In situ monitoring of surface postprocessing in large-aperture fused silica optics with optical coherence tomography

Abstract

Optical coherence tomography (OCT) is explored as a method to image laser-damage sites located on the surface of large aperture fused silica optics during postprocessing via ${\mathrm{CO}}_2$ laser ablation. The signal analysis for image acquisition was adapted to meet the sensitivity requirements for this application. A long-working-distance geometry was employed to allow imaging through the opposite surface of the $5\mathrm{cm}$ thick optic. The experimental results demonstrate the potential of OCT for remote monitoring of transparent material processing applications.

© 2008 Optical Society of America

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