrowband filters and broadband mirrors for the spectral range from 50 to 200 nm,” Proc. SPIE 7018, 70182W (2008).
[CrossRef]

Franck, K. D.

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

Gabriel, A. H.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Galtayries, A.

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Golub, L.

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Gullikson, E. M.

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

Unpublished results for Al/Zr multilayers by F. Salmassi and E. M. Gullikson, and by J. Kortright, as listed at http://henke.lbl.gov/cgi-bin/mldata.pl

Gurman, J. B.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Hara, H.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Hecquet, C.

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Hochdez, J. F.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Howard, R. A.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Hu, M.-H.

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Ichimaru, S.

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

Inoue, M.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Jamar, C.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Jonnard, P.

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Kano, R.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Karcher, T.

X. Deng, C. Cleveland, T. Karcher, M. Koopman, N. Chawla, and K. K. Chawla, “Nanoindentation behavior of nanolayered metal-ceramic composites,” J. Mater. Eng. Perform. 14, 417-423 (2005).
[CrossRef]

Kjornrattanawanich, B.

Koike, M.

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

Kondratenko, V. V.

Koopman, M.

X. Deng, C. Cleveland, T. Karcher, M. Koopman, N. Chawla, and K. K. Chawla, “Nanoindentation behavior of nanolayered metal-ceramic composites,” J. Mater. Eng. Perform. 14, 417-423 (2005).
[CrossRef]

Kortright, J.

Unpublished results for Al/Zr multilayers by F. Salmassi and E. M. Gullikson, and by J. Kortright, as listed at http://henke.lbl.gov/cgi-bin/mldata.pl

Kosugi, T.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Kreplin, R.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Larruquert, J. I.

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Narrowband filters and broadband mirrors for the spectral range from 50 to 200 nm,” Proc. SPIE 7018, 70182W (2008).
[CrossRef]

Le Guen, K.

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Lemen, J. R.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Levashov, V. E.

Lucatorto, T. B.

Marioge, J. P.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Maucherat, A.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Medower, B. S.

Meltchakov, E.

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Méndez, J. A.

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Narrowband filters and broadband mirrors for the spectral range from 50 to 200 nm,” Proc. SPIE 7018, 70182W (2008).
[CrossRef]

Michels, D. J.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Millier, F.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Miura, K.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Moses, J. D.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Murachi, T.

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

Murakami, K.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Nagata, S.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Neupert, W. M.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Pershin, Yu. P.

Robinson, J. C.

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Rochus, P.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Sakao, T.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Salmassi, F.

Unpublished results for Al/Zr multilayers by F. Salmassi and E. M. Gullikson, and by J. Kortright, as listed at http://henke.lbl.gov/cgi-bin/mldata.pl

Seely, J. F.

Shimizu, T.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Shing, L.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Slaughter, J. M.

Song, X. Y.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Soufli, R.

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Spiller, E.

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Steele, W. F.

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

Stern, R. A.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Stoney, G. G.

G. G. Stoney, “The tension of metallic films deposited by electrolysis,” Proc. R. Soc. London A82, 172-175 (1909).

Tackaberry, R. E.

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

Taguchi, K.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Takenaka, H.

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

Tanimoto, K.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Tarrio, C.

Tsuneta, S.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Underwood, J. H.

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
[CrossRef]

Uspenskii, Yu. A.

Van Dessel, E. L.

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
[CrossRef]

Vidal-Dasilva, M.

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Narrowband filters and broadband mirrors for the spectral range from 50 to 200 nm,” Proc. SPIE 7018, 70182W (2008).
[CrossRef]

Vinogradov, A. V.

Wasa, W.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Waskiewicz, W. K.

D. L. Windt and W. K. Waskiewicz, “Multilayer facilities required for extreme-ultraviolet lithography,” J. Vac. Sci. Technol. B 12, 3826-3832 (1994).
[CrossRef]

Watts, R. N.

Windt, D.

D. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C multilayer films,” Proc. SPIE 6688, 66880R (2007).
[CrossRef]

Windt, D. L.

B. Kjornrattanawanich, D. L. Windt, and J. F. Seely, “Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength,” Opt. Lett. 33, 965-967 (2008).
[CrossRef] [PubMed]

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

D. L. Windt, S. Donguy, J. F. Seely, B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt. 43, 1835-1848 (2004).
[CrossRef] [PubMed]

J. F. Seely, C. M. Brown, D. L. Windt, S. Donguy, and B. Kjornrattanawanich, “Normal-incidence efficiencies of multilayer-coated laminar gratings for the extreme-ultraviolet imaging spectrometer on the Solar-B mission,” Appl. Opt. 43, 1463-1471 (2004).
[CrossRef] [PubMed]

D. L. Windt, “IMD--Software for modeling the optical properties of multilayer films,” Comput. Phys. 12, 360-370(1998).
[CrossRef]

D. L. Windt and W. K. Waskiewicz, “Multilayer facilities required for extreme-ultraviolet lithography,” J. Vac. Sci. Technol. B 12, 3826-3832 (1994).
[CrossRef]

D. L. Windt, unpublished.

Yoshida, T.

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

Yoshikawa, I.

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

Zubarev, E. N.

