Abstract

We present the study of the correlation between refractive index profiles and the optical response of rugate filters and multilayer mirrors. The conventionally used method in multilayer mirrors for ripple suppression in the passband will be compared with a similar simple method to remove the rugate filter sidelobes without apodization. The resulting layers are compared in performance with a typical quintic matching layer. An example based on silicon oxynitride alloys with refractive indices ranging between 1.47 and 1.83 was designed and deposited.

© 2007 Optical Society of America

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References

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  1. H. A. Macleod, Thin Film Optical Filters, 2nd ed. (Macmillan, 1986).
    [CrossRef]
  2. W. H. Southwell and R. L. Hall, "Rugate filter sidelobe suppression using quintic and rugated quintic matching layers," Appl. Opt. 28, 2949-2951 (1989).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
  5. B. G. Bovard, "Graded index rugate filters: power-sine rugate mirrors," Proc. SPIE 2046, 109-125 (1993).
    [CrossRef]
  6. P. Baumeister, "Multilayer reflectors with suppressed higher-order reflectance peaks," Appl. Opt. 31, 1568-1573 (1992).
    [CrossRef] [PubMed]
  7. P. Baumeister, "Design of multilayer filters by successive approximations," J. Opt. Soc. Am. 48, 955-958 (1958).
    [CrossRef]
  8. B. Haj Ibrahim, P. Bulkin, D. Daineka, and B. Drévillon, "Optical thin films deposition by MDECR-PECVD," Proc. SPIE 5963, 500-506 (2005).
  9. R. Botha, B. Haj Ibrahim, P. Bulkin, and B. Drévillon, "Deposition of dielectrics using a matrix distributed electron cyclotron resonance plasma enhanced chemical vapor deposition system," Thin Solid Films 515, 7594-7597 (2007).
    [CrossRef]

2007 (1)

R. Botha, B. Haj Ibrahim, P. Bulkin, and B. Drévillon, "Deposition of dielectrics using a matrix distributed electron cyclotron resonance plasma enhanced chemical vapor deposition system," Thin Solid Films 515, 7594-7597 (2007).
[CrossRef]

2005 (1)

B. Haj Ibrahim, P. Bulkin, D. Daineka, and B. Drévillon, "Optical thin films deposition by MDECR-PECVD," Proc. SPIE 5963, 500-506 (2005).

1993 (1)

B. G. Bovard, "Graded index rugate filters: power-sine rugate mirrors," Proc. SPIE 2046, 109-125 (1993).
[CrossRef]

1992 (1)

1989 (2)

1983 (1)

1958 (1)

Appl. Opt. (3)

J. Opt. Soc. Am. (1)

Opt. Lett. (1)

Proc. SPIE (2)

B. G. Bovard, "Graded index rugate filters: power-sine rugate mirrors," Proc. SPIE 2046, 109-125 (1993).
[CrossRef]

B. Haj Ibrahim, P. Bulkin, D. Daineka, and B. Drévillon, "Optical thin films deposition by MDECR-PECVD," Proc. SPIE 5963, 500-506 (2005).

Thin Solid Films (1)

R. Botha, B. Haj Ibrahim, P. Bulkin, and B. Drévillon, "Deposition of dielectrics using a matrix distributed electron cyclotron resonance plasma enhanced chemical vapor deposition system," Thin Solid Films 515, 7594-7597 (2007).
[CrossRef]

Other (1)

H. A. Macleod, Thin Film Optical Filters, 2nd ed. (Macmillan, 1986).
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

Index profile of a rugate filter and a multilayer mirror at 619.5 nm ( 2   eV ) versus optical thickness.

Fig. 2
Fig. 2

Reflectance of different multilayer mirrors for a glass substrate in air medium: (a) ( H L ) N H stack, (b) 0.5 H L ( H L ) N 0.5 H , (c) 0.5 L ( H L ) N H 0.5 L .

Fig. 3
Fig. 3

Index profiles of (a) 0.5 H L ( H L ) N 0.5 H , (b) rugate filter with 3 λ / 8 and λ / 8 layers, (c) 0.5 L ( H L ) N H 0.5 L , (d) rugate filter with λ / 8 and 3 λ / 8 layers.

Fig. 4
Fig. 4

Reflectance of rugate filters: (a) typical, (b) with 3 λ / 8 and λ / 8 layers, (c) with λ / 8 and 3 λ / 8 layers.

Fig. 5
Fig. 5

Quintic and sinusoidal matching layers.

Fig. 6
Fig. 6

Reflectance of (a) quintic matched and (b) sinusoidal matched rugate filters.

Fig. 7
Fig. 7

Transmission of a sinusoidally matched rugate filter.

Equations (2)

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n ( x ) = n a sin p ( 4 π x λ ) + n b ,
sin p ( x ) = sin ( x ) | sin ( x ) | p - 1 .

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