Chalcogenide coatings are investigated to obtain either optical components for spectral applications or optochemical sensors in the mid-infrared. The deposition of and chalcogenide glasses is performed by two physical techniques: electron-beam and pulsed-laser deposition. The quality of the film is analyzed by scanning electron microscopy, atomic force microscopy, and energy dispersive spectroscopy to characterize the morphology, topography, and chemical composition. The optical properties and optical constants are also determined. A dry etching is performed on these films to obtain a channeled optical waveguide. For a passband filter made by electron-beam deposition, cryolite as a low-refractive-index material and chalcogenide glasses as high-refractive-index materials are used to favor a large refractive-index contrast. A shift of a centered wavelength of a photosensitive passband filter is controlled by illumination time.
© 2008 Optical Society of AmericaFull Article | PDF Article
J. F. Tang, P. F. Gu, and Q. H. Wu
Appl. Opt. 23(20) 3602-3607 (1984)
A. Zakery, Y. Ruan, A. V. Rode, M. Samoc, and B. Luther-Davies
J. Opt. Soc. Am. B 20(9) 1844-1852 (2003)
Vahid G. Ta’eed, Neil J. Baker, Libin Fu, Klaus Finsterbusch, Michael R.E. Lamont, David J. Moss, Hong C. Nguyen, Benjamin J. Eggleton, Duk Yong Choi, Steven Madden, and Barry Luther-Davies
Opt. Express 15(15) 9205-9221 (2007)