Abstract

This paper theoretically and experimentally investigates the reflective performance of Ir films in the vacuum ultraviolet wavelength region. Ir reflecting layers of different thicknesses on various substrates are calculated and fabricated by the ion-beam-sputtering technique. Their reflectance in the 115nm to 140nm wavelength region was measured continuously by a reflectometer located at the National Synchrotron Radiation Laboratory. The testing results show that the reflectance of Si substrates is quite sensitive to the deposited Ir layer thickness, while the reflectance on a quartz or a BK7 glass substrates is higher. The energy of the sputtering ion beam exerts a significant influence on the reflectance of the layer, and the postannealing can cause a substantial decrease in the reflectance. For normal incidence, the reflectance of an Ir film on BK7 glass can reach as high as 30%.

© 2008 Optical Society of America

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2008 (1)

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

2007 (2)

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “The influence of binding layer on the reflective performance of Au film in VUV wavelength region,” Appl. Opt. 46, 8641-8644 (2007).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

2006 (1)

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, “Review on highly reflecting mirrors for vacuum ultraviolet and X-ray,” J. Vac. Sci. Technol. 26, 459-468 (2006) (in Chinese).

2000 (1)

1999 (2)

1988 (3)

1985 (1)

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

1982 (1)

W. R. Hunter, “Measurement of optical properties of materials in the vacuum ultraviolet spectral region,” Appl. Opt. 21, (12) 2103-2114 (1982).

1973 (1)

1968 (1)

1967 (1)

Arendt, P.

Born, M.

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge U. Press, 1999), pp. 735, 790.

Cash, W. C.

Cox, J. T.

Fisher, R. F.

Fu, S. J.

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “The influence of binding layer on the reflective performance of Au film in VUV wavelength region,” Appl. Opt. 46, 8641-8644 (2007).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, “Review on highly reflecting mirrors for vacuum ultraviolet and X-ray,” J. Vac. Sci. Technol. 26, 459-468 (2006) (in Chinese).

Gan, S. Y.

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “The influence of binding layer on the reflective performance of Au film in VUV wavelength region,” Appl. Opt. 46, 8641-8644 (2007).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, “Review on highly reflecting mirrors for vacuum ultraviolet and X-ray,” J. Vac. Sci. Technol. 26, 459-468 (2006) (in Chinese).

Gum, J. S.

Hass, G.

Herzig, H.

Hong, Y. L.

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “The influence of binding layer on the reflective performance of Au film in VUV wavelength region,” Appl. Opt. 46, 8641-8644 (2007).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, “Review on highly reflecting mirrors for vacuum ultraviolet and X-ray,” J. Vac. Sci. Technol. 26, 459-468 (2006) (in Chinese).

Hunter, W. R.

Huo, T. L.

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “The influence of binding layer on the reflective performance of Au film in VUV wavelength region,” Appl. Opt. 46, 8641-8644 (2007).

Jacobus, G. F.

Jr.,

Juenker, D. W.

Keski-Kuha, R. A. M.

Larruquert, J. I.

Leblanc, L. J.

Liu, Y.

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “The influence of binding layer on the reflective performance of Au film in VUV wavelength region,” Appl. Opt. 46, 8641-8644 (2007).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, “Review on highly reflecting mirrors for vacuum ultraviolet and X-ray,” J. Vac. Sci. Technol. 26, 459-468 (2006) (in Chinese).

Martin, C. R.

Newnam, B.

Osantowski, J. F.

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

Pinneo, J. M.

Ramsey, J. B.

Scott, S. M.

Swartzlander, A. B.

Takacs, P. Z.

Windt, D. L.

Wolf, E.

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge U. Press, 1999), pp. 735, 790.

Xu, X. D.

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “The influence of binding layer on the reflective performance of Au film in VUV wavelength region,” Appl. Opt. 46, 8641-8644 (2007).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, “Review on highly reflecting mirrors for vacuum ultraviolet and X-ray,” J. Vac. Sci. Technol. 26, 459-468 (2006) (in Chinese).

Zhou, H. J.

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “The influence of binding layer on the reflective performance of Au film in VUV wavelength region,” Appl. Opt. 46, 8641-8644 (2007).

Acta Opt. Sin. (1)

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Study of reflectance of Au films in the vacuum ultraviolet,” Acta Opt. Sin. 27, 1529-1534 (2007) (in Chinese).

Appl. Opt. (6)

J. Opt. Soc. Am. (3)

J. Vac. Sci. Technol. (2)

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, “Review on highly reflecting mirrors for vacuum ultraviolet and X-ray,” J. Vac. Sci. Technol. 26, 459-468 (2006) (in Chinese).

S. Y. Gan, Y. L. Hong, X. D. Xu, Y. Liu, H. J. Zhou, T. L. Huo, and S. J. Fu, “Vacuum ultraviolet reflection of gold-coated silicon mirror,” J. Vac. Sci. Technol. 28, 51-54 (2008) (in Chinese).

Other (3)

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge U. Press, 1999), pp. 735, 790.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

W. R. Hunter, “Measurement of optical properties of materials in the vacuum ultraviolet spectral region,” Appl. Opt. 21, (12) 2103-2114 (1982).

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Figures (8)

Fig. 1
Fig. 1

Calculation model for single-layer metal film.

Fig. 2
Fig. 2

Optimizing layer thickness on BK7 glass substrate ( incident angle   = 0 ° ).

Fig. 3
Fig. 3

Optimizing layer thickness for Si wafer substrate ( incident angle   = 0 ° ).

Fig. 4
Fig. 4

Schematic of the dual-ion-beam source coating machine.

Fig. 5
Fig. 5

Reflectance of an Ir film on a Si substrate changing with the thickness of the layer ( incident angle   = 3 ° ).

Fig. 6
Fig. 6

Reflectance measurement of an Ir layer deposited on a BK7 substrate with a thickness of 18 nm .

Fig. 7
Fig. 7

Influence of sputtering power on mirror’s reflectance ( incident angle   = 3 ° ).

Fig. 8
Fig. 8

Impact of postannealing of an Ir layer on its VUV reflectance.

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