Abstract

A fence post design, when viewed on a plot of index of refraction versus film thickness, has thin (usually of equal thickness) high-index posts that stand above a broad low-index ground. Monitoring fence post and related posthole designs offers error compensation and error reduction. There tend to be two or more extrema within the optical monitoring trace of each layer between the fence posts that aid in the calibration and control of film thickness. This also leads to a potentially improved control during deposition of narrow bandpass filters that have been designed with nonquarterwaves at the passband wavelength.

© 2008 Optical Society of America

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References

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  1. R. R. Willey, "Design of optical thin films using the Fencepost Method," Proc. Soc. Vac. Coaters 50, 365-368 (2007).
  2. R. R. Willey, "Design of blocking filters of any narrow bandwidth," Appl. Opt. 46, 1201-1204 (2007).
    [CrossRef] [PubMed]
  3. U. Schulz, U. B. Schallenberg, and N. Kaiser, "Antireflective coating design for plastic optics," Appl. Opt. 41, 3107-3110 (2002).
    [CrossRef] [PubMed]
  4. U. Schulz, U. B. Schallenberg, and N. Kaiser, "Symmetrical periods in antireflective coatings for plastic optics," Appl. Opt. 42, 1346-1351 (2003).
    [CrossRef] [PubMed]
  5. R. R. Willey, Practical Monitoring and Control of Optical Thin Films (Willey Optical, Consultants, Charlevoix, Mich., 2007), pp. 91-92 and 117.

2007 (2)

R. R. Willey, "Design of optical thin films using the Fencepost Method," Proc. Soc. Vac. Coaters 50, 365-368 (2007).

R. R. Willey, "Design of blocking filters of any narrow bandwidth," Appl. Opt. 46, 1201-1204 (2007).
[CrossRef] [PubMed]

2003 (1)

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Symmetrical periods in antireflective coatings for plastic optics," Appl. Opt. 42, 1346-1351 (2003).
[CrossRef] [PubMed]

2002 (1)

Kaiser, N.

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Symmetrical periods in antireflective coatings for plastic optics," Appl. Opt. 42, 1346-1351 (2003).
[CrossRef] [PubMed]

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Antireflective coating design for plastic optics," Appl. Opt. 41, 3107-3110 (2002).
[CrossRef] [PubMed]

Schallenberg, U. B.

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Symmetrical periods in antireflective coatings for plastic optics," Appl. Opt. 42, 1346-1351 (2003).
[CrossRef] [PubMed]

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Antireflective coating design for plastic optics," Appl. Opt. 41, 3107-3110 (2002).
[CrossRef] [PubMed]

Schulz, U.

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Symmetrical periods in antireflective coatings for plastic optics," Appl. Opt. 42, 1346-1351 (2003).
[CrossRef] [PubMed]

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Antireflective coating design for plastic optics," Appl. Opt. 41, 3107-3110 (2002).
[CrossRef] [PubMed]

Willey, R. R.

R. R. Willey, "Design of blocking filters of any narrow bandwidth," Appl. Opt. 46, 1201-1204 (2007).
[CrossRef] [PubMed]

R. R. Willey, "Design of optical thin films using the Fencepost Method," Proc. Soc. Vac. Coaters 50, 365-368 (2007).

R. R. Willey, Practical Monitoring and Control of Optical Thin Films (Willey Optical, Consultants, Charlevoix, Mich., 2007), pp. 91-92 and 117.

Appl. Opt. (1)

U. Schulz, U. B. Schallenberg, and N. Kaiser, "Symmetrical periods in antireflective coatings for plastic optics," Appl. Opt. 42, 1346-1351 (2003).
[CrossRef] [PubMed]

Appl. Opt. (2)

Proc. Soc. Vac. Coaters (1)

R. R. Willey, "Design of optical thin films using the Fencepost Method," Proc. Soc. Vac. Coaters 50, 365-368 (2007).

Other (1)

R. R. Willey, Practical Monitoring and Control of Optical Thin Films (Willey Optical, Consultants, Charlevoix, Mich., 2007), pp. 91-92 and 117.

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Figures (10)

Fig. 1
Fig. 1

This thin-film design appears to be fence posts of high-index layers above a low-index ground.

Fig. 2
Fig. 2

This thin-film design appears to be postholes of low-index layers below a high-index ground.

Fig. 3
Fig. 3

Spectrum of a conventional NBP filter.

Fig. 4
Fig. 4

Predicted optical monitor plot at 550 n m of all 42 layers of Fig. 3.

Fig. 5
Fig. 5

NBP filter of the fence post design.

Fig. 6
Fig. 6

Predicted optical monitor plot at 550 n m of the last cavity (layers 70–108) of the design in Fig. 5.

Fig. 7
Fig. 7

Monitor trace for layers in the last cavity of the design in Fig. 5 with annotation for the percentage of the last max–min monitoring.

Fig. 8
Fig. 8

Spectrum of a nearly conventional NBP filter.

Fig. 9
Fig. 9

Predicted optical monitor plot at 550 n m of all 44 layers of Fig. 10.

Fig. 10
Fig. 10

Optical monitor plot at 550 n m of the first four layers of the Fig. 8 design.

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