Abstract

A straightforward approach for estimation of thickness (d), real (ε1) and imaginary parts (ε2) of the complex permittivity of very thin films from spectrophotometric measurements is presented. The uncertainties in ε1, ε2, and d due to methodical error and the uncertainties in the measured quantities are investigated. It is shown that the influence of these factors is considerable when ε1, ε2, and d are obtained simultaneously for each wavelength. The accuracy of ε1, ε2, and d is significantly increased if the value of d is evaluated first, its value is kept constant over the whole spectral region, and then ε1 and ε2 are calculated for each wave length.

© 2008 Optical Society of America

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