H. Stoyanov, “Nanoscale linear measurements based on the attenuated total internal reflection: an interferometric approach,” Proc. SPIE 6604, 66040R (2007).

[CrossRef]

H. Chen, T. Liu, and Z. Meng, “Nanometrology based on white-light spectral interferometry in thickness measurement,” Proc. SPIE 6831, 683108 (2007).

M. M. Brundavanam, N. K. Viswanathan, and D. N. Rao, “Spectral anomalies due to temporal correlation in a white light interferometer,” Opt. Lett. 32, 2279-2281 (2007).

[CrossRef]

J. Lawall, “Interferometry for accurate displacement metrology,” Opt. Photon. News 15(10), 40-46 (2004).

[CrossRef]

S. Costantino, O. E. Martinez, and J. R. Torga, “Wide band interferometry for thickness measurement,” Opt. Express. 11, 952-957 (2003).

P. Hlubina, “Dispersive white-light spectral interferometry to measure distances and displacements,” Opt. Commun. 212, 65-70 (2002).

[CrossRef]

P. Sandoz, G. Tribillon, and H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferogram,” J. Mod. Opt. 43, 701-708 (1996).

K. Nakayama, M. Tanaka, F. Shiota, and K. Kuroda, “Precision physical measurements and nanometrology,” Metrologia 28, 483-502 (1991).

[CrossRef]

H. Chen, T. Liu, and Z. Meng, “Nanometrology based on white-light spectral interferometry in thickness measurement,” Proc. SPIE 6831, 683108 (2007).

S. Costantino, O. E. Martinez, and J. R. Torga, “Wide band interferometry for thickness measurement,” Opt. Express. 11, 952-957 (2003).

U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643-651 (1995).

[CrossRef]

P. Hariharan, *Optical Interferometry*, 2nd ed. (Academic, 2003).

P. Hlubina, “Dispersive white-light spectral interferometry to measure distances and displacements,” Opt. Commun. 212, 65-70 (2002).

[CrossRef]

P. Hlubina, “Experimental demonstration of the spectral interference between two beams of a low-coherence source at the output of a Michelson interferometer,” J. Mod. Opt. 44, 1049-1059 (1997).

[CrossRef]

K. Nakayama, M. Tanaka, F. Shiota, and K. Kuroda, “Precision physical measurements and nanometrology,” Metrologia 28, 483-502 (1991).

[CrossRef]

J. Lawall, “Interferometry for accurate displacement metrology,” Opt. Photon. News 15(10), 40-46 (2004).

[CrossRef]

H. Chen, T. Liu, and Z. Meng, “Nanometrology based on white-light spectral interferometry in thickness measurement,” Proc. SPIE 6831, 683108 (2007).

S. Costantino, O. E. Martinez, and J. R. Torga, “Wide band interferometry for thickness measurement,” Opt. Express. 11, 952-957 (2003).

H. Chen, T. Liu, and Z. Meng, “Nanometrology based on white-light spectral interferometry in thickness measurement,” Proc. SPIE 6831, 683108 (2007).

K. Nakayama, M. Tanaka, F. Shiota, and K. Kuroda, “Precision physical measurements and nanometrology,” Metrologia 28, 483-502 (1991).

[CrossRef]

P. Sandoz, G. Tribillon, and H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferogram,” J. Mod. Opt. 43, 701-708 (1996).

P. Sandoz, G. Tribillon, and H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferogram,” J. Mod. Opt. 43, 701-708 (1996).

U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643-651 (1995).

[CrossRef]

K. Nakayama, M. Tanaka, F. Shiota, and K. Kuroda, “Precision physical measurements and nanometrology,” Metrologia 28, 483-502 (1991).

[CrossRef]

H. Stoyanov, “Nanoscale linear measurements based on the attenuated total internal reflection: an interferometric approach,” Proc. SPIE 6604, 66040R (2007).

[CrossRef]

K. Nakayama, M. Tanaka, F. Shiota, and K. Kuroda, “Precision physical measurements and nanometrology,” Metrologia 28, 483-502 (1991).

[CrossRef]

H. J. Tiziani, “Optical methods for precision measurements,” Opt. Quantum Electron. 21, 253-282 (1989).

[CrossRef]

S. Costantino, O. E. Martinez, and J. R. Torga, “Wide band interferometry for thickness measurement,” Opt. Express. 11, 952-957 (2003).

P. Sandoz, G. Tribillon, and H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferogram,” J. Mod. Opt. 43, 701-708 (1996).

U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643-651 (1995).

[CrossRef]

P. Hlubina, “Experimental demonstration of the spectral interference between two beams of a low-coherence source at the output of a Michelson interferometer,” J. Mod. Opt. 44, 1049-1059 (1997).

[CrossRef]

P. Sandoz, G. Tribillon, and H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferogram,” J. Mod. Opt. 43, 701-708 (1996).

K. Nakayama, M. Tanaka, F. Shiota, and K. Kuroda, “Precision physical measurements and nanometrology,” Metrologia 28, 483-502 (1991).

[CrossRef]

P. Hlubina, “Dispersive white-light spectral interferometry to measure distances and displacements,” Opt. Commun. 212, 65-70 (2002).

[CrossRef]

S. Costantino, O. E. Martinez, and J. R. Torga, “Wide band interferometry for thickness measurement,” Opt. Express. 11, 952-957 (2003).

M. M. Brundavanam, N. K. Viswanathan, and D. N. Rao, “Spectral anomalies due to temporal correlation in a white light interferometer,” Opt. Lett. 32, 2279-2281 (2007).

[CrossRef]

M. A. Choma, A. K. Ellerbee, C. Yang, T. L. Creazzo, and J. A. Izatt, “Spectral-domain phase microscopy,” Opt. Lett. 30, 1162-1164 (2005).

[CrossRef]

J. Lawall, “Interferometry for accurate displacement metrology,” Opt. Photon. News 15(10), 40-46 (2004).

[CrossRef]

H. J. Tiziani, “Optical methods for precision measurements,” Opt. Quantum Electron. 21, 253-282 (1989).

[CrossRef]

H. Stoyanov, “Nanoscale linear measurements based on the attenuated total internal reflection: an interferometric approach,” Proc. SPIE 6604, 66040R (2007).

[CrossRef]

H. Chen, T. Liu, and Z. Meng, “Nanometrology based on white-light spectral interferometry in thickness measurement,” Proc. SPIE 6831, 683108 (2007).

U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643-651 (1995).

[CrossRef]

P. Hariharan, *Optical Interferometry*, 2nd ed. (Academic, 2003).

V. N. Kumar, “Spectral interferometry: a study of the degree of coherence in the space-frequency domain and the applications,” Ph.D. thesis (University of Hyderabad, 1997).