Measuring deformation of vibrating specimens whose dimensions are in the submillimeter range introduces a number of difficulties using laser interferometry. Normal interferometry is not suitable because of a phase ambiguity problem. In addition, the noise effect is much more serious in the measurement of small objects because a high-magnification lens is used. We present a method for full-field measurement of displacement, velocity, and acceleration of a vibrating miniature object based on image-plane digital holographic microscopy. A miniature cantilever beam is excited by a piezoelectric transducer stage with a sinusoidal configuration. A sequence of digital holograms is captured using a high-speed digital holographic microscope. Windowed Fourier analysis is applied in the spatial and spatiotemporal domains to extract the displacement, velocity and acceleration. The result shows that a combination of image-plane digital holographic microscopy and windowed Fourier analyses can be used to study vibration without encountering a phase ambiguity problem, and one can obtain instantaneous kinematic parameters on each point.
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