Abstract

Residual absorption in optical coatings and materials is directly measured by means of the laser-induced deflection (LID) technique. For transmissive coatings a measurement strategy is introduced that allows for the separation of different absorptions of the investigated sample (bulk, coating, surface) by use of only one sample. Laser irradiation yields absorption values between 2×103 and 2.9×102 for antireflecting and highly reflecting (HR) coatings at 193nm and 30.6×106 for a HR mirror at 527nm. Use of laser-induced fluorescence at 193nm excitation reveals trivalent cerium and prasodymium and hydrocarbons in different single layers and coatings. In addition to correlation with absorption data, the influence of a high fluorescence quantum yield on the absorption measurement is discussed.

© 2008 Optical Society of America

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