Abstract

A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter.

© 2007 Optical Society of America

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  1. M. Aziz, P. Meissner, and Th. Hermes, "WDM system integration of micromachined tunable two-chip Fabry-Pérot filters," J. Opt. Commun. 208, 61-68 (2002).
    [CrossRef]
  2. C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004).
    [CrossRef]
  3. J. Nanshan, "The study and manufacture of variable filters used in linear detectors and area arrays detectors," Opt. Precision Eng. 1, 27-35 (1993) (in Chinese).
  4. S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
    [CrossRef]
  5. Y. Wu, G. Tian, Z. Wang, and X. Lin, "Design and modification of adjustable double channel filter," Chinese patent 200410053814.8 (2 March 2005).
  6. Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).
  7. F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).
  8. S. Kaushik and B. R. Stallard, "A two dimensional array of optical interference filters produced by lithographic alterations of the index of refraction," in Application andTheory of Periodic Structures, T. Jannson, ed., Proc. SPIE 2532, 276-281 (1995).
  9. S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).
  10. G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).
  11. J. Nasrullah, G. Leonard Tyler, and Y. Nishi, "An atomic force microscope study of surface roughness of thin silicon films deposited on SiO2," IEEE Trans. Nanotechnol. 4, 303-311 (2005).
    [CrossRef]

2006 (1)

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

2005 (3)

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

J. Nasrullah, G. Leonard Tyler, and Y. Nishi, "An atomic force microscope study of surface roughness of thin silicon films deposited on SiO2," IEEE Trans. Nanotechnol. 4, 303-311 (2005).
[CrossRef]

Y. Wu, G. Tian, Z. Wang, and X. Lin, "Design and modification of adjustable double channel filter," Chinese patent 200410053814.8 (2 March 2005).

2004 (1)

C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004).
[CrossRef]

2003 (1)

S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
[CrossRef]

2002 (1)

M. Aziz, P. Meissner, and Th. Hermes, "WDM system integration of micromachined tunable two-chip Fabry-Pérot filters," J. Opt. Commun. 208, 61-68 (2002).
[CrossRef]

1995 (1)

S. Kaushik and B. R. Stallard, "A two dimensional array of optical interference filters produced by lithographic alterations of the index of refraction," in Application andTheory of Periodic Structures, T. Jannson, ed., Proc. SPIE 2532, 276-281 (1995).

1994 (1)

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

1993 (1)

J. Nanshan, "The study and manufacture of variable filters used in linear detectors and area arrays detectors," Opt. Precision Eng. 1, 27-35 (1993) (in Chinese).

Alibert, G.

S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
[CrossRef]

Aziz, M.

M. Aziz, P. Meissner, and Th. Hermes, "WDM system integration of micromachined tunable two-chip Fabry-Pérot filters," J. Opt. Commun. 208, 61-68 (2002).
[CrossRef]

Boos, N.

S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
[CrossRef]

Chen, L.

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

Chen, X.

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

Chevallier, P.

S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
[CrossRef]

Chirossel, L.

C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004).
[CrossRef]

Chun, L. S. How Kee

S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
[CrossRef]

Ge, Z.

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

Guidoux, C.

C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004).
[CrossRef]

Guiziou, L.

S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
[CrossRef]

Hermes, Th.

M. Aziz, P. Meissner, and Th. Hermes, "WDM system integration of micromachined tunable two-chip Fabry-Pérot filters," J. Opt. Commun. 208, 61-68 (2002).
[CrossRef]

Hoarau, B.

C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004).
[CrossRef]

Huang, Y.

Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).

Jacquin, O.

C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004).
[CrossRef]

Kaushik, S.

S. Kaushik and B. R. Stallard, "A two dimensional array of optical interference filters produced by lithographic alterations of the index of refraction," in Application andTheory of Periodic Structures, T. Jannson, ed., Proc. SPIE 2532, 276-281 (1995).

Kong, L.

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

Lin, B.

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

Lin, X.

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

Y. Wu, G. Tian, Z. Wang, and X. Lin, "Design and modification of adjustable double channel filter," Chinese patent 200410053814.8 (2 March 2005).

Liu, D.

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

Lu, W.

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

Martinez, C.

C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004).
[CrossRef]

Meissner, P.

M. Aziz, P. Meissner, and Th. Hermes, "WDM system integration of micromachined tunable two-chip Fabry-Pérot filters," J. Opt. Commun. 208, 61-68 (2002).
[CrossRef]

Nanshan, J.

J. Nanshan, "The study and manufacture of variable filters used in linear detectors and area arrays detectors," Opt. Precision Eng. 1, 27-35 (1993) (in Chinese).

Nasrullah, J.

J. Nasrullah, G. Leonard Tyler, and Y. Nishi, "An atomic force microscope study of surface roughness of thin silicon films deposited on SiO2," IEEE Trans. Nanotechnol. 4, 303-311 (2005).
[CrossRef]

Nishi, Y.

J. Nasrullah, G. Leonard Tyler, and Y. Nishi, "An atomic force microscope study of surface roughness of thin silicon films deposited on SiO2," IEEE Trans. Nanotechnol. 4, 303-311 (2005).
[CrossRef]

Qi, T.

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

Stallard, B. R.

S. Kaushik and B. R. Stallard, "A two dimensional array of optical interference filters produced by lithographic alterations of the index of refraction," in Application andTheory of Periodic Structures, T. Jannson, ed., Proc. SPIE 2532, 276-281 (1995).

Tian, G.

Y. Wu, G. Tian, Z. Wang, and X. Lin, "Design and modification of adjustable double channel filter," Chinese patent 200410053814.8 (2 March 2005).

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

Tyler, G. Leonard

J. Nasrullah, G. Leonard Tyler, and Y. Nishi, "An atomic force microscope study of surface roughness of thin silicon films deposited on SiO2," IEEE Trans. Nanotechnol. 4, 303-311 (2005).
[CrossRef]

Vallon, S.

S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
[CrossRef]

Wang, L.

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

Wang, S.

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

Wang, Y.

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

Wang, Z.

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

Y. Wu, G. Tian, Z. Wang, and X. Lin, "Design and modification of adjustable double channel filter," Chinese patent 200410053814.8 (2 March 2005).

Wu, Y.

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

Y. Wu, G. Tian, Z. Wang, and X. Lin, "Design and modification of adjustable double channel filter," Chinese patent 200410053814.8 (2 March 2005).

Xu, C.

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

Xun, B.

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

Yan, Y.

Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).

Zhang, F.

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

Zhang, L.

Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).

Zhang, S.

Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).

Zhang, W.

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).

Zhu, F.

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

Zhu, L.

Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).

Acta Opt. Sin. (2)

S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).

G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).

IEEE Photon. Technol. Lett. (1)

S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003).
[CrossRef]

IEEE Trans. Nanotechnol. (1)

J. Nasrullah, G. Leonard Tyler, and Y. Nishi, "An atomic force microscope study of surface roughness of thin silicon films deposited on SiO2," IEEE Trans. Nanotechnol. 4, 303-311 (2005).
[CrossRef]

J. Opt. Commun. (2)

M. Aziz, P. Meissner, and Th. Hermes, "WDM system integration of micromachined tunable two-chip Fabry-Pérot filters," J. Opt. Commun. 208, 61-68 (2002).
[CrossRef]

C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004).
[CrossRef]

Opt. Precision Eng. (1)

J. Nanshan, "The study and manufacture of variable filters used in linear detectors and area arrays detectors," Opt. Precision Eng. 1, 27-35 (1993) (in Chinese).

Other (4)

Y. Wu, G. Tian, Z. Wang, and X. Lin, "Design and modification of adjustable double channel filter," Chinese patent 200410053814.8 (2 March 2005).

Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).

F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).

S. Kaushik and B. R. Stallard, "A two dimensional array of optical interference filters produced by lithographic alterations of the index of refraction," in Application andTheory of Periodic Structures, T. Jannson, ed., Proc. SPIE 2532, 276-281 (1995).

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Figures (8)

Fig. 1
Fig. 1

Theoretical transmittance of the basic structure.

Fig. 2
Fig. 2

(Color online) Transmittance of the two-chamber 32-channel integrated filter.

Fig. 3
Fig. 3

(Color online) Flow sheet of the preparation of the two-chamber integrated narrowband filter. (a) Depositing the first resonant cavity, (b) etching the first resonant cavity, (c) second depositing, (d) depositing the second resonant cavity, (e) etching the second resonant cavity, (f) depositing the residual film.

Fig. 4
Fig. 4

Transmittance of the multicoating film.

Fig. 5
Fig. 5

(Color online) AFM surface test in different technological conditions. (a) Substrate, (b) first reflective stack and the spacer layer on the substrate, (c) etched spacer layer, (d) second reflective stack.

Fig. 6
Fig. 6

(Color online) Transmittance curves of the 32-channel sample.

Fig. 7
Fig. 7

Distribution of 32 channels.

Fig. 8
Fig. 8

(Color online) Error analysis of the etching. (a) Optical thickness of the first resonance cavity versus the variable second one, (b) optical thickness of the second resonance cavity versus the variable first one.

Tables (1)

Tables Icon

Table 1 Technological Parameters of Etching

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