Abstract

A thermo-optic two-mode interference (TMI) waveguide structure with a silicon trench and heat- insulating grooves in both sides of the core has been proposed for a variable optical attenuator (VOA) with fast response time. Thermal analysis of the proposed thermo-optic TMI waveguide structure with a silicon oxinitride (SiON) core has been performed by using the implicit finite difference method. The heating power required to achieve the attenuated power of 25.5dB for a VOA with a silicon trench is 460 mW , which is approximately 1.8 times less than that of a VOA without a silicon trench. The response time is estimated as 98μs, which is faster than the response time of the existing VOA.

© 2009 Optical Society of America

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