Abstract

Figuring technology of nonaxisymmetric errors using a spiral path is presented. Based on an approximation of a removal function, a finite-field nonlinear model is deduced from the computer-controlled optics shaping principle. We then present a modified Richardson–Lucy iterative algorithm to deconvolute the dwell time. With a velocity realization method for dwell time on a spiral path, the figuring technology comes into being. Simulations are made to validate these algorithms. Theoretical and simulation studies demonstrate that the figuring technology is a novel method for inexpensive fabrication of precision mirrors.

© 2009 Optical Society of America

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