Abstract

We developed a high accuracy thickness measurement system for glass substrates based on the optical design of the astigmatic method. The astigmatic optical system includes a laser diode, a cylindrical lens, a convex lens, and a quadrant detector. This method measures the astigmatic focusing error signal induced from the measured glass placed in the astigmatic optical system. The astigmatic focusing error signal is converted into the thickness of the glass substrate. The proposed glass thickness measurement system is verified by using a coordinate measuring machine (CMM). The accuracy of the proposed system is 0.2μm, with a standard deviation of 0.7μm within the thickness measuring range of 1.2mm.

© 2008 Optical Society of America

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References

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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]

2006 (1)

2005 (1)

D. M. Faichnie, A. H. Greenaway, K. Karstad, I. Bain, “Thin film metrology using modal wavefront sensing,” J. Opt. A Pure Appl. Opt. 7, S290-S297 (2005).
[CrossRef]

2004 (1)

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

2003 (1)

2001 (1)

1988 (1)

1980 (1)

H. Yamauchi and M. Nakayama, “An automatic measurement of glass thickness,” J. Non-Crystal. Sol. 38, 955-960(1980).
[CrossRef]

1976 (1)

Bain, I.

D. M. Faichnie, A. H. Greenaway, K. Karstad, I. Bain, “Thin film metrology using modal wavefront sensing,” J. Opt. A Pure Appl. Opt. 7, S290-S297 (2005).
[CrossRef]

Bodlaj, V.

Campbell, H. I.

Cees, J.

Coppola, G.

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

De Natale, P.

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

De Nicola, S.

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

Faichnie, D. M.

D. M. Faichnie, A. H. Greenaway, K. Karstad, I. Bain, “Thin film metrology using modal wavefront sensing,” J. Opt. A Pure Appl. Opt. 7, S290-S297 (2005).
[CrossRef]

Ferraro, P.

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

Frankena, H. J.

Gioffre, M.

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

Greenaway, A. H.

C. E. Towers, D. P. Towers, H. I. Campbell, S. Zhang and A. H. Greenaway, “Three-dimensional particle imaging by wavefront sensing,” Opt. Lett. 31, 1220-1222 (2006).
[CrossRef] [PubMed]

D. M. Faichnie, A. H. Greenaway, K. Karstad, I. Bain, “Thin film metrology using modal wavefront sensing,” J. Opt. A Pure Appl. Opt. 7, S290-S297 (2005).
[CrossRef]

Iodice, M.

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

Jorge, R.

Karstad, K.

D. M. Faichnie, A. H. Greenaway, K. Karstad, I. Bain, “Thin film metrology using modal wavefront sensing,” J. Opt. A Pure Appl. Opt. 7, S290-S297 (2005).
[CrossRef]

Klement, E.

Maddaloni, P.

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

Nakayama, M.

H. Yamauchi and M. Nakayama, “An automatic measurement of glass thickness,” J. Non-Crystal. Sol. 38, 955-960(1980).
[CrossRef]

Nen, J.

Oscar, E.

Peiponen, K. E.

Towers, C. E.

Towers, D. P.

Yamauchi, H.

H. Yamauchi and M. Nakayama, “An automatic measurement of glass thickness,” J. Non-Crystal. Sol. 38, 955-960(1980).
[CrossRef]

Zhang, S.

Appl. Opt. (3)

IEEE Photonics Technol. Lett. (1)

P. Maddaloni, G. Coppola, P. De Natale, S. De Nicola, P. Ferraro, M. Gioffre, and M. Iodice, “Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer,” IEEE Photonics Technol. Lett. 16, 1349-1351(2004).
[CrossRef]

J. Non-Crystal. Sol. (1)

H. Yamauchi and M. Nakayama, “An automatic measurement of glass thickness,” J. Non-Crystal. Sol. 38, 955-960(1980).
[CrossRef]

J. Opt. A Pure Appl. Opt. (1)

D. M. Faichnie, A. H. Greenaway, K. Karstad, I. Bain, “Thin film metrology using modal wavefront sensing,” J. Opt. A Pure Appl. Opt. 7, S290-S297 (2005).
[CrossRef]

Opt. Express (1)

Opt. Lett. (1)

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Figures (8)

Fig. 1
Fig. 1

Sketch of the astigmatic method for the thickness measurement of glass.

Fig. 2
Fig. 2

Sketch of the astigmatic method.

Fig. 3
Fig. 3

Sketch of the optical path.

Fig. 4
Fig. 4

Variation of the optical path and the spot position on a quadrant detector induced by the tilt influence of the glass.

Fig. 5
Fig. 5

Calibration test for the S-Curve.

Fig. 6
Fig. 6

The fitting curve for the S-Curve within the measuring range of ± 0.4 mm .

Fig. 7
Fig. 7

Standard deviation for the S-Curve within the measuring range of ± 0.4 mm .

Fig. 8
Fig. 8

Experimental results of the nine points used in CMM.

Tables (2)

Tables Icon

Table 1 Specification of the Optical Parameters Used in the Calculations

Tables Icon

Table 2 Results of the Experiments

Equations (8)

Equations on this page are rendered with MathJax. Learn more.

FES = ( V A + V C ) ( V B + V D ) V A + V B + V C + V D ,
x = ( V D V B ) V D + V B ,
y = ( V A V C ) V A + V D .
f f = FES ,
= T · tan θ 1 T · tan θ 2 ,
FES = r + D tan θ 1 f ,
T = FES 1 tan θ 2 / tan θ 1 ,
n 1 sin θ 1 = n 2 sin θ 2 ,

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