Abstract

Here we present multiple-wavelength digital holographic interferometry with a wide measurement range using laser diodes. Small wavelength differences can be easily realized by the wavelength tuning of laser diodes with injection current controls. A contour map of an object with a wide measurement range and a high sensitivity is demonstrated by combining a few contour maps with several measurement sensitivities. Synthetic wavelengths are calibrated using a known height difference. This alleviates the need to have high precise knowledge of the recording wavelengths. The synthetic wavelengths ranged from ~3 mm for high measurement sensitivity to ~4 cm for wide measurement range. An rms error of ~35 μm for a ~1 cm height measurement is shown. The measured profile of holographic interferometry agrees with a standard stylus instrument.

© 2008 Optical Society of America

PDF Article

References

  • View by:
  • |
  • |

  1. B. Hildebrand and K. Haines, “Multiple-wavelength and multiple-source holography applied to contour generation,” J. Opt. Soc. Am. 57, 155-162 (1967).
  2. L. O. Heflinger and R. F. Wuerker, “Holographic contouring via multifrequency lasers,” Appl. Phys. Lett. 15, 28 (1969).
    [CrossRef]
  3. A. A. Friesem and U. Levy, “Fringe formation in two-wavelength contour holography,” Appl. Opt. 15, 3009-3020(1976).
  4. M. Yonemura, “Wavelength-change characteristics of semiconductor lasers and their application to holographic contouring,” Opt. Lett. 10, 1-3 (1985).
  5. F. Zhang, I. Yamaguchi, and L. P. Yaroslavsky, “Algorithm for reconstruction of digital holograms with adjustable magnification,” Opt. Lett. 29, 1668-1670 (2004).
    [CrossRef]
  6. L. Yu and M. K. Kim, “Pixel resolution control in numerical reconstruction of digital holography,” Opt. Lett. 31, 897-899(2006).
    [CrossRef]
  7. C. Wagner, S. Seebacher, W. Osten, and W. Jüptner, “Digital recording and numerical reconstruction of lensless fourier holograms in optical metrology,” Appl. Opt. 38, 4812-4820(1999).
  8. C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39, 79-85 (2000).
  9. I. Yamaguchi, S. Ohta, and J. Kato, “Surface contouring by phase-shifting digital holography,” Opt. Lasers Eng. 36, 417-428 (2001).
  10. J. Gass, A. Dakoff, and M. K. Kim, “Phase imaging without 2π ambiguity by multiwavelength digital holography,” Opt. Lett. 28, 1141-1143 (2003).
    [CrossRef]
  11. D. Parshall and M. K. Kim, “Digital holographic microscopy with dual-wavelength phase unwrapping,” Appl. Opt. 45, 451-459 (2006).
    [CrossRef]
  12. I. Yamaguchi, T. Ida, M. Yokota, and K. Yamashita, “Surface shape measurement by phase-shifting digital holography with a wavelength shift,” Appl. Opt. 45, 7610-7616 (2006).
    [CrossRef]
  13. M. Servin, J. L. Marroquin, D. Malacara, and F. J. Cuevas, “Phase unwrapping with a regularized phase-tracking system,” Appl. Opt. 37, 1917-1923 (1998).
  14. A. Asundi and Z. Wensen, “Fast phase-unwrapping algorithm based on a gray-scale mask and flood fill,” Appl. Opt. 37, 5416-5420 (1998).
  15. G. Pedrini, P. Fröning, H. J. Tiziani, and M. E. Gusev, “Pulsed digital holography for high-speed contouring that uses a two-wavelength method,” Appl. Opt. 38, 3460-3467 (1999).
  16. Y. Y. Cheng and J. C. Wyant, “Two-wavelength phase shifting interferometry,” Appl. Opt. 23, 4539-4543 (1984).
  17. Y. Y. Cheng and J. C. Wyant, “Multiple-wavelength phase-shifting interferometry,” Appl. Opt. 24, 804-807 (1985).
  18. P. de Groot, “Three-color laser-diode interferometer,” Appl. Opt. 30, 3612-3616 (1991).
  19. Y. Ishii, Progress in Optics, Chap. Laser-diode interferometry, (Elsevier, 2004), vol. 46, pp. 243-309.

2006 (3)

2004 (1)

2003 (1)

2001 (1)

I. Yamaguchi, S. Ohta, and J. Kato, “Surface contouring by phase-shifting digital holography,” Opt. Lasers Eng. 36, 417-428 (2001).

2000 (1)

C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39, 79-85 (2000).

1999 (2)

1998 (2)

1991 (1)

1985 (2)

1984 (1)

1976 (1)

1969 (1)

L. O. Heflinger and R. F. Wuerker, “Holographic contouring via multifrequency lasers,” Appl. Phys. Lett. 15, 28 (1969).
[CrossRef]

1967 (1)

Appl. Opt. (10)

Appl. Phys. Lett. (1)

L. O. Heflinger and R. F. Wuerker, “Holographic contouring via multifrequency lasers,” Appl. Phys. Lett. 15, 28 (1969).
[CrossRef]

J. Opt. Soc. Am. (1)

Opt. Eng. (1)

C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39, 79-85 (2000).

Opt. Lasers Eng. (1)

I. Yamaguchi, S. Ohta, and J. Kato, “Surface contouring by phase-shifting digital holography,” Opt. Lasers Eng. 36, 417-428 (2001).

Opt. Lett. (4)

Other (1)

Y. Ishii, Progress in Optics, Chap. Laser-diode interferometry, (Elsevier, 2004), vol. 46, pp. 243-309.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics