Abstract

The optical surface of a large optical flat can be measured using an autocollimator and scanning pentaprism system. The autocollimator measures the slope difference between a point on the mirror and a reference point. Such a system was built and previously operated at the University of Arizona. We discuss refinements that were made to the hardware, the alignment procedure, and the error analysis. The improved system was demonstrated with a 1.6 m flat mirror, which was measured to be flat to 12 nm rms. The uncertainty in the measurement is only 9 nm rms.

© 2007 Optical Society of America

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  1. P. Mallik, C. Zhao, and J. H. Burge, "Measurement of a 2-m flat using a pentaprism scanning system," Opt. Eng. 46, 023602 (2007).
  2. S. Qian, P. Takacs, G. Sostero, and D. Cocco, "Portable long trace profiler: concept and solution," Rev. Sci. Instrum. 72, 3198-3204 (2001).
  3. S. Qian, W. Jark, and P. Z. Takacs, "The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta prism," Rev. Sci. Instrum. 66, 2562-2569 (1995).
  4. R. D. Geckeler, "ESAD shearing deflectometry: potential for synchrotron beamline metrology," Proc. SPIE 6317, 63171H (2006).
  5. M. V. Mantravadi, "Newton, Fizeau, and Haidinger interferometers," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 1-49.
  6. J. Ojeda-Castaneda, "Foucault, wire, and phase modulation tests," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 265-320.
  7. R. D. Geckeler, "Error minimization in high-accuracy scanning deflectometry," Proc. SPIE 6293, 62930O (2006).
  8. R. D. Geckeler, "Optimal use of pentaprisms in highly accurate deflectometric scanning," Meas. Sci. Technol. 18, 115-125 (2006).
  9. J. Yellowhair and J. H. Burge, "Measurement of optical flatness using electronic levels," Opt. Eng. (to be published).
  10. J. Yellowhair, College of Optical Sciences, University of Arizona, 1630 East University Boulevard, Tucson, AZ 85721, R. Sprowl, P. Su, R. Stone, and J. H. Burge are preparing a manuscript to be called "Development of a 1 meter vibration-insensitive Fizeau interferometer."

2007 (1)

P. Mallik, C. Zhao, and J. H. Burge, "Measurement of a 2-m flat using a pentaprism scanning system," Opt. Eng. 46, 023602 (2007).

2006 (3)

R. D. Geckeler, "ESAD shearing deflectometry: potential for synchrotron beamline metrology," Proc. SPIE 6317, 63171H (2006).

R. D. Geckeler, "Error minimization in high-accuracy scanning deflectometry," Proc. SPIE 6293, 62930O (2006).

R. D. Geckeler, "Optimal use of pentaprisms in highly accurate deflectometric scanning," Meas. Sci. Technol. 18, 115-125 (2006).

2001 (1)

S. Qian, P. Takacs, G. Sostero, and D. Cocco, "Portable long trace profiler: concept and solution," Rev. Sci. Instrum. 72, 3198-3204 (2001).

1995 (1)

S. Qian, W. Jark, and P. Z. Takacs, "The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta prism," Rev. Sci. Instrum. 66, 2562-2569 (1995).

1992 (2)

M. V. Mantravadi, "Newton, Fizeau, and Haidinger interferometers," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 1-49.

J. Ojeda-Castaneda, "Foucault, wire, and phase modulation tests," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 265-320.

Burge, J. H.

P. Mallik, C. Zhao, and J. H. Burge, "Measurement of a 2-m flat using a pentaprism scanning system," Opt. Eng. 46, 023602 (2007).

J. Yellowhair and J. H. Burge, "Measurement of optical flatness using electronic levels," Opt. Eng. (to be published).

Burge are preparing a manuscript to be called, J. H.

J. Yellowhair, College of Optical Sciences, University of Arizona, 1630 East University Boulevard, Tucson, AZ 85721, R. Sprowl, P. Su, R. Stone, and J. H. Burge are preparing a manuscript to be called "Development of a 1 meter vibration-insensitive Fizeau interferometer."

Cocco, D.

S. Qian, P. Takacs, G. Sostero, and D. Cocco, "Portable long trace profiler: concept and solution," Rev. Sci. Instrum. 72, 3198-3204 (2001).

Geckeler, R. D.

R. D. Geckeler, "ESAD shearing deflectometry: potential for synchrotron beamline metrology," Proc. SPIE 6317, 63171H (2006).

R. D. Geckeler, "Error minimization in high-accuracy scanning deflectometry," Proc. SPIE 6293, 62930O (2006).

R. D. Geckeler, "Optimal use of pentaprisms in highly accurate deflectometric scanning," Meas. Sci. Technol. 18, 115-125 (2006).

Jark, W.

S. Qian, W. Jark, and P. Z. Takacs, "The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta prism," Rev. Sci. Instrum. 66, 2562-2569 (1995).

