Abstract

SiC∕Mg and B4C∕Mo∕Si multilayers were designed for He-II radiation at 30.4 nm. These multilayers were prepared by use of a direct current magnetron sputtering system and measured at the National Synchrotron Radiation Laboratory, China. The measured reflectivities were 38.0% for the SiC∕Mg multilayer at an incident angle of 12 deg and 32.5% for the B4C∕Mo∕Si multilayer at 5 deg, respectively. A dual-function multilayer mirror was also designed by use of the aperiodic SiC∕Mg multilayer. Annealing experiments were performed to investigate the thermal stability of the SiC∕Mg multilayer. The interface of the SiC∕Mg multilayer before and after annealing was studied by electron-induced x-ray emission spectra, which evidences the absence of thermal reaction products at the interfaces after annealing.

© 2008 Optical Society of America

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  1. M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
    [CrossRef]
  2. J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
    [CrossRef]
  3. D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt. 43, 1835-1848 (2004).
    [CrossRef] [PubMed]
  4. P. Boher, L. Hennet, and P. Houdy, “Three materials soft x-ray mirrors: theory and application,” Proc. SPIE 1345, 198-212 (1991).
    [CrossRef]
  5. J. I. Larruquert, “New layer-by-layer multilayer design method,” J. Opt. Soc. Am. A 19, 385-390 (2002).
    [CrossRef]
  6. J. I. Larruquert, “Reflectance enhancement in the extreme ultraviolet and soft x rays by means of multilayers with more than two materials,” J. Opt. Soc. Am. A 19, 391-397 (2002).
    [CrossRef]
  7. J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M.-F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44, 384-390 (2005).
    [CrossRef]
  8. I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
    [CrossRef]
  9. M. Grigonis and E. J. Knystautas, “C/Si multilayer mirrors for the 25-30 nm wavelength region,” Appl. Opt. 36, 2839-2842 (1997).
    [CrossRef] [PubMed]
  10. Z. S. Wang, F. L. Wang, Z. Zhong, H. C. Wang, W. J. Wu, S. M. Zhang, Y. Xu, and L. Y. Chen, “Research of multilayers in EUV, soft X-ray and X-ray,” Opt. Prec. Eng. 13(4), 512-518 (2005).
  11. D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280-287 (1999).
    [CrossRef]
  12. I. Yoshikawa and T. Murachi, “New multilayer coating for 30.4-nm radiation,” Proc. SPIE 5533, 163-170 (2004).
    [CrossRef]
  13. T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region,” Appl. Opt. 44, 5446-5453 (2005).
    [CrossRef] [PubMed]
  14. H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144-147, 1047-1049 (2005).
    [CrossRef]
  15. C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
    [CrossRef]

2005

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

Z. S. Wang, F. L. Wang, Z. Zhong, H. C. Wang, W. J. Wu, S. M. Zhang, Y. Xu, and L. Y. Chen, “Research of multilayers in EUV, soft X-ray and X-ray,” Opt. Prec. Eng. 13(4), 512-518 (2005).

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144-147, 1047-1049 (2005).
[CrossRef]

J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M.-F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44, 384-390 (2005).
[CrossRef]

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region,” Appl. Opt. 44, 5446-5453 (2005).
[CrossRef] [PubMed]

2004

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt. 43, 1835-1848 (2004).
[CrossRef] [PubMed]

I. Yoshikawa and T. Murachi, “New multilayer coating for 30.4-nm radiation,” Proc. SPIE 5533, 163-170 (2004).
[CrossRef]

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

2003

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

2002

J. I. Larruquert, “New layer-by-layer multilayer design method,” J. Opt. Soc. Am. A 19, 385-390 (2002).
[CrossRef]

J. I. Larruquert, “Reflectance enhancement in the extreme ultraviolet and soft x rays by means of multilayers with more than two materials,” J. Opt. Soc. Am. A 19, 391-397 (2002).
[CrossRef]

1999

D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280-287 (1999).
[CrossRef]

1997

M. Grigonis and E. J. Knystautas, “C/Si multilayer mirrors for the 25-30 nm wavelength region,” Appl. Opt. 36, 2839-2842 (1997).
[CrossRef] [PubMed]

1994

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

1991

P. Boher, L. Hennet, and P. Houdy, “Three materials soft x-ray mirrors: theory and application,” Proc. SPIE 1345, 198-212 (1991).
[CrossRef]

Allred, D. D.

D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280-287 (1999).
[CrossRef]

André, J.-M.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Auchere, F.

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Avila, P.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Banse, T.

Bocchialini, K.

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Boher, P.

P. Boher, L. Hennet, and P. Houdy, “Three materials soft x-ray mirrors: theory and application,” Proc. SPIE 1345, 198-212 (1991).
[CrossRef]

Bonnelle, C.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Bougnet, M.

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

Bouyries, P.

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

Bridou, F.

J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M.-F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44, 384-390 (2005).
[CrossRef]

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

Chargelègue, P.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Chen, L. Y.

Z. S. Wang, F. L. Wang, Z. Zhong, H. C. Wang, W. J. Wu, S. M. Zhang, Y. Xu, and L. Y. Chen, “Research of multilayers in EUV, soft X-ray and X-ray,” Opt. Prec. Eng. 13(4), 512-518 (2005).

Delaboudiniere, J.-P.

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Delmotte, F.

J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M.-F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44, 384-390 (2005).
[CrossRef]

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

Donguy, S.

Ejima, T.

Fontaine, M.-F.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Gabriel, A. H.

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Gautier, J.

Grigonis, M.

M. Grigonis and E. J. Knystautas, “C/Si multilayer mirrors for the 25-30 nm wavelength region,” Appl. Opt. 36, 2839-2842 (1997).
[CrossRef] [PubMed]

Gullikson, E. M.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144-147, 1047-1049 (2005).
[CrossRef]

Hennet, L.

P. Boher, L. Hennet, and P. Houdy, “Three materials soft x-ray mirrors: theory and application,” Proc. SPIE 1345, 198-212 (1991).
[CrossRef]

Houdy, P.

P. Boher, L. Hennet, and P. Houdy, “Three materials soft x-ray mirrors: theory and application,” Proc. SPIE 1345, 198-212 (1991).
[CrossRef]

Ichimaru, S.

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144-147, 1047-1049 (2005).
[CrossRef]

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region,” Appl. Opt. 44, 5446-5453 (2005).
[CrossRef] [PubMed]

Jerome, A.

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

Jérome, A.

Jonnard, P.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Kjornrattanawanich, B.

Knystautas, E. J.

M. Grigonis and E. J. Knystautas, “C/Si multilayer mirrors for the 25-30 nm wavelength region,” Appl. Opt. 36, 2839-2842 (1997).
[CrossRef] [PubMed]

Kondo, Y.

Koutchmy, S. L.

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Lamy, P. L.

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Laporte, D.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Larruquert, J. I.

J. I. Larruquert, “New layer-by-layer multilayer design method,” J. Opt. Soc. Am. A 19, 385-390 (2002).
[CrossRef]

J. I. Larruquert, “Reflectance enhancement in the extreme ultraviolet and soft x rays by means of multilayers with more than two materials,” J. Opt. Soc. Am. A 19, 391-397 (2002).
[CrossRef]

Lemaire, P.

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Mercier, R.

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Murachi, T.

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

I. Yoshikawa and T. Murachi, “New multilayer coating for 30.4-nm radiation,” Proc. SPIE 5533, 163-170 (2004).
[CrossRef]

Ohchi, T.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144-147, 1047-1049 (2005).
[CrossRef]

Paquier, P.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Ravet, M.-F.

J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M.-F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44, 384-390 (2005).
[CrossRef]

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Ringuenet, A.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Rodriguez, B.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Roulliay, M.

Saito, K.

Seely, J.

Song, X.

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Song, X. Z.

M.-F. Ravet, F. Bridou, X. Z. Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J.-P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” Proc. SPIE 5250, 99-108 (2004).
[CrossRef]

Squires, M. B.

D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280-287 (1999).
[CrossRef]

Staub, P.-F.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Takenaka, H.

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region,” Appl. Opt. 44, 5446-5453 (2005).
[CrossRef] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144-147, 1047-1049 (2005).
[CrossRef]

I. Yoshikawa, T. Murachi, H. Takenaka, and S. Ichimaru, “Multilayer coating for 30.4 nm,” Rev. Sci. Instrum. 76, 066109 (2005).
[CrossRef]

Turley, R. S.

D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280-287 (1999).
[CrossRef]

Vergand, F.

C. Bonnelle, F. Vergand, P. Jonnard, J.-M. André, P.-F. Staub, P. Avila, P. Chargelègue, M.-F. Fontaine, D. Laporte, P. Paquier, A. Ringuenet, and B. Rodriguez, “Instrument for research on interfaces and surfaces,” Rev. Sci. Instrum. 65, 3466-3471 (1994).
[CrossRef]

Vial, J.-C.

J.-C. Vial, X. Song, P. Lemaire, A. H. Gabriel, J.-P. Delaboudiniere, K. Bocchialini, S. L. Koutchmy, P. L. Lamy, R. Mercier, M.-F. Ravet, and F. Auchere, “The solar high-resolution imager-coronagraph LYOT mission,” Proc. SPIE 4853, 479-489 (2003).
[CrossRef]

Wang, F. L.

Z. S. Wang, F. L. Wang, Z. Zhong, H. C. Wang, W. J. Wu, S. M. Zhang, Y. Xu, and L. Y. Chen, “Research of multilayers in EUV, soft X-ray and X-ray,” Opt. Prec. Eng. 13(4), 512-518 (2005).

Wang, H. C.

Z. S. Wang, F. L. Wang, Z. Zhong, H. C. Wang, W. J. Wu, S. M. Zhang, Y. Xu, and L. Y. Chen, “Research of multilayers in EUV, soft X-ray and X-ray,” Opt. Prec. Eng. 13(4), 512-518 (2005).

Wang, Z. S.

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[CrossRef]

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Figures (6)

Fig. 1
Fig. 1

(Color online) (a) Optimized reflectivity of the B 4 C ∕Mo∕Si multilayer versus number of periods of the multilayer at an incident angle of 5 deg. (b) Optimized layer thickness of Mo, B 4 C , and Si corresponding to the B 4 C ∕Mo∕Si multilayer in (a).

Fig. 2
Fig. 2

(Color online) Measured reflectivities of (a) SiC∕Mg and (b) B 4 C ∕Mo∕Si multilayers measured by synchrotron radiation at the NSRL.

Fig. 3
Fig. 3

Calculated theoretical reflectivity of an aperiodic SiC∕Mg multilayer designed as a dual-function mirror, highly reflective at 30.4 n m and antireflective at 58.4 n m . The periodic SiC∕Mg multilayer is also shown just for comparison.

Fig. 4
Fig. 4

(Color online) Optimized layer thickness distribution of an aperiodic SiC∕Mg multilayer designed as a dual-function mirror.

Fig. 5
Fig. 5

(Color online) Measured reflectivities of SiC∕Mg multilayers before and after annealing at different annealing temperatures.

Fig. 6
Fig. 6

(Color online) Mg-Kβ and Si-Kβ spectra of the SiC∕Mg multilayer before and after annealing, and the reference materials of Mg, M g 2 S i powders, and SiC thin film.

Tables (1)

Tables Icon

Table 1 Peak Reflectivities and Bandwidths (FWHM) of Mg- and Si-Based Multilayers at 30.4 nm Wavelength

Equations (93)

Equations on this page are rendered with MathJax. Learn more.

B 4 C
B 4 C
( λ = 17.1 n m )
( λ = 19.5 n m )
( λ = 28.4 n m )
( λ = 30.4 n m )
12.4 n m
30.4 n m
B 4 C
B 4 C
30.4 n m
B 4 C / M o / S i
B 4 C
30.4 n m
4.20 / 2.18 / 10.25 n m
B 4 C
B 4 C
30.4 n m
1.67 n m
B 4 C
5 × 10 5 P a
0.1 P a
B 4 C
20 m m × 30 m m
B 4 C
( 0.05 n m / s )
( 0.06 n m / s )
( 0.16 n m / s )
( 0.17 n m / s )
( 0.10 n m / s )
B 4 C
( 600   lines / m m )
λ / Δ λ
3 m m
30.4 n m
B 4 C
B 4 C
15.99 n m
1.8 n m
B 4 C
B 4 C
4.03
1.61
11.01 n m
0.98 n m
B 4 C
σ ( B 4 C - M o ) ]
1.10 n m
[ σ ( M o - S i ) ]
[ σ ( S i - B 4 C ) ]
30.4 n m
58.4 n m
F = R 30.4 max ( 0.1 % , R 58.4 ) ,
R 30.4
R 58.4
30.4
58.4 n m
20 70 n m
58.4 n m
58.4 n m
58.4 n m
30.4 n m
4 13
3 10  n m
30.4 n m
3 × 10 4 P a
300 ° C
500 ° C
M g K β
S i K β
M g K β
S i K β
M g K β
S i K β
495 ° C
M g 2 S i
M g K β
( S i K β )
M g K β
( S i K β )
M g 2 S i
B 4 C
B 4 C
58.4 n m
30.4 n m
M g / Y 2 O 3
B 4 C
B 4 C
B 4 C
B 4 C
30.4 n m
58.4 n m
M g 2 S i

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