Abstract

We have successfully developed a process to form high quality MgF2 thin films with ultralow refractive indices from autoclaved sols prepared from magnesium acetate and hydrofluoric acid. And we have confirmed that our porous MgF2 coatings have not only high transmittance in the UV region but also high uniformity of film thickness. They can be uniformly formed on ϕ300mm substrates as a single coating and as a hybrid coating with sublayers formed by physical vapor deposition. They are expected to be applied to various optics that need high transmittance in the UV region.

© 2008 Optical Society of America

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