Abstract

We have designed what we believe to be new hybrid-type attenuated phase-shift masks for extreme-ultraviolet optical lithography by use of a Fabry–Perot interference filter. The designs for the attenuated phase-shift masks show a smaller step height for less geometric shadow effects than additive- and subtractive-type attenuated phase-shift masks, a contrast higher than 94% for both deep-ultraviolet and extreme-ultraviolet wavelength regimes, and a 180° phase-shift in the extreme-ultraviolet wavelength regime.

© 2008 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Binary mask designs with single- and double-layer absorber stacks for extreme ultraviolet lithography and actinic inspection

Sungjin Park, Jai Dong Lim, Pazhanisami Peranantham, Hee Young Kang, Chang Kwon Hwangbo, SuYoung Lee, and Seong-Su Kim
Appl. Opt. 53(4) A42-A47 (2014)

Coherent scattering microscopy as an effective inspection tool for analyzing performance of phase shift mask

Dong Gon Woo, Jae Uk Lee, Seong Chul Hong, Jung Sik Kim, and Jinho Ahn
Opt. Express 24(11) 12055-12062 (2016)

Thin absorber extreme ultraviolet photomask based on Ni–TaN nanocomposite material

Darrick Hay, Patrick Bagge, Ian Khaw, Lei Sun, Obert Wood, Yulu Chen, Ryoung-han Kim, Zhengqing John Qi, and Zhimin Shi
Opt. Lett. 41(16) 3791-3794 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription