Abstract

A novel atomic layer deposition process for the preparation of fluoride thin films in a temperature range of 225  °C400  °C is introduced. The crystallinity, morphology, composition, thicknesses, refractive indices, and transmittance of the films are analyzed. Low impurity levels are obtained at 350  °C400  °C with good stoichiometry. Refractive indices of 1.34–1.42 for MgF2, 1.43 for CaF2, and 1.57–1.61 for LaF3 films are obtained.

© 2008 Optical Society of America

Full Article  |  PDF Article
Related Articles
Optical thin layers of MgF2 produced by decomposition of organic magnesium-fluoro compounds

Paul H. Joosten, Piet Heller, Harry J. P. Nabben, Harrie A. M. van Hal, Theo J. A. Popma, and Jan Haisma
Appl. Opt. 24(16) 2674-2678 (1985)

Atomic layer deposition of Al2O3 and TiO2 multilayers for applications as bandpass filters and antireflection coatings

Adriana Szeghalmi, Michael Helgert, Robert Brunner, Frank Heyroth, Ulrich Gösele, and Mato Knez
Appl. Opt. 48(9) 1727-1732 (2009)

Optical coatings in microscale channels by atomic layer deposition

Nicholas T. Gabriel and Joseph J. Talghader
Appl. Opt. 49(8) 1242-1248 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription