Abstract

Absolute testing of spherical surfaces is a technological necessity because of increased accuracy requirements. In a Fizeau setup, the main part of the interferometer deviations thereby comes from the reference surface. We demonstrate the validity of an absolute testing procedure for the reference surface that has been proposed earlier. The procedure relies on the decomposition of the surface deviations into odd and even parts and could be used in partially coherent illumination. The odd deviations are obtained from a basic and a 180°-rotated position of an auxiliary sphere, and the even deviations can be measured with the help of a cat’s eye position in double pass using an opaque half screen in the interferometer aperture.

© 2008 Optical Society of America

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