Abstract

A practical all-fiber three-dimensional measurement system is demonstrated with an incoherent interferometer at the eye-safe wavelength of 1.55μm. The sensitivity and axial resolution are as high as 102dB and 1.4μm from a few meters’ distance, respectively. A rotating scanner is developed for axial scanning, and a wide longitudinal scanning range of 54mm is demonstrated. The high resolution images of a few samples are clearly obtained at the speed of 52points/s. Moreover, the resolution, sensitivity, speed, and angle dependence are discussed for measurement of a 100yen Japanese coin.

© 2008 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. F. Chen, G. M. Brown, and M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39, 10-22 (2000).
    [CrossRef]
  2. Y.-Y. Cheng and J. C. Wyant, “Multiple-wavelength phase-shifting interferometry,” Appl. Opt. 24, 804-807 (1985).
    [CrossRef] [PubMed]
  3. K. Creath, “Step height measurement using two-wavelength phase-shifting interferometry,” Appl. Opt. 26, 2810-2816(1987).
    [CrossRef] [PubMed]
  4. D. S. Mehta, S. K. Dubey, M. M. Hossain, and C. Shakher, “Simple multifrequency and phase-shifting fringe-projection system based on two-wavelength lateral shearing interferometry for three-dimensional profilometry,” Appl. Opt. 44, 7515-7521 (2005).
    [CrossRef] [PubMed]
  5. K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40, 1653-1660 (2001).
    [CrossRef]
  6. M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer based topography and interferometry,” J. Opt. Soc. Am. 72, 156-160 (1982).
    [CrossRef]
  7. M. Rioux and F. Blais, “Compact three-dimensional camera for robotic applications,” J. Opt. Soc. Am. A 3, 1518-1521 (1986).
    [CrossRef]
  8. R. G. Dorsch, G. Hausler, and J. M. Herrmann, “Laser triangulation: fundamental uncertainty in distance measurement,” Appl. Opt. 33, 1306-1314 (1994).
    [CrossRef] [PubMed]
  9. I. Kaisto, J. Kostamovaara, M. Manninen, and R. Myllyla, “Optical range finder for 1.5-10 m distances,” Appl. Opt. 22, 3258-3264 (1983).
    [CrossRef] [PubMed]
  10. T. Dresel, G. Hausler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919-925 (1992).
    [CrossRef] [PubMed]
  11. L. Deck and P. Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334-7338(1994).
    [CrossRef] [PubMed]
  12. B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784-3788 (1990).
    [CrossRef] [PubMed]
  13. T. Endo, Y. Yasuno, S. Makita, M. Itoh, and T. Yatagai, “Profilometry with line-field Fourier-domain interferometry,” Opt. Express 13, 695-701 (2005).
    [CrossRef] [PubMed]
  14. N. Nishizawa, T. Ohta, and T. Goto, “Highly sensitive three-dimensional measurement using ultrashort pulse fiber laser and fiber interferometer,” in International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics-Pacific Rim 2005 (IEEE, 2005), paper CFK 2-5.
    [PubMed]
  15. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
    [CrossRef] [PubMed]
  16. N. Nishizawa, Y. Chen, P. Hsiung, E. P. Ippen, and J. G. Fujimoto, “Real-time, ultrahigh-resolution, optical coherence tomography with an all-fiber, femtosecond fiber laser continuum at 1.5 μm,” Opt. Lett. 29, 2846 (2004).
    [CrossRef]
  17. B. E. Bouma and G. J. Tearney, Handbook of Optical Coherence Tomography (Marcel-Decker, 2002), Chap. 2.

2005 (3)

2004 (1)

2002 (1)

B. E. Bouma and G. J. Tearney, Handbook of Optical Coherence Tomography (Marcel-Decker, 2002), Chap. 2.

2001 (1)

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40, 1653-1660 (2001).
[CrossRef]

2000 (1)

F. Chen, G. M. Brown, and M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39, 10-22 (2000).
[CrossRef]

1994 (2)

1992 (1)

1991 (1)

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

1990 (1)

1987 (1)

1986 (1)

1985 (1)

1983 (1)

1982 (1)

Blais, F.

Bouma, B. E.

B. E. Bouma and G. J. Tearney, Handbook of Optical Coherence Tomography (Marcel-Decker, 2002), Chap. 2.

Brown, G. M.

F. Chen, G. M. Brown, and M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39, 10-22 (2000).
[CrossRef]

Chang, W.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Chen, F.

F. Chen, G. M. Brown, and M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39, 10-22 (2000).
[CrossRef]

Chen, Y.

Cheng, Y.-Y.

Creath, K.

Deck, L.

Dorsch, R. G.

Dresel, T.

Dubey, S. K.

Endo, T.

Fleischer, M.

