Abstract

An imaging spectrometer with adaptive space-variant spectral resolution is introduced to improve spectrometer data collection efficiency. Pixel-based dynamically selectable dispersion is achieved using microelectromechanical system (MEMS) mirrors to control the light path of each image point through the spectrometer. A compact (1×4×0.3mm) planar-optics structure is demonstrated, allowing the tiling of multiple spectrometers in an array for large image formats. The prototype spectrometer covers a wavelength between 500 and 1000nm with a spectral resolution that is dynamically adaptable for each pixel from 7.5 to 15nm.

© 2007 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |

  1. R. J. Birk and T. B. McCord, "Airborne hyperspectral sensor systems," IEEE Aerospace Electron. Syst. Mag. 9, 26-33 (1994).
    [CrossRef]
  2. S. M. Chai, A. Gentile, W. E. Lugo-Beauchamp, J. Fonseca, J. L. Cruz-Rivera, and D. S. Wills, "Focal-plane processing architectures for real-time hyperspectral image processing," Appl. Opt. 39, 835-849 (2000).
    [CrossRef]
  3. A. W. Lohmann, "Scaling laws for lens systems," Appl. Opt. 28, 4996-4998 (1998).
    [CrossRef]
  4. J. Jahns and A. Huang, "Planar integration of free space optical components," Appl. Opt. 28, 1602-1605 (1989).
    [CrossRef] [PubMed]
  5. W. H. Wong and E. Y. B. Pun, "Exposure characteristics and three-dimensional profiling of SU8C resist using electron beam lithography," J. Vac. Sci. Technol. B 19, 732-735 (2001).
    [CrossRef]
  6. MicroChem Corporation, Newton, MA.
  7. M. G. Moharam and T. K. Gaylord, "Rigorous coupled-wave analysis of metallic surface-relief gratings," J. Opt. Soc. Am. A 3, 1780-1787 (1986).
    [CrossRef]
  8. Shipley Co., L. L. C, Marlborough, MA.
  9. Canyon Materials, Inc., San Diego, CA.
  10. Suss MicroTec AG, Munich.

2001

W. H. Wong and E. Y. B. Pun, "Exposure characteristics and three-dimensional profiling of SU8C resist using electron beam lithography," J. Vac. Sci. Technol. B 19, 732-735 (2001).
[CrossRef]

2000

1998

1994

R. J. Birk and T. B. McCord, "Airborne hyperspectral sensor systems," IEEE Aerospace Electron. Syst. Mag. 9, 26-33 (1994).
[CrossRef]

1989

1986

Appl. Opt.

IEEE Aerospace Electron. Syst. Mag.

R. J. Birk and T. B. McCord, "Airborne hyperspectral sensor systems," IEEE Aerospace Electron. Syst. Mag. 9, 26-33 (1994).
[CrossRef]

J. Opt. Soc. Am. A

J. Vac. Sci. Technol. B

W. H. Wong and E. Y. B. Pun, "Exposure characteristics and three-dimensional profiling of SU8C resist using electron beam lithography," J. Vac. Sci. Technol. B 19, 732-735 (2001).
[CrossRef]

Other

MicroChem Corporation, Newton, MA.

Shipley Co., L. L. C, Marlborough, MA.

Canyon Materials, Inc., San Diego, CA.

Suss MicroTec AG, Munich.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (9)

Fig. 1
Fig. 1

(Color online) Optical architecture of adaptive space-variant microspectrometer. (a) Full system including fore-optics and microspectrometer array; (b) expanded view of single microspectrometer (diffraction angle bend not shown).

Fig. 2
Fig. 2

Grating arrangement in pupil plane of microspectrometer. (a) Maximum spectral resolution; (b) maximum spatial resolution; (c) mixed mode.

Fig. 3
Fig. 3

(Color online) Schematic of the imaging spectrometer: (a) 3D view; (b) side view, showing two spectral components.

Fig. 4
Fig. 4

(Color online) (a) Atomic force micrograph of SU-8 blazed grating with a 4 μm pitch. (b) Calculated diffraction efficiency of blazed grating using rigorous coupled-wave theory.

Fig. 5
Fig. 5

(Color online) Optical micrograph of HEBS micromirrors, along with two-dimensional and one-dimensional point-spread function. (a) Before reflow, (b) after reflow. The diameter of the HEBS mirror shown is 1.4 mm .

Fig. 6
Fig. 6

(Color online) MEMS mirror structure. (a) Design, (b) SEM of single isolated mirror.

Fig. 7
Fig. 7

(Color online) Mirror tilt angle is inferred by observing the motion of a laser spot reflected from one of the MEMS mirrors at different drive voltages.

Fig. 8
Fig. 8

(Color online) Measured point-spread function: (a) parallel to the slit; (b) perpendicular to the slit.

Fig. 9
Fig. 9

Measured and reference spectra of the He discharge tube.

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

Δ y = f λ w ,
λ Δ λ = f p ( f / number ) ,

Metrics