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Measured and simulated performance of a ceramic micromechanical beam steering device at 94 GHz

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Abstract

We report the first experimental demonstration of a transmission-mode micromechanical beam steering device for use in standoff terahertz imaging and spectroscopy. The device was constructed by laminating laser-cut 96% alumina sheets to form two plates with interlocking rectangular gratings of 762μm period and was characterized at 94GHz in a free-space measurement setup with an automated elevation scan. Plate tilts as great as 6° deflected the transmitted beam by 6° for the transverse electric (TE) polarization and by 4° for the transverse magnetic polarization. Finite-difference time-domain simulations of the TE performance were in good agreement with the measurements.

© 2008 Optical Society of America

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