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40, 1653-1660 (2001).
[CrossRef]

Flotte, T.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Fujimoto, J. G.

N. Nishizawa, Y. Chen, P. Hsiung, E. P. Ippen, and J. G. Fujimoto, “Real-time, ultrahigh-resolution, optical coherence tomography with an all-fiber, femtosecond fiber laser continuum at 1.5 μm,” Opt. Lett. 29, 2846 (2004).
[CrossRef]

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Goto, T.

N. Nishizawa, T. Ohta, and T. Goto, “Highly sensitive three-dimensional measurement using ultrashort pulse fiber laser and fiber interferometer,” in International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics-Pacific Rim 2005 (IEEE, 2005), paper CFK 2-5.
[PubMed]

Gregory, K.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Groot, P.

Hausler, G.

Hee, M. R.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Herrmann, J. M.

Hossain, M. M.

Hsiung, P.

Huang, D.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Ina, H.

Ippen, E. P.

Itoh, M.

Kaisto, I.

Kobayashi, S.

Korner, K.

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40, 1653-1660 (2001).
[CrossRef]

Kostamovaara, J.

Lee, B. S.

Lin, C. P.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Makita, S.

Manninen, M.

Mehta, D. S.

Myllyla, R.

Nishizawa, N.

N. Nishizawa, T. Ohta, and T. Goto, “Highly sensitive three-dimensional measurement using ultrashort pulse fiber laser and fiber interferometer,” in International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics-Pacific Rim 2005 (IEEE, 2005), paper CFK 2-5.
[PubMed]

N. Nishizawa, Y. Chen, P. Hsiung, E. P. Ippen, and J. G. Fujimoto, “Real-time, ultrahigh-resolution, optical coherence tomography with an all-fiber, femtosecond fiber laser continuum at 1.5 μm,” Opt. Lett. 29, 2846 (2004).
[CrossRef]

Ohta, T.

N. Nishizawa, T. Ohta, and T. Goto, “Highly sensitive three-dimensional measurement using ultrashort pulse fiber laser and fiber interferometer,” in International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics-Pacific Rim 2005 (IEEE, 2005), paper CFK 2-5.
[PubMed]

Puliafito, C. A.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Rioux, M.

Schuman, J. S.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Shakher, C.

Song, M.

F. Chen, G. M. Brown, and M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39, 10-22 (2000).
[CrossRef]

Stinson, W. G.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Strand, T. C.

Swanson, E. A.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Takeda, M.

Tearney, G. J.

B. E. Bouma and G. J. Tearney, Handbook of Optical Coherence Tomography (Marcel-Decker, 2002), Chap. 2.

Tiziani, H. J.

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40, 1653-1660 (2001).
[CrossRef]

Venzke, H.

Windecker, R.

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40, 1653-1660 (2001).
[CrossRef]

Wyant, J. C.

Yasuno, Y.

Yatagai, T.

Appl. Opt. (8)

J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. A (1)

Opt. Eng. (2)

F. Chen, G. M. Brown, and M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39, 10-22 (2000).
[CrossRef]

K. Korner, R. Windecker, M. Fleischer, and H. J. Tiziani, “One-grating projection for absolute three-dimensional profiling,” Opt. Eng. 40, 1653-1660 (2001).
[CrossRef]

Opt. Express (1)

Opt. Lett. (1)

Science (1)

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
[CrossRef] [PubMed]

Other (2)

B. E. Bouma and G. J. Tearney, Handbook of Optical Coherence Tomography (Marcel-Decker, 2002), Chap. 2.

N. Nishizawa, T. Ohta, and T. Goto, “Highly sensitive three-dimensional measurement using ultrashort pulse fiber laser and fiber interferometer,” in International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics-Pacific Rim 2005 (IEEE, 2005), paper CFK 2-5.
[PubMed]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (9)

Fig. 1
Fig. 1

Experimental setup: FC1-2, fiber coupler 1-2; FPC, fiber polarization controller; Ref., reference optical path; Sig., signal optical path.

Fig. 2
Fig. 2

Measured spectra of the SLD.

Fig. 3
Fig. 3

Observed intereference signal.

Fig. 4
Fig. 4

Obtained signal on (a) linear and (b) log scale.

Fig. 5
Fig. 5

Spatial distribution of the beam intensity.

Fig. 6
Fig. 6

Observed image of 100 yen Japanese coin.

Fig. 7
Fig. 7

Angle dependence of a tilted 100 yen Japanese coin: (a) averaged intensity of the processed interference signal, (b)  percentage of data acquisition.

Fig. 8
Fig. 8

Observed images of a M-6 screw, (a)  oblique view, (b)  front view.

Fig. 9
Fig. 9

Observed image of a ceramic ball.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

Δ z = 2 ln 2 π λ 0 2 Δ λ ,

Metrics