Abstract

Atomic layer deposition (ALD) at this time is much slower than conventional optical thin-film deposition techniques. A more rapid ALD process for SiO2 has been developed than for other ALD materials. A fence post design for optical thin films has thin layers of high-index posts standing above a broad low-index ground. If a design for ALD can be predominantly composed of SiO2 layers with thin high-index layers, the deposition times can be correspondingly shortened, and it is shown that the required performance can still be nearly that of more conventional designs with high- and low-index layers of equal thickness. This combination makes the ALD benefits of conformal coating and precise thickness control more practical for optical thin-film applications.

© 2008 Optical Society of America

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References

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    [CrossRef] [PubMed]
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2007 (2)

R. R. Willey, "Design of optical thin films using the Fencepost Method," Proc. Soc. Vac. Coaters 50, 365-368 (2007).

R. R. Willey, "Design of blocking filters of any narrow bandwidth," Appl. Opt. 46, 1201-1204 (2007).
[CrossRef] [PubMed]

2006 (1)

2003 (1)

2002 (2)

D. Hausmann, J. Becker, S. Wang, and R. G. Gordon, "Rapid vapor deposition of highly conformal silica nanolaminates," Science 298, 402-406 (2002).
[CrossRef] [PubMed]

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Antireflection coating design for plastic optics," Appl. Opt. 41, 3107-3110 (2002).
[CrossRef] [PubMed]

2000 (1)

L. Martinu and D. Poitras, "Plasma deposition of optical films and coatings: a review," J. Vac. Sci. Technol. A 18, 2619-2645 (2000).
[CrossRef]

Becker, J.

D. Hausmann, J. Becker, S. Wang, and R. G. Gordon, "Rapid vapor deposition of highly conformal silica nanolaminates," Science 298, 402-406 (2002).
[CrossRef] [PubMed]

Chen, L.

Deng, X.

Gordon, R. G.

D. Hausmann, J. Becker, S. Wang, and R. G. Gordon, "Rapid vapor deposition of highly conformal silica nanolaminates," Science 298, 402-406 (2002).
[CrossRef] [PubMed]

Hausmann, D.

D. Hausmann, J. Becker, S. Wang, and R. G. Gordon, "Rapid vapor deposition of highly conformal silica nanolaminates," Science 298, 402-406 (2002).
[CrossRef] [PubMed]

Kaiser, N.

Liu, F.

Liu, X.

Martinu, L.

L. Martinu and D. Poitras, "Plasma deposition of optical films and coatings: a review," J. Vac. Sci. Technol. A 18, 2619-2645 (2000).
[CrossRef]

Nikolov, A.

Poitras, D.

L. Martinu and D. Poitras, "Plasma deposition of optical films and coatings: a review," J. Vac. Sci. Technol. A 18, 2619-2645 (2000).
[CrossRef]

Schallenberg, U. B.

Schulz, U.

Sciortino, P.

Wang, J. J.

Wang, S.

D. Hausmann, J. Becker, S. Wang, and R. G. Gordon, "Rapid vapor deposition of highly conformal silica nanolaminates," Science 298, 402-406 (2002).
[CrossRef] [PubMed]

Willey, R. R.

R. R. Willey, "Design of optical thin films using the Fencepost Method," Proc. Soc. Vac. Coaters 50, 365-368 (2007).

R. R. Willey, "Design of blocking filters of any narrow bandwidth," Appl. Opt. 46, 1201-1204 (2007).
[CrossRef] [PubMed]

Appl. Opt. (3)

J. Vac. Sci. Technol. A (1)

L. Martinu and D. Poitras, "Plasma deposition of optical films and coatings: a review," J. Vac. Sci. Technol. A 18, 2619-2645 (2000).
[CrossRef]

Opt. Lett. (1)

Proc. Soc. Vac. Coaters (1)

R. R. Willey, "Design of optical thin films using the Fencepost Method," Proc. Soc. Vac. Coaters 50, 365-368 (2007).

Science (1)

D. Hausmann, J. Becker, S. Wang, and R. G. Gordon, "Rapid vapor deposition of highly conformal silica nanolaminates," Science 298, 402-406 (2002).
[CrossRef] [PubMed]

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Figures (11)

Fig. 1
Fig. 1

This thin-film design appears to be fence posts of high-index layers above a low-index ground.

Fig. 2
Fig. 2

Twelve (12) layer AR coating in which the high-index layers are all of the same thickness.

Fig. 3
Fig. 3

Index profile of the 12 layer AR coating from substrate to air.

Fig. 4
Fig. 4

Eight layer AR coating in which the high-index layers were allowed to vary for optimum results.

Fig. 5
Fig. 5

Index profile of the eight layer AR coating from substrate to air.

Fig. 6
Fig. 6

Simple edge filter of the FP design.

Fig. 7
Fig. 7

Index profile of the edge filter from substrate to air.

Fig. 8
Fig. 8

General spectral shape of the FP design.

Fig. 9
Fig. 9

Index profile of the general shape from substrate to air.

Fig. 10
Fig. 10

NBP filter of the FP design.

Fig. 11
Fig. 11

Index profile of the NBP filter from substrate to air.

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