Appl. Opt. (2)

Comput. Phys. (1)

D. L. Windt, “IMD--Software for modeling the optical properties of multilayer films,” Comput. Phys. 12, 360-370(1998).
[CrossRef]

J. Mater. Eng. Perform. (1)

X. Deng, C. Cleveland, T. Karcher, M. Koopman, N. Chawla, and K. K. Chawla, “Nanoindentation behavior of nanolayered metal-ceramic composites,” J. Mater. Eng. Perform. 14, 417-423 (2005).
[CrossRef]

J. Vac. Sci. Technol. B (1)

D. L. Windt and W. K. Waskiewicz, “Multilayer facilities required for extreme-ultraviolet lithography,” J. Vac. Sci. Technol. B 12, 3826-3832 (1994).
[CrossRef]

Opt. Lett. (3)

Proc. SPIE (4)

R. Soufli, D. L. Windt, J. C. Robinson, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M (2005).
[CrossRef]

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Narrowband filters and broadband mirrors for the spectral range from 50 to 200 nm,” Proc. SPIE 7018, 70182W (2008).
[CrossRef]

T. Sakao, S. Tsuneta, H. Hara, R. Kano, T. Yoshida, S. Nagata, T. Shimizu, T. Kosugi, K. Murakami, W. Wasa, M. Inoue, K. Miura, K. Taguchi, and K. Tanimoto, “Japanese sounding rocket experiment with the solar XUV Doppler telescope,” Proc. SPIE 2804, 153-164 (1996).
[CrossRef]

D. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C multilayer films,” Proc. SPIE 6688, 66880R (2007).
[CrossRef]

Proc. SPIE. (1)

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE. 7360, 73600O (2009).
[CrossRef]

Rev. Sci. Instrum. (2)

J. H. Underwood, E. M. Gullikson, M. Koike, P. J. Batson, P. E. Denham, K. D. Franck, R. E. Tackaberry, and W. F. Steele, “Calibration and standards beamline 6.3.2 at the Advanced Light Source,” Rev. Sci. Instrum. 67, 3372 (1996).
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Sol. Phys. (1)

J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291-312 (1995).
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Other (4)

Unpublished results for Al/Zr multilayers by F. Salmassi and E. M. Gullikson, and by J. Kortright, as listed at http://henke.lbl.gov/cgi-bin/mldata.pl

D. L. Windt, unpublished.

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Figures (13)

Fig. 1
Fig. 1

Calculated reflectance of SiC/Al and Si/Mo multilayers optimized for narrow spectral response at (a) the Fe XV ( λ = 28.4 nm ), He II ( λ = 30.4 nm ), and Fe XVI ( λ = 33.5 nm ) solar emission lines; and (b) the Fe XII ( λ = 19.5 nm ) and Fe XIV ( λ = 21.1 nm ) lines. SiC/Al provides significantly greater spectral resolution. The interface widths used for these calculations are based on experimental results obtained from multilayers similar to those calculated here.

Fig. 2
Fig. 2

Experimental reflectance versus wavelength for SiC/Al multilayers measured as a function of the SiC fractional layer thickness, Γ SiC .

Fig. 3
Fig. 3

(a) Experimental peak reflectance, (b) spectral bandpass, and (c) film stress as functions of SiC fractional layer thickness, Γ SiC , for the SiC/Al multilayers shown in Fig. 2.

Fig. 4
Fig. 4

Film stress measured as a function of temperature for SiC/Al multilayers having d = 15.3 nm , N = 40 , and Γ = 0.33 .

Fig. 5
Fig. 5

Reflectance versus wavelength obtained on the annealed samples shown in Fig. 4.

Fig. 6
Fig. 6

HRTEM images of the as-deposited (left) and 300 C (right) annealed sample shown in Figs. 4, 5.

Fig. 7
Fig. 7

Reflectance versus wavelength of optimized Si/Mo and SiC/Al multilayers measured using synchrotron radiation at the ALS. The dotted curves are fits to the measurements (filled circles.) Also shown is the calculated response of an optimized SiC/Si multilayer, which provides spectral resolution similar to SiC/Al, but with lower reflection efficiency.

Fig. 8
Fig. 8

Peak reflectance measured as a function of time for two SiC/Al multilayers, one peaking near λ = 19 nm and the other near λ = 21 nm , as described in the text. The inset shows the behavior in detail of the film that peaks near λ = 21 nm over the first 60 days of exposure to air.

Fig. 9
Fig. 9

Reflectance versus wavelength measurements (solid curves) obtained on nine different SiC/Al multilayers having the periods and number of bilayers indicated. All films have Γ = 0.33 . The calculated reflectance curves are shown as dotted curves.

Fig. 10
Fig. 10

(a) Peak reflectance, (b) spectral bandpass, and (c) interface widths derived from the reflectance measurements for the SiC/Al multilayers shown in Fig. 9.

Fig. 11
Fig. 11

Reflectance versus wavelength measurements for SiC/Al multilayers deposited using reactive sputtering with nitrogen, having d 10 nm , N = 80 , and Γ = 0.33 , as a function of the N 2 gas fraction, f N , as described in the text.

Fig. 12
Fig. 12

Peak reflectance as a function of N 2 gas fraction, f N , determined from the measurements shown in Fig. 11.

Fig. 13
Fig. 13

HRTEM and SAED images for SiC/Al multilayers deposited nonreactively using Ar (left) and reactively using an Ar N 2 mixture having f N = 9 % .

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