Abstract

The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio.

© 2007 Optical Society of America

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References

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  1. A. Wang, Y. Liu, and B. Ward, "Prototype fiber-optic acoustic partial discharge sensor: lessons-learned documentation and field test," Tech. Rep. 1001768 (Electric Power Research Institute, 2002).
  2. B. Yu, D. W. Kim, J. Deng, H. Xiao, and A. Wang, "Fiber Fabry-Perot sensors for detection of partial discharges in power transformers," Appl. Opt. 42, 3241-3250 (2003), and references therein.
  3. M. Yu and B. Balachandran, "Acoustic measurements using a fiber optic sensor system," J. Intell. Mater. Syst. Struct. 14, 409-414 (2003).
  4. A. Saran "MEMS based Fabry-Perot pressure sensor and non-adhesive integration on optical fiber by anodic bonding," Ph.D. dissertation (University of Cincinnati, 2004).
  5. S. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, "An ultra-sensitive optical MEMS sensor for partial discharge detection," J. Micormech. Microeng. 15, 521-527 (2005).
  6. J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, "A novel temperature-insensitive optical fiber pressure sensor for harsh environments," IEEE Photon. Technol. Lett. 17, 870-872 (2005).
  7. Y. Zhu and A. Wang, "Miniature fiber-optic pressure sensor," IEEE Photon. Technol. Lett. 17, 447-449 (2005).
  8. C. Fabry and A. Perot, "Théorie et applications d'une nouvelle méthode de Spectroscopie Interferentielle," Ann. Chim. Phys. 16, 115-144 (1899).
  9. M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, 1980), p. 327.
  10. S. Timoshenko, Strength of Materials, Part 2, 3rd ed. (Van Nostrand, 1983), p. 97.
  11. M. di Giovanni, Flat and Corrugated Diaphragm Design Handbook (Marcel Dekker, 1982).
  12. B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (Wiley-Interscience, 1991).
  13. A. Yariv, Optical Electronics, 4th ed. (Holt, Rinehart & Winston, 1991).
  14. D. Marcus, "Loss analysis of single-mode fiber splices," Bell Syst. Tech. J. 56, 703-718 (1977).

2005

S. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, "An ultra-sensitive optical MEMS sensor for partial discharge detection," J. Micormech. Microeng. 15, 521-527 (2005).

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, "A novel temperature-insensitive optical fiber pressure sensor for harsh environments," IEEE Photon. Technol. Lett. 17, 870-872 (2005).

Y. Zhu and A. Wang, "Miniature fiber-optic pressure sensor," IEEE Photon. Technol. Lett. 17, 447-449 (2005).

2003

M. Yu and B. Balachandran, "Acoustic measurements using a fiber optic sensor system," J. Intell. Mater. Syst. Struct. 14, 409-414 (2003).

B. Yu, D. W. Kim, J. Deng, H. Xiao, and A. Wang, "Fiber Fabry-Perot sensors for detection of partial discharges in power transformers," Appl. Opt. 42, 3241-3250 (2003), and references therein.

1977

D. Marcus, "Loss analysis of single-mode fiber splices," Bell Syst. Tech. J. 56, 703-718 (1977).

1899

C. Fabry and A. Perot, "Théorie et applications d'une nouvelle méthode de Spectroscopie Interferentielle," Ann. Chim. Phys. 16, 115-144 (1899).

Ann. Chim. Phys.

C. Fabry and A. Perot, "Théorie et applications d'une nouvelle méthode de Spectroscopie Interferentielle," Ann. Chim. Phys. 16, 115-144 (1899).

Appl. Opt.

Bell Syst. Tech. J.

D. Marcus, "Loss analysis of single-mode fiber splices," Bell Syst. Tech. J. 56, 703-718 (1977).

IEEE Photon. Technol. Lett.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, "A novel temperature-insensitive optical fiber pressure sensor for harsh environments," IEEE Photon. Technol. Lett. 17, 870-872 (2005).

Y. Zhu and A. Wang, "Miniature fiber-optic pressure sensor," IEEE Photon. Technol. Lett. 17, 447-449 (2005).

J. Intell. Mater. Syst. Struct.

M. Yu and B. Balachandran, "Acoustic measurements using a fiber optic sensor system," J. Intell. Mater. Syst. Struct. 14, 409-414 (2003).

J. Micormech. Microeng.

S. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, "An ultra-sensitive optical MEMS sensor for partial discharge detection," J. Micormech. Microeng. 15, 521-527 (2005).

Other

A. Wang, Y. Liu, and B. Ward, "Prototype fiber-optic acoustic partial discharge sensor: lessons-learned documentation and field test," Tech. Rep. 1001768 (Electric Power Research Institute, 2002).

A. Saran "MEMS based Fabry-Perot pressure sensor and non-adhesive integration on optical fiber by anodic bonding," Ph.D. dissertation (University of Cincinnati, 2004).

M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, 1980), p. 327.

S. Timoshenko, Strength of Materials, Part 2, 3rd ed. (Van Nostrand, 1983), p. 97.

M. di Giovanni, Flat and Corrugated Diaphragm Design Handbook (Marcel Dekker, 1982).

B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (Wiley-Interscience, 1991).

A. Yariv, Optical Electronics, 4th ed. (Holt, Rinehart & Winston, 1991).

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