Mallik, P.

P. Mallik, C. Zhao, and J. H. Burge, "Measurement of a 2-m flat using a pentaprism scanning system," Opt. Eng. 46, 023602 (2007).

Mantravadi, M. V.

M. V. Mantravadi, "Newton, Fizeau, and Haidinger interferometers," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 1-49.

Ojeda-Castaneda, J.

J. Ojeda-Castaneda, "Foucault, wire, and phase modulation tests," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 265-320.

Qian, S.

S. Qian, P. Takacs, G. Sostero, and D. Cocco, "Portable long trace profiler: concept and solution," Rev. Sci. Instrum. 72, 3198-3204 (2001).

S. Qian, W. Jark, and P. Z. Takacs, "The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta prism," Rev. Sci. Instrum. 66, 2562-2569 (1995).

Sostero, G.

S. Qian, P. Takacs, G. Sostero, and D. Cocco, "Portable long trace profiler: concept and solution," Rev. Sci. Instrum. 72, 3198-3204 (2001).

Sprowl, R.

J. Yellowhair, College of Optical Sciences, University of Arizona, 1630 East University Boulevard, Tucson, AZ 85721, R. Sprowl, P. Su, R. Stone, and J. H. Burge are preparing a manuscript to be called "Development of a 1 meter vibration-insensitive Fizeau interferometer."

Stone, R.

J. Yellowhair, College of Optical Sciences, University of Arizona, 1630 East University Boulevard, Tucson, AZ 85721, R. Sprowl, P. Su, R. Stone, and J. H. Burge are preparing a manuscript to be called "Development of a 1 meter vibration-insensitive Fizeau interferometer."

Su, P.

J. Yellowhair, College of Optical Sciences, University of Arizona, 1630 East University Boulevard, Tucson, AZ 85721, R. Sprowl, P. Su, R. Stone, and J. H. Burge are preparing a manuscript to be called "Development of a 1 meter vibration-insensitive Fizeau interferometer."

Takacs, P.

S. Qian, P. Takacs, G. Sostero, and D. Cocco, "Portable long trace profiler: concept and solution," Rev. Sci. Instrum. 72, 3198-3204 (2001).

Takacs, P. Z.

S. Qian, W. Jark, and P. Z. Takacs, "The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta prism," Rev. Sci. Instrum. 66, 2562-2569 (1995).

Yellowhair, J.

J. Yellowhair, College of Optical Sciences, University of Arizona, 1630 East University Boulevard, Tucson, AZ 85721, R. Sprowl, P. Su, R. Stone, and J. H. Burge are preparing a manuscript to be called "Development of a 1 meter vibration-insensitive Fizeau interferometer."

J. Yellowhair and J. H. Burge, "Measurement of optical flatness using electronic levels," Opt. Eng. (to be published).

Zhao, C.

P. Mallik, C. Zhao, and J. H. Burge, "Measurement of a 2-m flat using a pentaprism scanning system," Opt. Eng. 46, 023602 (2007).

Meas. Sci. Technol. (1)

R. D. Geckeler, "Optimal use of pentaprisms in highly accurate deflectometric scanning," Meas. Sci. Technol. 18, 115-125 (2006).

Opt. Eng. (1)

P. Mallik, C. Zhao, and J. H. Burge, "Measurement of a 2-m flat using a pentaprism scanning system," Opt. Eng. 46, 023602 (2007).

Opt. Eng. (1)

J. Yellowhair and J. H. Burge, "Measurement of optical flatness using electronic levels," Opt. Eng. (to be published).

Proc. SPIE (1)

R. D. Geckeler, "Error minimization in high-accuracy scanning deflectometry," Proc. SPIE 6293, 62930O (2006).

Proc. SPIE (1)

R. D. Geckeler, "ESAD shearing deflectometry: potential for synchrotron beamline metrology," Proc. SPIE 6317, 63171H (2006).

Rev. Sci. Instrum. (1)

S. Qian, P. Takacs, G. Sostero, and D. Cocco, "Portable long trace profiler: concept and solution," Rev. Sci. Instrum. 72, 3198-3204 (2001).

Rev. Sci. Instrum. (1)

S. Qian, W. Jark, and P. Z. Takacs, "The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta prism," Rev. Sci. Instrum. 66, 2562-2569 (1995).

Other (3)

M. V. Mantravadi, "Newton, Fizeau, and Haidinger interferometers," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 1-49.

J. Ojeda-Castaneda, "Foucault, wire, and phase modulation tests," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 265-320.

J. Yellowhair, College of Optical Sciences, University of Arizona, 1630 East University Boulevard, Tucson, AZ 85721, R. Sprowl, P. Su, R. Stone, and J. H. Burge are preparing a manuscript to be called "Development of a 1 meter vibration-insensitive Fizeau interferometer."

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