Abstract

A novel inorganic–organic hybrid silica–zirconia solgel material, which can generate $10\text{\hspace{0.17em} μm}$ thick film in a single spin-coatingprocess, has been developed and employed in the fabrication of an embedded dielectric channel waveguide on a silica buffer layer of a silicon substrate. The fabricated channel waveguide core had steep ridge walls, good smoothness, and high robustness, and the novel sol synthesisenabled a precise control of the geometrical and optical parameters of the embedded dielectric channel waveguide. In the $\text{1 .55 μm}$ telecommunication window, the fundamental modes ${\text{TE}}_{\text{00}}$ and ${\text{TM}}_{\text{00}}$ in the embedded channel waveguide had low transmission losses of $0.40\pm 0.03\text{dB}/\text{cm}$ and $0.59\pm 0.03\text{dB}/\text{cm}$, respectively.

© 2007 Optical Society of America

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