Abstract

The applicability of a general transfer-matrix method for optical analysis of multilayersreported earlier [Katsidis and Siapkas, Appl. Opt. 41, 3978 (2002)] is being extended so as to simulate asymmetric implantation doping profiles using distributions with four moments. The sensitivity of infrared reflectance spectra regarding the variation of the first four moments of a Pearson free carrier distribution is demonstrated. Experimental data of 1.5  MeV as well as 2.5  MeV As implantation into p-Si followed by annealing at 1100°C are presented, suggesting the need to use two joined Pearson IV distribution segments in the simulation of annealed profiles. A twin peak observed in the 1.5  MeV case is confirmed by Rutherford backscattering analysis.

© 2008 Optical Society of America

Full Article  |  PDF Article
Related Articles
Photoresponse of ion-damaged germanium

Stephen D. Russell
Appl. Opt. 30(21) 2920-2921 (1991)

Planar and ridge waveguides formed in LiNbO3 by proton exchange combined with oxygen ion implantation

Shao-Mei Zhang, Ke-Ming Wang, Xiangzhi Liu, Zhuanfang Bi, and Xiu-Hong Liu
Opt. Express 18(15) 15609-15617 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (20)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription